Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.89-89
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- 1996
A study on heat treatment of a-C:H thin films deposited by PECVD
PECVD(Plasma enhanced chemical vapor deposition)방법에 의한 a-C:H 박막의 열처리에 관한 연구
Abstract
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