압전소자로 구동되는 변위확대기구에 대한 기초실험

An Experiment of the Displacement Amplifying Units(DAUs) Driven by the Piezo Actuators

The displacement amplifying units(DAUs) of the flexure hinge mechanism are used to amplify the displacements from the Piezo actuators using the principle of a lever. We fabricate for two step DAUs with the SUS304(stainless steel) and experiment them. The fabricated four DAUs have all the hinges aligned to a straight line, and differ in the first step ideal gain($4{\times}10,\;6{\times}10,\;8{\times}10,\;10{\times}10$). We measure the input and the output displacements to get the real amplifying gain. The resonant frequencies of these DAUs are also measured. The experimental results are compared with those of the theoretical formula and with those of the numerical analyses.