Electrical and Optical Properties of In-doped CdS Films Prepared by Vacuum Evaporation

진공증착법으로 제조한 CdS:In 박막의 전기 및 광학적 특성

  • 김시열 (한국과학기술원 전자재료공학과) ;
  • 임호빈 (한국과학기술원 전자재료공학과)
  • Published : 1992.05.01

Abstract

In-doped CdS thin films have been deposited at 150$^{\circ}C$ by simultaneous thermal evaporation of CdS and In. Deposition rate and film thickness were 8A/sec and about 1um, respectively. Indium doping concentration of films varied as Indium source temperature from 500$^{\circ}C$ to 700˚. Properties of In-CdS films have been investigatied by measurements of electrical resistivity, Hall effect, X-ray diffraction and optical trasmission spectra. The conductivity of these films was always n-type. The resistivity, carrier concentration, mobility and optical band gap dependence on Indium source temperature are reported. Carrier concentration and mobility of In-CdS films increased with increasing Indium source temperature: then they decreased. The variation of the optical band gap of In-CdS thin films are related to carrier concentration.

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