• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.73-78
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• 2003

The InP thin films grown by metalorganic chemical vapor deposition (MOCVD) are widely used to optoelectronic devices such as laser diodes, wave-guides and optical modulators. Effects of various parameters controlling film growth rate such as gas-phase reaction rate constant, surface reaction rate constant and mass diffusivity are numerically investigated. Results show that at the upstream region where film growth rate increases with the flow direction, diffusion including thermal diffusion plays an important role. At the downstream region where the growth rate decreases with flow direction, film deposition mechanism is revealed as a mass-transport limited. Mass transport characteristics are also studied using systematic analyses.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.151-152
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• 2009

We coated $TiO_2$ thin films on particles by a rotating cylindrical plasma chemical vapor deposition (PCVD) process and investigated the effects of various process variables on the morphology and growth of thin films. The polypropylene (PP) particles were rotated with the cylindrical PCVD reactor and they were coated with $TiO_2$ thin films uniformly by the deposition of thin mm precursors in the gas phase. The $TiO_2$ thin films were coated on the PP particles uniformly and the thickness of thin films almost proportional to the deposition time. The $TiO_2$ thin films grew more quickly on the PP particles with increasing rotation speed of the reactor. This study shows that a rotating cylindrical PCVD reactor can be a good method to coat high-quality $TiO_2$ thin films uniformly on particles.

• Korean Chemical Engineering Research
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• 제52권1호
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• pp.75-80
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• 2014

The convective flow structures in the vapor phase on earth are shown to be single unicellular, indicating the solutally dominant convection is important. These findings reflect that the total molar fluxes show asymmetrical patterns in a viewpoint of interfacial distributions. With decreasing the gravitational level form $1g_0$ down to $1.0{\times}10^{-4}g_0$, the total molar fluxes decay first order exponentially. It is also found that the total molar fluxes decay first order exponentially with increasing the partial pressure of component B, PB (Torr) form 5 Torr up to 400 Torr. Under microgravity environments less than $1g_0$, a diffusive-convection mode is dominant and, results in much uniformity in front of the crystal regions in comparisons with a normal gravity acceleration of $1g_0$.

• 한국세라믹학회지
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• 제26권4호
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• pp.550-558
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• 1989

Polycrystalline diamond films have been deposited on Si wafer Ly hot W filament CVD method using CH4H2 mixtures. The effects of surface pretreatment, W filament temperature, CH4 volume fraction, and addition of water vapor on the growth rate and morphology of the films were investigated. Surface pretretment was essential for depositing a continuous diamond film. Raising the filament temperature resulted in an increased growth rate and a better crystal quality of the film. As the methane content is varied from 0.5% to 5%, well-faceted crystals gradually transformed into spherical particles of non-diamond phase with a simultaneous increase in the growth rate. Addition of water vapor markedly improved the crystallinity to produce crystalline particles even with 5% methane mixture.

• 한국유체기계학회 논문집
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• 제18권6호
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• pp.76-80
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• 2015

The purpose of this study is to understand the cavitation phenomena in centrifugal pumps through computational fluid dynamics method. NPSH characteristic curve is measured from different flow operating conditions. Steady state, liquid-vapor homogeneous method with two equations transport turbulence model is employed to estimate the NPSH curve in centrifugal pumps. The Rayleigh-Plesset cavitation model is adapted as source term for inter-phase mass transfer in order to understand cavitation phenomena in centrifugal pumps. The cavitation incipient curve is clearly estimated at different flows operating conditions. A relationship is made between cavitation incipient and NPSH curve. Also the effects on water vapor volume fraction and pressure load distributions on the impeller blade are also described.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.2901-2906
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• 2007

A solver for icing and condensation of water has been developed. The phase change process was solved by the enthalpy method. For the code validation, the temperature and the phase change from water to ice of the driven cavity were calculated. Also, the melting process of the frost on the windshield glass of an automobile has been simulated. The calculation showed a good agreement with analytical solution and other numerical results. Using the present validated code, the condensation of water vapor has been first tried. The computed results provided some physical features of condensation phenomena even though experimental data and other numerical data were not available. For future work, it is recommended to throughly investigate the effects of boundary conditions on the solution.

• Journal of Advanced Marine Engineering and Technology
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• 제25권3호
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• pp.573-580
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• 2001

When investigating optimum design of the evaporator in the refrigeration and heat pump systems, there is still lack of data for the dynamic characteristics of the evaporator, This is due to the fact that the static characteristics in the evaporator are absolutely difficult to measure and are burdened with uncertainties. In this study, the simulation works for static characteristics in the evaporator of small air conditioner are carried out to obtain the data of dynamic characteristics. In the simulation, the test evaporator is divided by two-phase evaporating region and single-phase heating region. The major parameters are refrigerant flow rate, heat transfer coefficient of air, air velocity and air temperature. The results show that the calculation method for tube length is an easy-to-use to model analysis of static characteristics and to determine state of refrigerant in the evaporator. The effects of the four parameters on the length of evaporating completed point and heat flow rate to the evaporator are clarified.

• 반도체디스플레이기술학회지
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• 제21권2호
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• pp.45-50
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• 2022

The etching with high selectivity of silicon dioxide over silicon nitride is essential in semiconductor fabrication, and gas phase etch (GPE) can increase the competitiveness of the selective dielectric etch. In this work, GPE of plasma enhanced chemical vapor deposited SiO₂ was performed, and the effects of process parameters, such as temperature, partial pressure ratio, and gas supply cycle, are investigated in terms of etch rate and within wafer uniformity. Employing multiple regression analysis, the importance of each parameter elements is analyzed.

• 한국군사과학기술학회지
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• 제16권5호
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• pp.690-702
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• 2013

Ionic liquids(ILs) have been the most investigated chemicals among green solvents including water, glycerol, supercritical carbon dioxdie($scCO_2$). ILs are attracting organic as well as inorganic chemicals because most ionic liquids' vapor pressures are very low so that ILs are liquids phase at ambient conditions. ILs are composed of various anions and cations, thus chemists can design functionalized solvents and/or catalysts that can be used in specific synthetic reactions by means of combinations of different ions. Many scientists believe ILs being green materials because of its low vapor pressure as well as the flexibility in controlling the chemical and physical properties. In this review the author describes recent development of ILs focused on imidazolium and pyridinium ILs which are being most investigated presently. In order to apply this materials in industrial level, the toxicity matter must be resolved first. In this regard, the author describes recent research trend regarding environmental effects by ILs as well as some meaningful results as well.

• Journal of Mechanical Science and Technology
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• 제18권12호
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• pp.2310-2318
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• 2004

The effects of change in injection pressure on spray structure in high temperature and pressure field have been investigated. The analysis of liquid and vapor phases of injected fuel is important for emissions control of diesel engines. Therefore, this work examines the evaporating spray structure using a constant volume vessel. The injection pressure is selected as the experimental parameter, is changed from 400 bar to 800 bar by using a common rail injection system. Also, we conducted simulation study by modified KIVA-II code. The results of simulation study are compared with experimental results. The images of liquid and vapor phase for free spray were simultaneously taken by exciplex fluorescence method. As experimental results, the vapor concentration of injected fuel is leaner due to the increase of atomization in the case of the high injection pressure than in that of the low injection pressure. The calculated results obtained by modified KIVA-II code show good agreements with experimental results.