대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 하계학술대회 논문집 C
- /
- Pages.1280-1282
- /
- 1997
레이저 CVD법에 의해 퇴적된 OXYNITRIDE막의 기판세정법에 따른 특성에 관한 연구
A study on the electrical properties by the effect of wafer cleaning of OXYNITRIDE films deposited by Laser CVD
- Kim, C.D. (Dept. of Electrical Engineering, Korea Univ.) ;
- Lee, S.K. (Dept. of Electrical Engineering, Korea Univ.) ;
- Kim, T.H. (Dept. of Electrical Engineering, Korea Univ.) ;
- Sung, Y.K. (Dept. of Electrical Engineering, Korea Univ.)
- 발행 : 1997.07.21
초록
The oxynitride films were photo-chemically deposited by ArF(wave length: 193nm) excimer laser CVD used to excite and dissociate gas phases
키워드