한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1996년도 재료학회 추계학술발표회
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- Pages.80-81
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- 1996
DLI 방법에 의한 TiN 기판상의 구리 화학증착 특성
Growth Behavior of MOCVD-Cu on TiN Substrates Using Direct Liquid Injection Method
- Jun, Chi-Hoon (Semiconductor Division, ETRI) ;
- Kim, Young-Tae (Semiconductor Division, ETRI) ;
- Baek, Jong-Tae (Semiconductor Division, ETRI) ;
- Yoo, Hyung-Joun (Semiconductor Division, ETRI) ;
- Kim, Dai-Ryong (Dept. of Metallurgical Engineering, Kyungpook National University)
- 발행 : 1996.11.01