Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1994.07a
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- Pages.103-105
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- 1994
Design and Fabrication of the Electrostatic Inchworm Microactuator
정전형 inchworm 마이크로 액튜에이터의 설계 및 제작
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Lee, Seung-Ki
(Dept. of Electrical Eng., Dankook Univ.)
;
- Esashi, Masayoshi (Dept. of Mechatronics and Precision Eng., Tohoku Univ.)
- Published : 1994.07.21
Abstract
A novel structure of a lineal microactuator has been designed and analyzed. The proposed structure can overcome serious problems from which conventional linear microactuators suffer, primarily due to the moving principle that is the repetition of attachment and detachment of the moving part to the fixed part. According to the calculated results, the proposed microactuator can generate force of a few mN and the moving sled of 13 cm/min under the condition of 100 volts and the frequency of 1.4 kHz.
Keywords