한국재료학회:학술대회논문집 (Proceedings of the Materials Research Society of Korea Conference)
- 한국재료학회 1994년도 춘계 학술발표 강연 및 논문 개요집
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- Pages.165-166
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- 1994
The Analysis of N Component in Thin Oxide Film Thermally Grown by $NH_3$ Oxidation
- Kim, Young-Cho- (Dept. of Electronic Engineering, Seoul City Univ.) ;
- Kim, Chul-Ju- (Dept. of Electronic Engineering, Seoul City Univ.)
- 발행 : 1994.05.01
초록
The depth profiles of the as-grown and the annealed NH
키워드