• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권7호
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• pp.308-314
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• 2005

The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

• 한국수소및신에너지학회논문집
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• 제34권6호
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• pp.712-721
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• 2023

While hydrogen is widely used, it has a low minimum ignition energy, raising safety concerns when using it. This research studied which parameters are the key variables in the hydrogen release and diffusion. These parameters were divided into six process variables in the initial release and two environmental variables in the dispersion. One hundred and twenty cases were selected through design of experiment, and the end-point in each case were analyzed using PHAST. Afterwards, an end-point prediction model was developed using RSM and ANOVA, and the impact of each variable on the endpoint was analyzed. As a result, the influence of eight variables was graded. The nozzle diameter had the greatest influence on the end-point, while the pipe roughness coefficient had no effect on the end-point. It is expected that these results will be used as basic data to improve safety across all fields of hydrogen handling facilities.

• 한국수자원학회논문집
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• 제56권spc1호
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• pp.1007-1014
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• 2023

천수방정식 기반 흐름해석모형은 하천 및 수로에서의 흐름을 수평 2차원적으로 수치모의하는데 활용되며 매개변수인 와점성계수와 조도계수에 큰 영향을 받는다. 따라서 적절한 매개변수의 선택은 흐름특성을 정확하게 모사하기 위해 매우 중요하다. 본 연구에서는 2차원 흐름해석에 적용되는 매개변수의 최적조합을 찾기 위한 자동화 알고리즘을 개발하고 적용하였다. 기존연구에서 2차원 흐름해석모형을 적용하는 경우 매개변수의 선정에 있어 경험적인 방법을 사용하여 최적의 매개변수를 찾는데 어려움이 있었다. 따라서 본 연구에서는 실험결과를 활용하여 다양한 매개변수의 조합에 따른 오차를 추적하고, 매개변수의 최적조합을 결정할 수 있는 알고리즘을 Python 언어를 이용하여 개발하고 적용하였다. 자동화 알고리즘은 121(11×11)개의 매개변수 조합에 따른 2차원 흐름해석결과 중 유속모의결과의 오차값을 비교하여 가장 정확한 조합을 손쉽게 결정하도록 구성되었다. 오차가 가장 작은 매개변수의 최적조합을 자동화 알고리즘의 적용을 통해 신속하고 간단하게 결정할 수 있다는 측면에서 높은 활용가치가 있을 것으로 기대된다.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2002년도 춘계 기술심포지움 논문집
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• pp.193-197
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• 2002

The tribological properties and van der Waals attractive forces and the thermal stability of films are very important characteristics of highly hydrophobic fluorocarbon (FC) films for the long-term reliability of nano system. The effect of thermal annealing on films and van der Waals attractive forces and friction coefficient of films have been investigate d in this study. It was coated Al wafer which was treated O2 and Ar that ocatfluorocyclobutane ($C_4_{8}$) and Ar were supplied to the CVD chamber in the ratio of 2:3 for deposition of FC Films. Static contact angle and dynamic contact angle were used to characterize FC films. Thickness of films was measured by variable angle spectroscopy ellipsometer (VASE). Nanotribological data was got by atomic force microscopy (AFM) to measure roughness, lateral force microscopy (LFM) to measure friction force, and force vs. distance (FD) curve to evaluate adhesion force. FC films were cured in N2 and vacuum. The film showed the slight changes in its properties after 3 hr annealing. FTIR ATR studies showed the decrease of C-F peak intensity in the spectra as the annealing time increased. A significant decrease of film thickness has been observed. The friction force of Al surface was at least thirty times higher than ones with FC films. The adhesive force of bare Al was greater than 100 nN. After deposit FC films adhesive force was decreased to 40 nN. The adhesive force of films was decreased down to 10 nN after 24 hr annealing. During 24 hr annealing in $N_2$and vacuum at $100^{\circ}C$ film properties were not changed so much.