• Title/Summary/Keyword: vapor treatment

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Study on Fiber Laser Annealing of p-a-Si:H Deposition Layer for the Fabrication of Interdigitated Back Contact Solar Cells (IBC형 태양전지 제작을 위한 p-a-Si:H 증착층의 파이버 레이저 가공에 관한 연구)

  • Kim, Sung-Chul;Lee, Young-Seok;Han, Kyu-Min;Moon, In-Yong;Kwon, Tae-Young;Kyung, Do-Hyun;Kim, Young-Kuk;Heo, Jong-Kyu;Yoon, Ki-Chan;Yi, Jun-Sin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.430-430
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    • 2008
  • Using multi plasma enhanced chemical vapor deposition system (Multi-PECVD), p-a-Si:H deposition layer as a $p^+$ region which was annealed by laser (Q-switched fiber laser, $\lambda$ = 1064 nm) on an n-type single crystalline Si (100) plane circle wafer was prepared as new doping method for single crystalline interdigitated back contact (IBC) solar cells. As lots of earlier studies implemented, most cases dealt with the excimer (excited dimer) laserannealing or crystallization of boron with the ultraviolet wavelength range and $10^{-9}$ sec pulse duration. In this study, the Q-switched fiber laser which has higher power, longer wavelength of infrared range ($\lambda$ = 1064 nm) and longer pulse duration of $10^{-8}$ sec than excimer laser was introduced for uniformly deposited p-a-Si:H layer to be annealed and to make sheet resistance expectable as an important process for IBC solar cell $p^+$ layer on a polished n-type Si circle wafer. A $525{\mu}m$ thick n-type Si semiconductor circle wafer of (100) plane which was dipped in a buffered hydrofluoric acid solution for 30 seconds was mounted on the Multi-PECVD system for p-a-Si:H deposition layer with the ratio of $SiH_4:H_2:B_2H_6$ = 30:120:30, at $200^{\circ}C$, 50 W power, 0.2 Torr pressure for 20 minutes. 15 mm $\times$ 15 mm size laser cut samples were annealed by fiber laser with different sets of power levels and frequencies. By comparing the results of lifetime measurement and sheet resistance relation, the laser condition set of 50 mm/s of mark speed, 160 kHz of period, 21 % of power level with continuous wave mode of scanner lens showed the features of small difference of lifetime and lowering sheet resistance than before the fiber laser treatment with not much surface damages. Diode level device was made to confirm these experimental results by measuring C-V, I-V characteristics. Uniform and expectable boron doped layer can play an important role to predict the efficiency during the fabricating process of IBC solar cells.

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Effects of sulfur treatments on metal/InP schottky contact and $Si_3$$N_4$/InP interfaces (황처리가 금속/InP Schootky 접촉과 $Si_3$$N_4$/InP 계면들에 미치는 영향)

  • Her, J.;Lim, H.;Kim, C.H.;Han, I.K.;Lee, J.I.;Kang, K.N.
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.31A no.12
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    • pp.56-63
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    • 1994
  • The effects of sulfur treatments on the barrier heithts of Schottky contacts and the interface-state density of metal-insulator-semiconductor (MIS) capacitors on InP have been investigated. Schottky contacts were formed by the evaporation of Al, Au, and Pt on n-InP substrate before and after (NH$_{4}$)$_{2}$S$_{x}$ treatments, respectively. The barrier height of InP Schottky contacts was measured by their current-voltage (I-V) and capacitance-voltage (C_V) characteristics. We observed that the barrier heights of Schottky contacks on bare InP were 0.35~0.45 eV nearly independent of the metal work function, which is known to be due to the surface Fermi level pinning. In the case of sulfur-treated Au/InP ar Pt/InP Schottky diodes, However, the barrier heights were not only increased above 0.7 eV but also highly dependent on the metal work function. We have also investigated effects of (NH$_{4}$)$_{2}$S$_{x}$ treatments on the distribution of interface states in Si$_{3}$N$_{4}$InP MIS diodes where Si$_{3}$N$_{4}$ was provided by plasma enhanced chemical vapor deposition (PECVD). The typical value of interface-state density extracted feom 1 MHz C-V curve of sulfur-treated SiN$_{x}$/InP MIS diodes was found to be the order of 5${\times}10^{10}cm^{2}eV^{1}$. This value is much lower than that of MiS diodes made on bare InP surface. It is certain, therefore, that the (NH$_{4}$)$_{2}$S$_{x}$ treatment is a very powerful tool to enhance the barrier heights of Au/n-InP and Pt/n-InP Schottky contacts and to reduce the density of interface states in SiN$_{x}$/InP MIS diode.

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Study on the Utilization of Sawdust Bedding Barn for Dairy Cows II. Comparision of utilization efficiency of the different depth of sawdust bedding for dairy cows (착유우의 톱밥발효우사 이용 연구 제2보 :착유우 톱밥발효우사의 톱밥상 처리방법에 따른 이용효과 비교)

  • 권두중;권응기;정석근;한정대;정석찬;강승원;강상열;정형섭;장학주
    • Journal of Animal Environmental Science
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    • v.1 no.2
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    • pp.117-124
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    • 1995
  • This study was carried out to investigate the effect of depth of sawdust bedding and ground material in dairy cattle barn. Treatment included the concrete floor with a 10cm or 30cm sawdust and the earth floor with a 30cm sawdust. Eighteen cows were assigned to 3 pens with 16.5㎥/head bedding area. The results obtained were as follows : 1. The temperature of sawdust bed was highest in the earth floor with 30cm sawdust, and the moisture content of sawdust bed was highest in the concrete floor with 10cm sawdust bed. 2. Cows defecate feces 9.2, 8.7 and 9.3 times a day in 10cm sawdust on concrete floor(10S+C), 30cm sawdust on concrete floor(30S+C) and 30cm sawdust on non concrete floor(30S+ NC) respectively. In average, they excreta 9.1 times/day(85.8%) in the sawdust beds and 1.5 times/day(14.2%) in the feeding alley. 3. The ratio of daily water amount deposited vapor to total water amount deposited in sawdust beds was 74.0%, 61.5% and 47.1% in 10S+C, 30S+C and 30S+NC respectively. 4. N.P.K contents in the sawdust beds were higher for 10S+C compared with other treatments. 5. When 30cm of sawdust was applied on the earth ground NO$_3$-N contents in the sawdust bed was 37.7, 14.1 and 15.0ppm in depth of 30, 60 and 90cm under the ground, respectively, indicating some possibility of water pollution.

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Thermal stability of surface modified Ni-Cr-alloys in molten FLiNaK salt (표면처리된 Ni-Cr계 합금의 FLiNaK 용융염 하에서의 고온 안정성)

  • Kwang, Hyun Cho;Bang, Hyun;Lee, Tae Suk;Lee, Byeong Woo
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.22 no.5
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    • pp.227-232
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    • 2012
  • Inconel 617 and Hastelloy X are the most promising candidate materials for the heat exchanger of next generation nuclear reactor. Surface coating and its effects on high temperature properties for the Inconel 617 and Hastelloy X under molten FLiNaK (LiF-NaF-KF) salt environment have been investigated. For TiAlN and $Al_2O_3$ overlay coatings, the two different PVD (physical vapor deposition) methods of an arc discharge and a sputtering were applied, respectively. A study for the thermal stability of the surface modified Ni-Cr alloy substrates has been conducted. To evaluate the corrosion mechanism of Ni-Cr alloys in the molten salt, a ruptured Inconel pipe used for the molten salt transportation has been analyzed. The thermal properties of morphological and structural properties each sample were characterized before and after heat-treatment at $600^{\circ}C$ in molten FLiNaK salt. The results showed that the TiAlN and $Al_2O_3$ overlay coated specimens had the enhanced high temperature stability.

Growth and Physiological Responses of Shade Intolerant and Intermediate Tree Seedlings to Enhanced UV-B Radiation (자외선(紫外線)-B 증가조사(增加照射)에 대한 양수(陽樹)와 중성수(中性樹) 유묘(幼苗)의 생장(生長)과 생리적(生理的) 반응(反應)에 관한 연구(硏究))

  • Kim, Jong Jin;Hong, Sung Gak
    • Journal of Korean Society of Forest Science
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    • v.88 no.4
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    • pp.469-476
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    • 1999
  • This study was carried out to investigate the growth and physiological response of shade intolerant and intermediate tree seedlings to enhanced UV-$B_{BE}$(biologically effective UV-B) radiation. The seedlings of Betula platyphylla var. japonica Hara(shade intolerant species) and Fraxinus rhynchophylla Hance(shade intermediate species) were treated with one of the three levels of UV-$B_{BE}$ dosages - ambient UV-$B_{BE}$, ambient+3.2, and ambient+$5.2\;KJ\;m^{-2}day^{-1}$) for 14 weeks in the field condition. Height and root collar diameter growth, leaf area, and biomass production of the seedlings of two species were reduced by enhanced UV-B radiation. Leaf stomatal resistance to water vapor of the F. rhynchophylla seedling was increased by the UV-B increment. The reductions in total chlorophyll and carotenoid were more apparent in the F. rhynchophylla than B. platyphylla seedling. There was no statistically significant changes in the concentration of UV-B absorbing compound($A_{300}$) in the leaves of the two species among the UV-B treatment. However the $A_{300}$ tented to be increased in F. rhynchophylla by enhanced UV-B radiation. These results indicate that the growth and the physiological and biochemical responses between B. platyphylla and F. rhynchophylla were different to enhanced UV-B environment.

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Effect of Paper Bag Types and Harvesting Dates on Skin Blackening and Fruit Quality of 'Chuhwangbae' Pear Trees (봉지종류와 수확시기가 '추황배'의 수상에서의 과피흑변과 과실품질에 미치는 영향)

  • Choi, Jin-Ho;Yim, Sun-Hee;Kim, Sung-Jong;Kwon, Yong-Hee;Lee, Han-Chan;Jung, Seok-Kyu;Choi, Hyun-Sug
    • Korean Journal of Organic Agriculture
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    • v.23 no.1
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    • pp.91-101
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    • 2015
  • 'Chuhwangbae' pears (Pyrus pyrifolia Nakai) were investigated on how types of paper bag and harvesting dates influenced on skin blackening before harvest as well as fruit quality after harvest. Experiments included four different types of paper bags (NP/YP, GP/YP, NP/BP, and NP/RP) and five different harvesting dates [160, 170, 180, 190, and 200 days after full bloom (DAFB)]. NP/YP and GP/YP indicated for newspaper- and gray paper-outer bag, respectively, with yellow paper-inner bag of the both. NP/BP and NP/RP indicated for newspaper-outer bag of the both with black paper- and red paper-inner bag, respectively. The NP/YP (newspaper/yellow paper) showed high absorbance and air and water vapor permeability in the bags, while the NP/RP (newspaper/red paper) resulted in poor physical properties in the bags. Fruit enclosed with NP/YP resulted in the absence of skin blackening, but fruit with NP/RP bags had the highest skin blackening (12.7%). Occurrence of skin blackening was concentrated on the middle and calyx end-part of fruit region. NP/RP bag treatment was likely to increase fruit weight, firmness, titratable acidity, and fruit surface color. Harvest at high relative humidity in air increased skin blackening of fruit. Later fruit harvest, such as 190 and 200 DAFB, increased skin blackening, fruit weight, and sugar content while decreasing fruit firmness and titratable acidity.

Prevention of P-i Interface Contamination Using In-situ Plasma Process in Single-chamber VHF-PECVD Process for a-Si:H Solar Cells

  • Han, Seung-Hee;Jeon, Jun-Hong;Choi, Jin-Young;Park, Won-Woong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.204-205
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    • 2011
  • In thin film silicon solar cells, p-i-n structure is adopted instead of p/n junction structure as in wafer-based Si solar cells. PECVD is a most widely used thin film deposition process for a-Si:H or ${\mu}c$-Si:H solar cells. For best performance of thin film silicon solar cell, the dopant profiles at p/i and i/n interfaces need to be as sharp as possible. The sharpness of dopant profiles can easily achieved when using multi-chamber PECVD equipment, in which each layer is deposited in separate chamber. However, in a single-chamber PECVD system, doped and intrinsic layers are deposited in one plasma chamber, which inevitably impedes sharp dopant profiles at the interfaces due to the contamination from previous deposition process. The cross-contamination between layers is a serious drawback of a single-chamber PECVD system in spite of the advantage of lower initial investment cost for the equipment. In order to resolve the cross-contamination problem in single-chamber PECVD systems, flushing method of the chamber with NH3 gas or water vapor after doped layer deposition process has been used. In this study, a new plasma process to solve the cross-contamination problem in a single-chamber PECVD system was suggested. A single-chamber VHF-PECVD system was used for superstrate type p-i-n a-Si:H solar cell manufacturing on Asahi-type U FTO glass. A 80 MHz and 20 watts of pulsed RF power was applied to the parallel plate RF cathode at the frequency of 10 kHz and 80% duty ratio. A mixture gas of Ar, H2 and SiH4 was used for i-layer deposition and the deposition pressure was 0.4 Torr. For p and n layer deposition, B2H6 and PH3 was used as doping gas, respectively. The deposition temperature was $250^{\circ}C$ and the total p-i-n layer thickness was about $3500{\AA}$. In order to remove the deposited B inside of the vacuum chamber during p-layer deposition, a high pulsed RF power of about 80 W was applied right after p-layer deposition without SiH4 gas, which is followed by i-layer and n-layer deposition. Finally, Ag was deposited as top electrode. The best initial solar cell efficiency of 9.5 % for test cell area of 0.2 $cm^2$ could be achieved by applying the in-situ plasma cleaning method. The dependence on RF power and treatment time was investigated along with the SIMS analysis of the p-i interface for boron profiles.

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Status of Soil Remediation and Technology Development in Korea (국내 오염토양 복원 현황과 기술 동향)

  • Yang, Ji-Won;Lee, You-Jin
    • Korean Chemical Engineering Research
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    • v.45 no.4
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    • pp.311-318
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    • 2007
  • Soil contamination in Korea has been accelerated every year. Because of their persistence and cumulative tendency in the environment, soil contaminants have potential long-term environmental and health concerns and it is estimated to cost enormous expense for clean-up. Korea government has legislated the law on conservation of soil environment in mid 1990s, and managed and treated hazardous wastes in contaminated sites as a remediation policy since then. Soil remediation technologies are classified into in-situ/ex-situ or biological/physico-chemical/thermal processes according to applied places or treatment methods, respectively. In Korea, clean-up of polluted sites has been mostly carried out at military areas, railroad-related sites and small-scale oil spilt sites. For these cases, in-situ remediation technologies such as soil vapor extraction (SVE) and bioventing were mainly used. In recent days, an environmental-friendly soil remediation emerged as a new concept - for example, a new soil remediation process using nanotechnology or molecular biological study and an integrated process which can overcome the limitation of individual process. To have better applicability of remediation technologies, comprehensive understandings about the pollutants and soil characteristics and the suitable techniques are required to be investigated. Above all, development of environmental technologies based on the sustainability accompanied by public attention can improve soil environment in Korea.

Acute Respiratory Failure Treated with Veno-venous Extracorporeal Membrane Oxygenation (정-정맥 체외막형산소화요법을 이용한 급성호흡부전의 치료)

  • Kim, Hyoung-Soo;Han, Sang-Jin;Hong, Kyung-Soon;Yoon, Duck-Hyoung;Lee, Chang-Youl;Lee, Myung-Goo;Hong, Won-Ki;Lee, Sun-Hee;Kim, Kun-Il;Lee, Hee-Sung;Cho, Sung-Woo
    • Tuberculosis and Respiratory Diseases
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    • v.68 no.2
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    • pp.62-66
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    • 2010
  • Background: Extracorporeal membrane oxygenation (ECMO) during severe acute respiratory failure helps to recover the pulmonary function. This study evaluated our experience with veno-venous ECMO in adult patients with acute respiratory failure. Methods: From January 2007 to July 2009, ECMO was used on 54 patients. Of these 54 patients, 7 were placed on veno-venous ECMO for acute respiratory failure. The indications of ECMO were based on the lung dysfunction measured as a $PaO_2/FiO_2$ ratio <100 mm Hg on $FiO_2$ of 1.0, or an arterial blood gas pH <7.25 due to hypercapnia despite the optimal treatment. $EBS^{(R)}$, $Bio-pump^{(R)}$, and Centrifugal Rotaflow $pump^{(R)}$ were used and all cannulations were performed percutaneously via both femoral veins. When the lung function was improved, an attempt was made to wean on ECMO at moderate ventilator settings followed by decannulation. Results: Five of the 7 patients were male and the mean age was $46.3{\pm}18.3$. The causes of acute respiratory failure were 3 cases of pneumonia, 2 near-drownings, 1 pulmonary hemorrhage due to acute hepatic failure and 1 mercury vapor poisoning. The mean support time of ECMO was $17.3{\pm}13.7$ days. Of the 7 patients implanted with ECMO, 5 patients (71%) were weaned off ECMO and 3 patients (43%) survived to hospital discharge after a mean 89.6 hospital days. Conclusion: The early use of ECMO for acute respiratory failure in adults due to any cause is a good therapeutic option for those unresponsive to the optimal conventional treatments.

EFFECTS OF SURFACE ROUGHNESS AND MULTILAYER COATING ON THE CORROSION RESISTANCE OF Ti-6Al-4V ALLOY

  • Ko, Yeong-Mu;Choe, Han-Cheol
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2003.10a
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    • pp.134-135
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    • 2003
  • The dental implant materials required good mechanical properties, such as fatigue strength, combined with a high resistance to corrosion. For increasing fatigue resistance and delaying onset of stress corrosion cracking, shot peening has been used for > 50 years to extend service life of metal components. However, there is no information on the electrochemical behavior of shot peened and hydroxyapatite(HA) coated Ti-6Al-4V alloys. To increase fatigue strength, good corrosion resistance, and biocompatibility, the electrochemical characteristics of Ti/TiN/HA coated and shot peened Ti-6Al-4V alloys by electron beam physical vapor deposition(EB-PVD) have been researched by various electrochemical method in 0.9%NaCl. Ti-6Al-4V alloys were prepared under the condition of hydrogen and vacuum arc furnace. The produced materials were quenched at 1000$^{\circ}C$ under high purity dried Ar atmosphere and were hold at 500$^{\circ}C$ for 2 hrs to achieve the fatigue strength(1140㎫) of materials. Ti-6Al-4V alloys were prepared under the condition of hydrogen and vacuum arc furnace. Shot peening(SP) and sand blasting treatment was carried out for 1, 5, and 10min. On the surface of Ti-6Al-4V alloys using the steel balls of 0.5mm and alumina sand of 40$\mu\textrm{m}$ size. Ti/TiN/HA multilayer coatings were carried out by using electron-beam deposition method(EB-PVD) as shown Fig. 1. Bulk Ti, powder TiN and hydroxyapatite were used as the source of the deposition materials. Electrons were accelerated by high voltage of 4.2kV with 80 - 120mA on the deposition materials at 350$^{\circ}C$ in 2.0 X 10-6 torr vacuum. Ti/TiN/HA multilayer coated surfaces and layers were investigated by SEM and XRD. A saturated calomel electrode as a reference electrode, and high density carbon electrode as a counter electrode, were set according to ASTM GS-87. The potentials were controlled at a scan rate of 100 mV/min. by a potentiostat (EG&G Co.273A) connected to a computer system. Electrochemical tests were used to investigate the electrochemical characteristics of Ti/TiN/HA coated and shot peened materials in 0.9% NaCl solution at 36.5$^{\circ}C$. After each electrochemical measurement, the corrosion surface of each sample was investigated by SEM.

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