대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 하계학술대회 논문집 C
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- Pages.1555-1559
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- 1997
플라즈마 중합법에 의해 제작된 PHENYL ISOTHIOCYANATE 박막의 화학적구조와 광전도 특성
The Chemical Structure and Photoconductivity Properties of Thin Films Fabricated by Plasma Polymerization Method
- 김성오 (인하대학교 공과대학 전기공학과) ;
- 박복기 (전북산업대 공과대학 전기공학과) ;
- 김두석 (전북산업대 공과대학 전기공학과) ;
- 박진교 (전북산업대 공과대학 전기공학과) ;
- 최충석 (전기안전시험연구소) ;
- 이덕출 (인하대학교 공과대학 전기공학과)
- Kim, Sung-O (Dept. of Electrical Eng., Inha University) ;
- Park, Bok-Kee (Dept. of Electrical Eng., Chonbook San-up University) ;
- Kim, Du-Seok (Dept. of Electrical Eng., Chonbook San-up University) ;
- Park, Jin-Kyo (Dept. of Electrical Eng., Chonbook San-up University) ;
- Choi, Chung-Seong (Elec. Safety Lab. Research Institute) ;
- Lee, Duck-Chool (Dept. of Electrical Eng., Inha University)
- 발행 : 1997.07.21
초록
The thin films were obtained by plasma polymerization of phenyl isothiocyanate. Polymerizations were carried out in rf(13.56[MHz]) glow discharge generated in an inter-electrode capacitively coupled gas flow system. It was found that this monomer produces uniform films with a wide range of thicknesses, from hundreds of nanometers to tens of micrometers. The deposition rate appeared to be dependent on the substrate distance from the monomer inlet. The IR data revealed significant decrease in -NCS groups content in the polymer as compared with the monomer spectrum and indicated for the appearance of new absorption bands corresponding to the -CN and C-H aliphatic groups. The soluble fraction by GC was found to be composed of numerous low molecular-weight compounds.
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