Proceedings of the Korean Vacuum Society Conference (한국진공학회:학술대회논문집)
- 1996.06a
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- Pages.150-150
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- 1996
Construction and Investigation of Metal Ion Source for Partially Ionized Beam deppostion
- Jang, H.G. (Devision of Electro-Optic Ceramics, Korea Institute of Science and Technology) ;
- Choi, W.K. (Devision of Electro-Optic Ceramics, Korea Institute of Science and Technology) ;
- Kondranine, S.G. (Devision of Electro-Optic Ceramics, Korea Institute of Science and Technology) ;
- E.A.Kralkina (Devision of Electro-Optic Ceramics, Korea Institute of Science and Technology) ;
- Jung, H.J. (Devision of Electro-Optic Ceramics, Korea Institute of Science and Technology) ;
- Koh, S.K. (Devision of Electro-Optic Ceramics, Korea Institute of Science and Technology)
- Published : 1996.06.01
Abstract
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