한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1996년도 재료학회 추계학술발표회
- /
- Pages.103-104
- /
- 1996
Characterizations of fluoridated GaAs surface under remote $SF_6$ plasma
- Suh, Kyung-Soo (Semiconductor Technology Division, ETRI) ;
- Park, Sung-Woo (Semiconductor Technology Division, ETRI) ;
- Kim, Kwang-Ho (Department of Semiconductor Engineering, Cheong-Ju Univ.)
- 발행 : 1996.11.01