Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1995.11a
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- Pages.88-88
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- 1995
Preparation and Characteristics of $TiO_2$ Thin Films Prepared by Plasma Enhanced Chemical Vapor Deposition
플라즈마 화학증착법을 이용한 $TiO_2$ 박막제조 및 특성분석
Abstract
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