Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.45-45
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- 1996
A new intermetal dielectric with low dielectric constant : $SiO_2$ aerogel film
저유전상수를 갖는 새로운 금속 층간 절연박막 : $SiO_2$ aerogel film
Abstract
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