제어로봇시스템학회:학술대회논문집
- 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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- Pages.464-467
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- 1997
Nonlinearity를 갖는 Micro Electorstatic Actuator의 초정밀 추종제어
High precision tracking contorl algorithm for micro electrostatic actuator with nonlinearity
초록
In this paper, a high precision track following control algorithm is proposed for micro electrostatic actuator considering of the application for hard disk drive. The micro electrostatic actuator proposed has nonlinear voltage-displacement characteristic in a working range of 0.8.mu.m and has uni-directional movement. Mid range reference and open-loop bias are proposed for the revision of negative position error, and inverse model for linearization.