• Transactions on Electrical and Electronic Materials
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• v.13 no.3
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• pp.139-143
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• 2012

Optical emission spectroscopy (OES) is often used for real-time analysis of the plasma processes. OES has been suggested as a primary plasma process monitoring tool. It has the advantage of non-invasive in-situ monitoring capability but selecting the proper wavelengths for the analysis of OES data generally relies on empirically established methods. In this paper, we propose a practical method for the selection of OES wavelength peaks for the analysis of plasma etch process and this is done by investigating reactants and by-product gas species that reside in the plasma etch chamber. Wavelength selection criteria are based on the standard deviation and correlation coefficients. Moreover, chemical actinometry is employed for the normalization of the selected wavelengths. We also present the importance of chemical actinometry of OES data for quantitative analysis of plasma. Then, the suggested OES peak selection method is employed.. This method is used to find out the reason behind abnormal etching of PR erosion during a series of $SiO_2$ etch processes using the same recipe. From the experimental verification, we convinced that OES is not only capable for real-time detection of abnormal plasma process but it is also useful for the analysis of suspicious plasma behavior.

• Laser Solutions
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• v.2 no.2
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• pp.18-26
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• 1999

An innovative real-time weld monitoring technique using chromatic filtering of the thermal radiation from a weld pool is developed. The thermal radiation from the weld pool is focused on an aperture and the transmitted thermal radiation is monitored at two wavelengths with high-speed single-element detectors. Due to the chromatic aberration introduced in the focusing optics, the transmittance curve of thermal radiation varies by the wavelength. Owing to this difference in the transmittance, the local variation of thermal radiation from the weld pool can be monitored by processing the two spectroscopic signals from two detectors. In this paper, the algorithms to monitor the laser power on the weld specimen and the focus shift we investigated and the performances of laser power and focus monitoring are shown for a pulsed Nd:YAG laser welding. The monitoring of the weld pool size variation is also discussed.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.8
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• pp.1220-1225
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• 2009

In this paper, a tunable fiber feedback laser based on the use of Sagnac loop filter and fiber Bragg grating (FBG) is proposed. The Sagnac loop filter using a high birefringence fiber provides precise 0.33-nm channel spacing as a multi-wavelength grid filter. Ni-Cr wire wound on the FBG is useful to induce the thermo-optic effect of the fiber. Two types of FBG structures, which have a different length of wire, are demonstrated to show the wavelength shift and separation. To tune FBG by resistant heat, some current is supplied into the wire. When the wavelength matched with one of the cavity modes of Sagnac loop filter, the mode-locked lasing is occurred. The electrical power sensitivity of the resonant wavelength is measured to 1.75pm/mW. This laser configuration can be applied the electrical power system for monitoring the power fluctuation.

• Journal of Sensor Science and Technology
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• v.26 no.1
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• pp.44-49
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• 2017

In this paper, the automatic sweep flattening for wavelength swept laser of SS-OCT has implemented. Through its performance test applied to the laser, 50 nm flat sweeping range, ${\pm}0.5dB$ fluctuation range, 22 sec the time required, and 10 mW average optical power were obtained. This shows that the realized automatic process can replace the inconvenient manual operation used for polarization control of current sweeping laser. Additionally it cuts costs for optical spectrum analyzer necessary to sweep monitoring.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.2
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• pp.330-335
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• 2009

A fiber-optic liquid level sensor based on bending cantilever beam has been proposed. A fiber Bragg grating(FBG) embedded in the cantilever beam is used to sensing elements. The basic concept is elongation and constriction of the FBG corresponding to the liquid level variation. The best FBG position on the cantilever for obtaining the high sensitivity was 4 cm from the fixing point. When the liquid level moves up and down vertically, the Bragg wavelength is linearly shifted. But, the wavelength sensitivity of the FBG installed on the upper side of cantilever was four times better than that of the FBG equipped in the lateral side due to the difference of unit strain applied to the FBG. Intensity demodulation using the low-cost edge filter is used to interrogate the Bragg wavelength through converting the wavelength signals into the optical intensity ones. Experiment results show that the electrical output is exponentially proportional to the liquid level. But, it should be overcome for applying to the ships.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.22 no.3
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• pp.218-221
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• 2009

This paper reports on measurement method for the fiber optic strain monitoring of overhead contact line systems of trains, We used FBG (Fiber Bragg Grating) sensors to measure the strain variation of overhead contact line. FBG sensors can sensitively measure the variation of strain and! or temperature by the shift wavelength of reflected wave according to the lattice variation during the measurement. FBG sensor were attached on the contact line and connected to the monitoring system with optical fibers. The monitering system with FBG sensors showed very good sensitivity to measuring strain variation and this system could be applied to the overhead contact line of KTX (Korea Train eXpress).

• Proceedings of the Optical Society of Korea Conference
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• 2004.07a
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• pp.132-133
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• 2004

• Journal of Welding and Joining
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• v.33 no.4
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• pp.7-16
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• 2015

New lasers such as high power, high brightness and short wavelength laser are using diverse industry. Also new technologies are developing actively to solve various issues such as spattering, process monitoring, deep penetration and key-hole stability. ICALEO is the international congress where recent technology for laser material processing and laser system are present. At 2014, it was held at San Diego in USA and more than 260 papers were presented from 28 country. The effect of the laser beam shape such as Gaussian like and top-hat was investigated on acoustic emission signal and pore formation in welding. Inline penetration depth was measured with ICI(Inline Coherent Imaging) technique and the data was verified with real time X-ray image on laser welding. The laser welding performance at low pressure environment was evaluated for the thick plate alloy steel. UV laser was used to weld various metals such as Cu, Aluminum, steel and stainless steel. The effect of the wavelength of the laser on the formation of the wave at the wall of the key-hole front and the absorptivity was investigated.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.24 no.2
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• pp.86-91
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• 2010

We constructed a quasi-distributed fiber-optic sensor network for the safety monitoring in power systems. It is possible to construct many of FBG sensors in a line and to be immune from electromagnetic noise. For demodulation analysis of reflected wavelength from FBG sensor, we proposed a simple and fast system using a InGaAs photo-diode array and a holographic diffraction grating. For accuracy improvement of the proposed demodulation system, we applied a Gaussian line-fitting algorithm. We obtained about 4[pm] of wavelength resolution and stability.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.25 no.3B
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• pp.504-509
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• 2000

This paper presents a noble operation and maintenance system for the optical subscriber loops and its feasibility through several experiments. In this system, a broadband CW (Continuous Wave) light source I used as monitoring of testing signals. and a FGF(Fiber Grating Filter) of which reflective wavelength is independent, is inserted somewhere in each subscriber loop for the reflection of monitoring of testing signals. The propose of the system is quick decision. whether the loop is just fault or not. rather than detailed information of loop state. At present, most of operation and maintenance system for the optical subscriber loops adopts OTDR(optical time domain reflectometer) for testing function. the OTDR is useful for detailed test, but not adequate for simple test because of long testing time . And it is difficult to test PON network by using general OTDR that has a single-wavelength light source. Compared to using OTDR, the proposed system can afford to shorten testing time and to test PON network. Moreover, we can cut down the system cost by simplifying circuits of the optical light sources. Our results show that the proposed system operates well according to the purpose mentioned above.