• Title/Summary/Keyword: velocity slip

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Study of Inhibition Characteristics of Slurry Additives in Copper CMP using Force Spectroscopy

  • Lee, Hyo-Sang;Philipossian Ara;Babu Suryadevara V.;Patri Udaya B.;Hong, Young-Ki;Economikos Laertis;Goldstein Michael
    • Transactions on Electrical and Electronic Materials
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    • v.8 no.1
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    • pp.5-10
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    • 2007
  • Using a reference slurry, ammonium dodecyl sulfate (ADS), an anionic and environmentally friendly surfactant, was investigated as an alternative to BTA for its inhibition and lubrication characteristics. Results demonstrated that the inhibition efficiency of ADS was superior to that of BTA. Coefficient of friction (COF) was the lowest when the slurry contained ADS. This suggested that adsorbed ADS on the surface provided lubricating action thereby reducing the wear between the contacting surfaces. Temperature results were consistent with the COF and removal rate data. ADS showed the lowest temperature rise again confirming the softening effect of the adsorbed surfactant layer and less energy dissipation due to friction. Spectral analysis of shear force showed that increasing the pad-wafer sliding velocity at constant wafer pressure shifted the high frequency spectral peaks to lower frequencies while increasing the variance of the frictional force. Addition of ADS reduced the fluctuating component of the shear force and the extent of the pre-existing stick-slip phenomena caused by the kinematics of the process and collision event between pad asperities with the wafer. By contrast, in the case of BTA, there were no such observed benefits but instead undesirable effects were seen at some polishing conditions. This work underscored the importance of real-time force spectroscopy in elucidating the adsorption, lubrication and inhibition of additives in slurries in CMP.

HEAT TRANSFER ENHANCEMENT IN CHANNEL FLOW BY A STREAMWISE-PERIODIC ARRAY OF CIRCULAR CYLINDERS (주기적으로 배열된 원형 실린더를 이용한 채널 유동의 열전달 증진)

  • Jeong, Taekyeong;Yang, Kyung-Soo;Lee, Kyongjun;Kang, Changwoo
    • Journal of computational fluids engineering
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    • v.18 no.2
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    • pp.85-92
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    • 2013
  • In this study, we consider heat transfer enhancement in laminar channel flow by means of an infinite streamwise array of equispaced identical circular cylinders. This flow configuration can be regarded as a model representing a micro channel or an internal heat exchanger with cylindrical vortex generators. A numerical parametric study has been carried out by varying Reynolds number based on the bulk mean velocity and the cylinder diameter, and the gap between the cylinders and the channel wall. An immersed boundary method was employed to facilitate to implement the cylinders on a Cartesian grid system. No-slip condition is employed at all solid boundaries including the cylinders, and the flow is assumed to be periodic in the streamwise direction. Also, the Prandtl number is fixed as 0.7. For thermal boundary conditions on the solid surfaces, it is assumed that heat flux is constant on the channel walls, while the cylinder surfaces remain adiabatic. The presence of the circular cylinders arranged periodically in the streamwise direction causes a significant topological change of the flow, leading to heat transfer enhancement on the channel walls. The Nusselt number averaged on the channel wall is presented for the wide ranges of Reynolds number and the gap. A significant heat transfer enhancement is noticed when the gap is larger than 0.8, while the opposite is the case for smaller gaps. More quantitative results as well as qualitative physical explanations are presented to justify the effectiveness of varying the gap to enhance heat transfer from the channel walls.

A Numerical Study on Various Energy and Environmental System (II) (에너지${\cdot}$환경 제반 시스템에 관한 수치해석적 연구(II))

  • Jang D. S.;Park B. S.;Kim B. S.;Lee E. J.;Song W. Y.
    • 한국전산유체공학회:학술대회논문집
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    • 1996.05a
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    • pp.58-67
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    • 1996
  • This paper describes some computational results of various energy and environmental systems using Patankar's SIMPLE method. The specific topics handled in this study are jet bubbling reactor for flue gas desulfurization, cyclone-type afterburner for incineration, 200m tall stack for 500 MW electric power generation, double skin and heat storage systems of building energy saving for the utilization of solar heating, finally turbulent combustion systems with liquid droplet or pulverized coal particle. A control-volume based finite-difference method with the power-law scheme is employed for discretization. The pressure-velocity coupling is resolved by the use of the revised version of SIMPLE, that is, SIMPLEC. Reynolds stresses are closed using the standard $k-{\varepsilon}$ and RNG $k-{\varepsilon}$ models. Two-phase turbulent combustion of liquid drop or pulverized coal particle is modeled using locally-homogeneous, gas-phase, eddy breakup model. However simple approximate models are incorporated for the modeling of the second phase slip and retardation of ignition without consideration of any detailed particle behavior. Some important results are presented and discussed in a brief note. Especially, in order to make uniform exit flow for the jet bubbling reactor, a well-designed structure of distributor is needed. Further, the aspect ratio in the double skin system appears to be one of important factors to give rise to the visible change of the induced air flow rate. The computational tool employed in this study, in general, appears as a viable method for the design of various engineering system of interest.

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Numerical Study on Flow Over Oscillating Circular Cylinder Using Curved Moving Boundary Treatment (곡선경계처리법을 이용한 주기적으로 진동하는 실린더주위의 유동해석)

  • Kim, Hyung-Min;Jhon, Myung-S.
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.31 no.11
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    • pp.895-903
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    • 2007
  • CMBT(Curved Moving Boundary Treatment) is a newly developed scheme for the treatment of a no slip condition on the curved solid wall of moving obstacle in a flow field. In our research CMBT was used to perform LBM simulation of a flow over a moving circular cylinder to determine the flow feature and aerodynamics characteristic of the cylinder. To ascertain the applicability of CMBT on the complex shape of the obstacle, it was first simulated for the case of the flow over a fixed circular cylinder in a channel and the results were compared against the solution of Navier-Stokes equation with deforming mesh technique. The simulations were performed in a moderate range of reynolds number at each moving cylinder to identify the flow feature and aerodynamic characteristics of circular cylinder in a channel. The drag coefficients of the cylinder were calculated from the simulation results. We have numerically confirmed that the critical reynolds number for vortex shedding is ar Re=250 and the result is the same as the case of fixed cylinder. As the cylinder approaching to one wall, the 2nd vortex is developed by interacting with the wall boundary-layer vorticity. As the velocity ratio increase the third vortex are generated by interacting with the 2nd vortexes developed on the upper and lower wall boundary layer. The resultant $C_d$ decrease as reynolds number increasing and the Cd approached to a value when Re>1000.

Numerical Simulation of the Effect of Finite Diaphragm Rupture Process on Micro Shock Tube Flows (Micro shock tube 유동에 대한 유한 격막 파막과정의 영향에 관한 수치 해석적 연구)

  • Arun Kumar, R.;Kim, Heuy Dong
    • Journal of the Korean Society of Propulsion Engineers
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    • v.17 no.3
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    • pp.37-46
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    • 2013
  • Recent years have witnessed the use of micro shock tube in various engineering applications like micro combustion, micro propulsion, particle delivery systems etc. The flow characteristics occurring in the micro shock tube shows a considerable deviation from that of well established conventional macro shock tube due to very low Reynolds number and high Knudsen number effects. Also the diaphragm rupture process, which is considered to be instantaneous process in many of the conventional shock tubes, will be crucial for micro shock tubes in determining the near diaphragm flow field and shock formation. In the present study, an axi-symmetric CFD method has been applied to simulate the micro shock tube, with Maxwell's slip velocity and temperature jump boundary conditions. The effects of finite diaphragm rupture process on the flow field and the shock formation was investigated, in detail. The results show that the shock strength attenuates rapidly as it propagates through micro shock tubes.

Numerical Simulation of the Flow around Advancing Ships in Regular Waves using a Fixed Rectilinear Grid System (고정된 직교격자계를 이용한 파랑 중 전진하는 선박주위 유동의 수치시뮬레이션)

  • Jeong, Kwang-Leol;Lee, Young-Gill
    • Journal of the Society of Naval Architects of Korea
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    • v.51 no.5
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    • pp.419-428
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    • 2014
  • This paper presents a numerical simulation method for the flow around advancing ships in regular waves by using a rectilinear grid system. Because the grid lines do not consist with body surface in the rectilinear grid system, the body geometries are defined by the interaction points of those grid lines and the body surface. For the satisfaction of body boundary conditions, no-slip and divergence free conditions are imposed on the body surface and body boundary cells, respectively. Meanwhile, free surface is defined with the modified marker density method. The pressure on the free surface is determined to make the pressure gradient terms of the governing equations continuous, and the velocity around the free surface is calculated with the pressure on the free surface. To validate the present numerical method, a vortex induced vibration (VIV) phenomenon and flows around an advancing Wigley III ship model in various regular waves are simulated, and the results are compared with existing and corresponding research data. Also, to check the applicability to practical ship model, flows around KRISO Container Ship (KCS) model advancing in calm water are numerically simulated. On the simulations, the trim and the sinkage are set free to compare the running attitude with some other experimental data. Moreover, flows around the KCS model in regular waves are also simulated.

A preliminary simulation for the development of an implantable pulsatile blood pump

  • Di Paolo, Jose;Insfran, Jordan F.;Fries, Exequiel R.;Campana, Diego M.;Berli, Marcelo E.;Ubal, Sebastian
    • Advances in biomechanics and applications
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    • v.1 no.2
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    • pp.127-141
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    • 2014
  • A preliminary study of a new pulsatile pump that will work to a frequency greater than 1 Hz, is presented. The fluid-structure interaction between a Newtonian blood flow and a piston drive that moves with periodic speed is simulated. The mechanism is of double effect and has four valves, two at the input flow and two at the output flow; the valves are simulated with specified velocity of closing and reopening. The simulation is made with finite elements software named COMSOL Multiphysics 3.3 to resolve the flow in a preliminary planar configuration. The geometry is 2D to determine areas of high speeds and high shear stresses that can cause hemolysis and platelet aggregation. The opening and closing valves are modelled by solid structure interacting with flow, the rhythmic opening and closing are synchronized with the piston harmonic movement. The boundary conditions at the input and output areas are only normal traction with reference pressure. On the other hand, the fluid structure interactions are manifested due to the non-slip boundary conditions over the piston moving surfaces, moving valve contours and fix pump walls. The non-physiologic frequency pulsatile pump, from the viewpoint of fluid flow analysis, is predicted feasible and with characteristic of low hemolysis and low thrombogenesis, because the stress tension and resident time are smaller than the limit and the vortices are destroyed for the periodic flow.

The Effect of Metal Fibers on the Tribology of Automotive Friction Materials (마찰재에 함유된 금속섬유와 마찰 특성의 연관관계)

  • Ko, Kil-Ju;Cho, Min-Hyung;Jang, Ho
    • Tribology and Lubricants
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    • v.17 no.4
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    • pp.267-275
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    • 2001
  • Friction and wear properties of brake friction materials containing different metal fibers (Al, Cu or Steel fibers) were investigated. Based on a simple experimental formulation, friction materials with the same amount of metal fibers were tested using a pad-on-disk type friction tester. Two different materials (gray cast iron and aluminum metal matrix composite (MMC)) were used for disks rubbing against the friction materials. Results front ambient temperature tests revealed that the friction material containing Cu fibers sliding against gray cast iron disk showed a distinct negative $\mu$-v (friction coefficient vs. sliding velocity) relation implying possible stick-slip generation at low speeds. The negative $\mu$- v relation was not observed when the Cu-containing friction materials were rubbed against the Al-MMC counter surface. Elevated temperature tests showed that the friction level and the intensity of friction force oscillation were strongly affected by the thermal conductivity and melting temperature of metallic ingredients of the friction couple. Friction materials slid against cast iron disks exhibited higher friction coefficients than Al-MMC (metal matrix composite) disks during high temperature tests. On the other hand, high temperature test results suggested that copper fibers in the friction material improved fade resistance and that steel fibers were not compatible with Al-MMC disks showing severe material transfer and erratic friction behavior during sliding at elevated temperatures.

Study on NOx Reduction with Multi-Perforated Tube Geometry in Integrated Urea-SCR Muffler (촉매삽입형 Urea-SCR 머플러 다공튜브 형상변화에 따른 NOx 저감 특성에 관한 연구)

  • Moon, Namsoo;Lee, Sangkyoo;Ko, Sangchul;Lee, Jeekeun
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.38 no.12
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    • pp.1017-1026
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    • 2014
  • A multi-perforated tube is generally installed between the muffler inlet and in front of selective catalytic reduction (SCR) catalysts in the integrated urea-SCR muffler system in order to disperse the urea-water solution spray uniformly and to make better use of the SCR catalyst, which would result in an increase nitrogen oxide ($NO_x$) reduction efficiency and a decrease in the ammonia slip. The effects of the multi-perforated tube orifice area ratios on the internal flow characteristics were investigated analytically by using a general-purpose commercial software package. From the results, it was clarified that the multi-perforated tube geometry sensitively affected the generation of the bulk swirling motion inside the plenum chamber set in front of the SCR catalyst and to the uniformity index of the velocity distribution produced at the inlet of the catalyst. To verify the analytical results, engine tests were carried out in the ESC and ETC modes. Results of these tests indicated that the larger flow model in the longitudinal direction showed the highest NOx reduction efficiency, which was a good agreement with the analytical results.

Solid Circulation Rate in a Viscous Liquid-Solid Circulating Fluidized Bed (점성유체 액/고 순환유동층에서 입자의 순환속도)

  • Hong, Sung Kyu;Jang, Hyung Ryun;Lim, Dae Ho;Yoo, Dong Jun;Kang, Yong
    • Korean Chemical Engineering Research
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    • v.54 no.5
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    • pp.706-711
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    • 2016
  • Characteristics of solid circulation rate in the liquid-solid circulating fluidized beds with viscous liquid medium were investigated. Effects of primary and secondary liquid velocities, particle size, liquid viscosity and height of solid particles piled up in the solid recycle device on the solid circulation rate were considered. The solid circulation rate increased with increasing primary and secondary liquid velocities, liquid viscosity and height of solid particles in the downcommer, but it decreased with increasing particle size. The particle rising velocity in the riser decreased with increasing the ratio of $U_{L1}/U_{L2}$ and particle size. The slip velocity of liquid and particle, $U_L/U_S$, decreased with increasing liquid viscosity but it increased with increasing particle size. The values of solid circulation rate were well correlated in terms of operating variables and dimensionless groups.