Proceedings of the Korean Institute of Communication Sciences Conference (한국통신학회:학술대회논문집)
- 1983.04a
- /
- Pages.45-47
- /
- 1983
ITO박막 반도체 고저항 소자의 제작 및 측정
Abstract
In integrated circuit, for a saving in total chip area per circuit, stably high value resistor was fabricated. Hence this paper explained that the measurement and fabrication of high value semiconductor resistor using ITO thin film. It is also used special material and new method fabrication.
Keywords