한국정밀공학회:학술대회논문집 (Proceedings of the Korean Society of Precision Engineering Conference)
- 한국정밀공학회 1995년도 추계학술대회 논문집
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- Pages.1063-1066
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- 1995
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- 2005-8446(pISSN)
정전형 마이크로 액튜에이터의 정밀위치제어
Position Control of Electrostatic Microactuator
초록
This paper presents a precition control of an electrostatic microactuator. For the generation of sufficient electrostatic force, a donse comb-type electrostatic microactuator is designed and manufactureed via MEMS (micro-electro-mechanical systems) process. The nonlinear plant and the linear plant of the microactuator are established through the comparison of experimental results and simulation results. A feedforward controller is designed via MATLAB simulation using the inverse function of the nonlinear plant. the experiment for the precise position tracking control is undertaken to show the control efficiency of the proposed controller.
키워드