Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)

The Korean Vacuum Society (한국진공학회)
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STUDY OF NON-MONOTONOUS EEDF IN LOW PRESSURE PLASMA SOURCES

  • AntonovaT.B. (RIAME MAI) ;
  • BougrovG.E. (RIAME MAI) ;
  • BougrovaA.I. (MIREA) ;
  • Choi, W.K. (Division of Ceramics) ;
  • GontcharovL.A. (Division of Ceramics) ;
  • Jung, H.J. (Division of Ceramics) ;
  • Koh, S.K. (Division of Ceramics) ;
  • KondraninS.G. (Division of Ceramics) ;
  • KralkinaE.A. (MIREA) ;
  • SitinE.S. (MIREA) ;
  • ObukhovV.A (MIREA)
  • Published : 1996.06.01
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Abstract

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