• Title/Summary/Keyword: x-ray diffractometry

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Dielectric Characteristics of $Al_2O_3$ Thin Films Deposited by Reactive Sputtering

  • Park, Jae-Hoon;Park, Joo-Dong;Oh, Tae-Sung
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.100-100
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    • 2000
  • Aluminium oxide (Al2O3) films have been investigated for many applications such as insulating materials, hard coatings, and diffusion barriers due to their attractive electrical and mechanical properties. In recent years, application of Al2O3 films for dielectric materials in integrated circuits as gates and capacitors has attracted much attention. Various deposition techniques such as sol-gel, metalorganic decomposition (MOD), sputtering, evaporation, metalorganic chemical vapor deposition (MOCVD), and pulsed laser ablation have been used to fabricate Al2O3 thin films. Among these techniques, reactive sputtering has been widely used due to its high deposition rate and easy control of film composition. It has been also reported that the sputtered Al2O3 films exhibit superior chemical stability and mechanical strength compared to the films fabricated by other processes. In this study, Al2O3 thin films were deposited on Pt/Ti/SiO/Si2 and Si substrates by DC reactive sputtering at room temperature with variation of the Ar/O2 ratio in sputtering ambient. Crystalline phase of the reactively sputtered films was characterized using X-ray diffractometry and the surface morphology of the films was observed with Scanning election microscopy. Effects of Th Ar/O2 ratio characteristics of Al2O3 films were investigated with emphasis on the thickness dependence of the dielectric properties. Correlation between the dielectric properties and the microstructure was also studied

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Analysis of the microstructure of reactively sputtered Ta-N thin films (반응성 스퍼터링방법으로 증착된 Ta-N 박막의 미세구조 분석)

  • 민경훈;김기범
    • Journal of the Korean institute of surface engineering
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    • v.27 no.5
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    • pp.253-260
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    • 1994
  • Ta-N films were reactively sputter deposited by dc magnetron sputtering from a Ta target with a various Ar-N, gas ratio. Electrical resistivity of pure Ta film was 150$\mu$$\Omega$cm and decreased initially with nitrogen addition, and then increased to a value of 220$\mu$$\Omega$-cm~260$\mu$$\Omega$-cm at 9%~23% nitrogen partial flow. Rutherford backscattering spectrometry(RBS) and Auger electron spectroscopy (AES) analysis show that nitrogen content in the film is increased with the nitrogen partial flow. The film contains 58at.% nitrogen at 36% nitrogen partial flow. Both the phase and the microstructure of the as-deposisted films were investigated by x-ray diffractometry(XRD) adn transmission electron microscopy (TEM) at various nitrogen content. The phase of pure Ta film is identified as $\beta$-Ta with a 200$\AA$~300$\AA$ grain size. The phase of Ta film is changed to bcc-Ta as small amount of nitrogen is added. Crystalline Ta2N film was deposited at 24at.% nitrogen content. Amorphous phase is formed over a range of nitrogen content from about 33at.% to 35at.% while crystalline fcc-TaN is observed to form at 39at.%~48at.% nitrogen content.

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Structural and Magnetic Properties of Co-Mn Ferrite Prepared by a Sol-gel Method

  • Kim, Woo Chul;Yi, Young Suk;Kim, Chul Sung
    • Journal of Magnetics
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    • v.5 no.4
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    • pp.111-115
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    • 2000
  • Ultrafine $Co_{0.9}Mn_{0.1}Fe_2O_4$ powders have been fabricated by a sol-gel method. Structural and magnetic properties of the powders were investigated by x-ray diffractometry, transmission electron microscopy (TEM), Mossbauer spectroscopy, and vibrating sample magnetometry (VSM). Co-Mn ferrite powders that were fired at and above 773 K contained only a single spinel phase and behaved ferrimagnetically. Powders fired at 673 and 723 K had a spinel structure and were mixed paramagnetic and ferrimagnetic in nature. The magnetic behavior of Co-Mn ferrite powders fired at and above 873 K showed that an increase of the firing temperature yielded a decrease in the coercivity and an increase in the saturation magnetization. The maximum saturation magnetization and coercivity of Co-Mn ferrite powders were 66.7 emu/g and 1523 Oe, respectively, Mossbauer spectra of the powder fired at 923 K were taken at various temperatures ranging from 13 to 850 K. The iron ions.at both A (tetrahedral) and B (octahedral) sites were found to be in ferric high-spin states. The Nel temperature $T_N$ was found to be 850 $\pm$ 2 K. Debye temperatures far A and B sites were found to be $\Theta_A = 757 \pm$5K and $Theta_B = 282 \pm$5 K, respectively.

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ANISOTROPY CONSTANTS OF $(Sm_{0.5}RE_{0.5})Fe_{11}Ti$ COMPOUNDS (RE=RARE EARTH)

  • Kim, H.T.;Kim, Y.B.;Park, W.S.;Kim, C.S.;Kim, T.K.;Jin, Han-Min
    • Journal of the Korean Magnetics Society
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    • v.5 no.5
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    • pp.683-686
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    • 1995
  • Using by the x-ray diffractometry(XRD), the thermomagnetic analysis(TMA), a scanning electron microscopy (SEM-EDX), we knew that the $(Sm_{0.5}RE_{0.5})Fe_{11}Ti$ (RE=Ce,Pr,Nd,Sm,Gd,Tb) compounds were formed to tetragonal $ThMn_{12}$-type structure having a uniaxial magnetocrystalline anisotropy with easy magnetization c-axis. The intrinsic magnetic properties of those were determined by fitting the two magnetization curves of experimental and calculation magnetization. The anisotropy constant $K_{1}$ of this compounds was in the range of $1.75\;-\;9.2\;MJ/m^{3}$ and approximately one order higher than $K_{2}$. $SmFe_{11}Ti$ had the highest anisotropy of $K_{1}\;=\;9.2\;MJ/m^{3}$, $K_{2}\;=\;0.4\;MJ/m^{3}$ and ${\mu}_{o}H_{A}=\;19.8\;T$ among the compounds, substitution of any other rare earth elements for Sm decreased magnetocrystalline anisotropy.

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Characterization of the Morphology and Corrosion Resistance in Electroless Ni-P-PTFE Composite Coating Prepared by Different pH Value (pH에 따른 무전해Ni-P-PTFE 복합도금의 표면형상 및 내식성에 대한 특성 연구)

  • Byoun, Young-Min;Seo, Sun-Kyo;Yoon, Jin-doo;Ryu, Chanh-Hwan;Na, Sang-Jo;Hwang, Hwan-il
    • Journal of the Korean institute of surface engineering
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    • v.52 no.3
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    • pp.156-162
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    • 2019
  • Electroless Ni-P coatings are widely used in the chemical, mechanical, and electronic industries because of their excellent wear and abrasion resistance. In this study, The influence of pH values on properties of Ni-P-PTFE composite coatings was investigated. To improve mold lubrication, Ni-P-PTFE composite coatings at different pH value were studied. The morphology and phase structure of Ni-P-PTFE composite coatings were analyzed by scanning electron microscopy(SEM) and X-ray diffractometry(XRD). The result showed that Ni-P-PTFE composite coating is composed of Ni, P and PTFE. It exhibits an amorphous structure and good Corrosion Resistance to the substrate. Ni-P-PTFE composite coatings have higher open circuit potential than that of the substrate, which obtained at pH value of 5.0 optimal integrated properties.

Prepration and Properties of Blue Tungsten Oxide Nanopowders by High Energy Ball-Mill (고 에너지 볼밀을 이용한 Blue 텅스텐산화물 나노입자의 제조와 특성)

  • Kim, Myung-Jae;Lee, Kwang-Seok;Kim, Kyung-Nam
    • Korean Journal of Materials Research
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    • v.31 no.1
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    • pp.23-28
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    • 2021
  • The purpose of this study is to prepare WO3 nanopowders by high-energy milling in mixture gas (7 % H2+Ar) with various milling times (10, 30, and 60 min). The phase transformation, particle size and light absorption properties of WO3 nanopowders during reduction via high-energy milling are studied. It is found that the particle size of the WO3 decreases from about 30 ㎛ to 20 nm, and the grain size of WO3 decreases rapidly with increasing milling time. Furthermore, the surface of the particles due to the pulverization process is observed to change to an amorphous structure. UV/Vis spectrophotometry shows that WO3 powder with increasing milling times (10, 30, 60 min) effectively extends the light absorption properties to the visible region. WO3 powder changes from yellow to gray and can be seen as a phenomenon in which the progress of the color changes to blue. The characterization of WO3 is performed by high resolution X-ray diffractometry, Field emission scanning electron microscopy, Transmission electron microscopy, UV/Vis spectrophotometry and Particle size analysis.

Thermomechanical behavior of alkali-activated slag/fly ash composites with PVA fibers exposed to elevated temperatures

  • Kim, J.S.;Lee, H.K.
    • Advances in concrete construction
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    • v.11 no.1
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    • pp.11-18
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    • 2021
  • The present study fabricated polyvinyl alcohol (PVA) fiber-reinforced alkali-activated slag/fly ash (AASF) composites with varying mixture ratios of slag and fly ash. The thermomechanical behaviors of the AASF composites exposed to 200, 400, 600, or 800℃ were evaluated by means of compressive strength test, visual observation, and fire resistance tests. X-ray diffractometry, mercury intrusion porosimetry, and thermogravimetry tests were performed to analyze the microstructure change of the AASF composites upon exposure to high temperatures. Specimens exhibited a gradual strength loss up to 600℃, while also showing a significant decrease in the strength above 600℃. The fire resistance test revealed the occurrence of an inflection point as indicated by an increase in the internal temperature at around 200℃. In addition, specimens showed the dehydration of C-S-H gel, the presence of åkermanite, gehlenite, and anorthite upon exposure to 800℃, which is associated with the formation of macropore population with pores having diameters of 1-3 ㎛ and 20-40 ㎛. Visual observation indicated that the PVA fibers mitigated the cracking and/or spalling of the specimens upon exposure to 800℃.

Real-time Transformation of FePt Nanoparticles to L10 Phase by the Gas Phase Synthesis (기상합성공정을 이용한 FePt 나노입자의 실시간 L10 상변화)

  • Lee, Ki-Woo;Lee, Chang-Woo;Kim, Soon-Gil;Lee, Jai-Sung
    • Korean Journal of Metals and Materials
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    • v.49 no.1
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    • pp.46-51
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    • 2011
  • Real-time formation of $L1_0$ phase of FePt nanoparticles in the gas phase during ultrasonic-spray pyrolysis is first discussed in the present study. Without any post heat treatment, $L1_0$ phase of FePt nanoparticles appeared at the temperature above $900^{\circ}C$ in the gas phase synthesis. X-ray diffractometry (XRD) and transmission electron microscopy (TEM) studies revealed that FePt nanoparticles less than 10 nm in size contained small volume of $L1_0$ fct phase. However, in other samples obtained at the temperature below $900^{\circ}C$, iron oxide phase co-existed and no evidence of phase transformation was found. Thus, it is anticipated that the time of flight of particles required for crystallization and phase transformation was extended according to the increase of the collision rate. Finally, magnetic properties represented by coercivity and saturation magnetization and functional groups on the particle surface were discussed based on VSM and FT-IR results.

Enhancement of the Corrosion Resistance of CrN Film Deposited by Inductively Coupled Plasma Magnetron Sputtering

  • Chun, Sung-Yong;Kim, Seong-Jong
    • Corrosion Science and Technology
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    • v.20 no.3
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    • pp.112-117
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    • 2021
  • Inductively coupled plasma magnetron sputtering (ICPMS) has the advantage of being able to dramatically improve coating properties by increasing the plasma ionization rate and the ion bombardment effect during deposition. Thus, this paper presents the comparative results of CrN films deposited by direct current magnetron sputtering (dcMS) and ICPMS systems. The structure, microstructure, and mechanical and corrosive properties of the CrN coatings were investigated by X-ray diffractometry, scanning electron microscopy, nanoindentation, and corrosion-resistance measurements. The as-deposited CrN films by ICPMS grew preferentially on a 200 plane compared to dcMS on a 111 plane. As a result, the films deposited by ICPMS had a very compact microstructure with high hardness. The nanoindentation hardness reached 19.8 GPa, and 13.5 GPa by dcMS. The corrosion current density of CrN film prepared by ICPMS was about 9.8 × 10-6 mA/cm2, which was 1/470 of 4.6 × 10-3 mA/cm2, the corrosion current density of CrN film prepared by dcMS.

Effect of graphene oxide on polyvinyl alcohol membrane for textile wastewater treatment

  • Zahoor, Awan;Naqvi, Asad A.;Butt, Faaz A.;Zaidi, Ghazanfar R.;Younus, Muhammad
    • Membrane and Water Treatment
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    • v.13 no.3
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    • pp.121-128
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    • 2022
  • A tremendous amount of energy resources is being wasted in cleaning wastewater to save the environment across the globe. Several different procedures are commercially available to process wastewater. In this work, membrane filtration technique is used to treat the textile wastewater because of its cost effectiveness and low environmental impacts. Mixed Matrix Membrane (MMM) consist of Polyvinyl Alcohol (PVA) in which Graphene Oxide (GO) was added as a filler material. Five different membranes by varying the quantity of GO were prepared. The prepared membrane has been characterized by Scanning Electron Microscopy (SEM), X-Ray Diffractometry (XRD), Fourier Transformed Infrared Spectroscopy (FTIR) and Water Contact Angle (WCA). The prepared membranes have been utilized to treat textile wastewater. The synthesized membranes are used for the elimination of total dissolve solids (TDS), total suspended solids (TSS), Methylene blue (MB) dye and copper metallic ions from textile wastewater. It is concluded that amount of GO has direct correlation with the quality of wastewater treatment. The maximum removal of TDS, TSS, MB and copper ions are found to be 7.42, 23.73, 50.53 and 64.5% respectively and are achieved by 0.02 wt% PVA-GO membrane.