• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.25-31
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• 2021

The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.236-239
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• 2005

본 연구에서는 정밀 측정/검사장비의 운영상 발생하는 에러의 원인을 규명하기 위함이다. C/R에 사용되어지는 정밀측정/검사장비는 장비 기초에 대하여 진동허용규제치를 장비 제작업체 제공한다. 이에 C/R 구조 및 장비 기초에 대하여 진동원 차단 방안등을 수행하게된다. 이러한 진동허용규제치를 만족시키기 위한 방안을 수행함에도 공조 소음등과 같은 요인에 의한 장비의 운영상 발생하는 진동과 관련된 에러를 규명하고 이를 제어하기 위한 연구를 수행하였다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1246-1251
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• 2000

High level random vibration environments induced while launching of spacecraft can damage sensitive electronic equipment very rapidly, unless the equipment is properly packaged. Thus very careful consideration on the launch environment, especially for high level random vibration, is required in the design stage of electronic equipment of spacecraft. This paper describes the development process of Solar Array Regulator for KOMPAT-2, which is designed and tested by Korean engineers. Both analytical and experimental techniques are introduced in this paper.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.3 s.108
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• pp.307-312
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• 2006

In this study a vibration isolation system with the cradle-type support was designed so as to reduce the transient vibration due to positioning motion of the moving mass on worktable as well as to achieve the desired isolation efficiency on the floor vibration. The design procedure was performed in the two steps. The first step to select appropriate isolators to meet the isolation efficiency, and the second step is to reduce the transient vibration of the worktable by adopting the cradle-type support. After the application of the selected isolators with the cradle-type support to the system it was shown that the required vibration criterion(VC-D) was easily satisfied and that the undesirable transient vibration was reduced remarkably.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.933-939
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• 2000

In this paper we present an overview of the factors and techniques that must be considered in vibration measurements in the floor structures for microelectronics facilities. Normally narrowband vibration spectrum or equivalent signals are suggested as the guide indexes of site vibration phenomina. But it cannot support perfect informations in designing vibration control systems for the vibration sensitive equipment even though the spectrum serves to illustrate the fact that most real vibration environments are dominated by broadband energy as opposed to tonal energy. The major topics cover stiffness in frequency and time domain, acceleration level and modal characteristics from experimental modal analysis as well as narrowband spectrum. The combined signal analysis through the items mentioned above can give better solutions and would be positively recomended to solve the vibration problems on a sort of limited field.

• Journal of KSNVE
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• v.9 no.6
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• pp.1227-1233
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• 1999

Modern technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a nanometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. This paper deals with the structural dynamic design in high class semiconductor factory in order to be satisfied more strict vibration criteria for high sensitive equipment.

• Proceedings of the Korean Society of Laser Processing Conference
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• 2005.11a
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• pp.128-131
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• 2005

• Proceedings of the Korea Concrete Institute Conference
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• 2006.05a
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• pp.510-513
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• 2006

Due to the location of vibration sensitive equipment on the floor, it is necessary for its vibration performance to be maintained within stringent limits, resulting in a design of higher mass and stiffness than would be usual for a floor of this type. Modal testing is conducted on the floor to obtain their dynamic characteristics. A considerable level of vibration transmission is observed by comparing the ratio of simulated transfer and point mobility FRFs of the floor.

• Journal of the Korean Society of Safety
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• v.16 no.2
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• pp.36-43
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• 2001

This study is intended to estimate influences upon life cycle of ESPE(Electro Sensitive Protective Equipment) which is kinds of commonly used in press in domestic industry. First the field survey is executed to workers and safety managers at work places. In the survey, the main primary factors influenced the lift cycle of ESPE were vibration due to overload work in workplace. Second, int results showed that 37$m/s^2$ acceleration in press work would lead to the life of 132 for 8 hours work per day. Therefore, the vibration of press inflicted significant effect on the lift of ESPE.

• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2005.09a
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• pp.49-54
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• 2005

In the case of a sensitive equipment, it require a vibration free environment to provide its proper function. Especially, lithography and inspection device, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved Giga Class semi conductor wafers. The aim of this study is to evaluate the allowable vibration response of a precision inspect ion equipment, which has some trouble in field, by using experimental measurement data and to proposal a proper ant i-vibration method.