한국공작기계학회:학술대회논문집 (Proceedings of the Korean Society of Machine Tool Engineers Conference)
- 한국공작기계학회 1995년도 추계학술대회 논문집
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- Pages.18-23
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- 1995
초정밀 조미동 위치결정기구의 설계 및 제어에 관한 연구
A study on the design and control super-precision coarse and fine positioning apparatus
초록
The study was carried out to develope a precision positioning apparatus, consisting of DC servo motor and piezoelectric actuator. This system is composed of fine and coarse apparatus, measurement system and control system, Piezoelectric actuator is designed for fine positioning. Coarse positioning using lead screw is drived by DC servo motor. Control system output a signal from laser interferometer and microsense to amplifier of DC servo motor and piezoelectric actuator after digital signal processing(DSP). Resolution of this apparatus measure with laser interferometor and microsense
키워드