Proceedings of the Materials Research Society of Korea Conference (한국재료학회:학술대회논문집)
- 1993.11a
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- Pages.18-18
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- 1993
SELECTIVE AREA DEPOSITION OF BORON AND DELTA DOPING OF SILICON BY SYNCHROTRON RADIATION FOR ULSI APPLICATION
- Lee, Sunwoo- (Samsung Electro-Mechanics Co., Research & Development Center, Laboratory for Thin Film Devices) ;
- Peter-A.Dowben (University of Nebraska, Department of Physics and Center for materials Research & Analysis, Lincoln, USA)
- Published : 1993.11.01
Abstract
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