Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1995.07c
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- Pages.1440-1441
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- 1995
Fabrication and Characterization of Diode-Type Si Field Emitter Array
다이오드형 실리콘 전계방출소자의 제작 및 특성평가
- Park, Heung-Woo (Div. of Information and Electronics Technonlogy, KIST) ;
- Ju, Byeong-Kwon (Div. of Information and Electronics Technonlogy, KIST) ;
- Kim, Seong-Jin (Div. of Information and Electronics Technonlogy, KIST) ;
- Jung, Jae-Hoon (Div. of Information and Electronics Technonlogy, KIST) ;
- Park, Jung-Ho (Dept. of Electronics, Korea Univ.) ;
- Oh, Myung-Hwan (Div. of Information and Electronics Technonlogy, KIST)
- 박흥우 (한국과학기술연구원 정보전자연구부) ;
- 주병권 (한국과학기술연구원 정보전자연구부) ;
- 김성진 (한국과학기술연구원 정보전자연구부) ;
- 정재훈 (한국과학기술연구원 정보전자연구부) ;
- 박정호 (고려대학교 전자공학과) ;
- 오명환 (한국과학기술연구원 정보전자연구부)
- Published : 1995.07.20
Abstract
We fabricated diode-type silicon field emitter array device and tested the current-voltage characteristics. Silicon oxide layer having the thickness of
Keywords