대한전기학회:학술대회논문집 (Proceedings of the KIEE Conference)
- 대한전기학회 1993년도 하계학술대회 논문집 B
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- Pages.1268-1270
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- 1993
Short channel SONOSFET 비휘발성 기억소자의 Si-$SiO_2$ 계면특성에 관한 연구
A Study on the Characteristics of Si-$SiO_2$ interface in Short channel SONOSFET Nonvolatile Memories
- Kim, Hwa-Mok (Dept. of Elctronic Materials Engineering, Kwangwoon Univ.) ;
- Yi, Sang-Bae (Dept. of Elctronic Materials Engineering, Kwangwoon Univ.) ;
- Seo, Kwang-Yell (Dept. of Elctronic Materials Engineering, Kwangwoon Univ.) ;
- Kang, Chang-Su (Dept. of Electronics, Yuhan College)
- 발행 : 1993.07.18
초록
In this study, the characteristics of Si-
키워드