Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1996.11a
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- Pages.46-46
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- 1996
Study on the Film Characteristics of Fluorinated Silicon Oxides by ECR CVD
ECR CVD 방법에 의한 Fluorinated Silicon Oxide의 증착특성 연구
Abstract
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