대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1997년도 하계학술대회 논문집 C
- /
- Pages.1277-1279
- /
- 1997
Al-Cu막의 플라즈마 식각후 부식 억제에 관한 연구
A STUDY ON THE ANTI-CORROSION OF Al-Cu AFTER PLASMA ETCHING
- Kim, Hwan-Jun (Chung-Ang Univ) ;
- Kim, Chang-Il (An-Yang Univ) ;
- Kwon, Kwang-Ho (Han-Seo Univ) ;
- Kim, Tae-Hyong (Yeo-Ju Jr. College) ;
- Seo, Yong-Jin (Dae-Bul Univ) ;
- Chang, Eui-Goo (Chung-Ang Univ)
- 발행 : 1997.07.21
초록
In this study, the mechanism underlying the corrosion problem have been investigated using X-ray photoelectron spectroscopy(XPS) and scanning electron microscopy(SEM), AES(Auger electron spectroscopy) In regard to the removal of Al-Cu corrsion, the subsequent treatment of the
키워드