대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1996년도 하계학술대회 논문집 C
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- Pages.1532-1535
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- 1996
Plasma CVD에 의한 DLC 박막 제작시 수소가스의 영향
Effects of hydrogen gas on the properties of DLC films deposited by plasma CVD
- Moon, Yang-Sik (LG Electronics) ;
- Lee, Jai-Sung (Dept. of Metallurgy & Material Science, Hanyang University) ;
- Lee, Hae-Sung (Dept. of Electrical Engineering, Hanyang University) ;
- Lee, Jae-Yup (Dept. of Electrical Engineering, Hanyang University) ;
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Park, Jin-Seok
(Dept. of Electrical Engineering, Hanyang University)
- 발행 : 1996.07.22
초록
Diamond-like carbon (DLC) films have been prepared by a widely-used plasma CVD with an rf (13.56MHz) plasma of
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