• Title/Summary/Keyword: vapor phase

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Characterization of Fluorocarbon Thin Films by Contact Angle Measurements (접촉각 측정을 통한 불화 유기박막의 특성 평가)

  • 박진구;차남구;신형재;박장호
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.1
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    • pp.39-49
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    • 1999
  • Monolayer thick fluorocarbon films were characterized by the contact angle measurements. The contact angles of three different liquids, water, formamide and diiodomethane were measured on spun coated, vapor phased deposited films and Teflon surface. The highest contact angle over $130^{\circ}$was observed on fluorocarbon films deposited on Al substrates while the lowest angles below $70^{\circ}$deposited on oxide. The surface energies were calculated based on Lewis acid /base theory. The surface energies of Teflon and spin coated FC films were calculated to have 18 and 8.4 dynes /cm, respectively. Higher energies of 31 to .35 dynes /cm were calculated on vapor phase deposited films on silicon and oxide. However vapor phase deposited films on aluminum only showed a large Lewis base energy term. It might be explained by the surface roughness and heterogeneity as observed by dynamic contact angles and AFM measurements.

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Effects of AlN buffer layer on optical properties of epitaxial layer structure deposited on patterned sapphire substrate (패턴화된 사파이어 기판 위에 증착된 AlN 버퍼층 박막의 에피층 구조의 광학적 특성에 대한 영향)

  • Park, Kyoung-Wook;Yun, Young-Hoon
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.30 no.1
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    • pp.1-6
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    • 2020
  • In this research, 50 nm thick AlN thin films were deposited on the patterned sapphire (0001) substrate by using HVPE (Hydride Vapor Phase Epitaxy) system and then epitaxial layer structure was grown by MOCVD (metal organic chemical vapor deposition). The surface morphology of the AlN buffer layer film was observed by SEM (scanning electron microscopy) and AFM (atomic force microscope), and then the crystal structure of GaN films of the epitaxial layer structure was investigated by HR-XRC (high resolution X-ray rocking curve). The XRD peak intensity of GaN thin film of epitaxial layer structure deposited on AlN buffer layer film and sapphire substrate was rather higher in case of that on PSS than normal sapphire substrate. In AFM surface image, the epitaxial layer structure formed on AlN buffer layer showed rather low pit density and less defect density. In the optical output power, the epitaxial layer structure formed on AlN buffer layer showed very high intensity compared to that of the epitaxial layer structure without AlN thin film.

Ordering in InGaAsP Epitaxial Layers Grown by low Pressure metalorganic Chemical Vapor Deposition (저압 MOCVD 방법으로 성장된 InGaAsP 에피층에서의 ordering 현상)

  • 김대연;문영부;이태완;윤의준;이정용;정현식
    • Journal of the Korean Vacuum Society
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    • v.7 no.3
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    • pp.187-194
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    • 1998
  • InGaAsP epitaxial layers lattice matched to InP were grown at 600 and $620^{\circ}C$ by low pressure metalorganic chemical vapor deposition. Solid phase composition of group III was controlled by the diffusion flux gas phase to the reachion surface. For the case of group V, the difference of As and P vapor pressure and pyrolysis efficiency of $PH_3$and $AsH_3$ mainly determined their in corporation into solid. An abnormal behavior of peak energy shift was observed below 75K in temperature variant photoluminescence study. This abnormal behavior was explained by the difference in order of ordering which makes spatial variation of energy gap in InGaAsP layer and this explanation was supported by the analyses of transmission electron microscopy and transmission spectroscopy.

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Thermal Durability of 4YSZ Thermal Barrier Coating Deposited by Electron Beam PVD (전자빔을 이용한 물리기상증착법으로 제조된 열차폐용 4 mol% YSZ 코팅의 내열특성)

  • Park, Chanyoung;Yang, Younghwan;Kim, Seongwon;Lee, Sungmin;Kim, Hyungtae;Lim, Daesoon;Jang, Byungkoog;Oh, Yoonsuk
    • Journal of Powder Materials
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    • v.20 no.6
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    • pp.460-466
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    • 2013
  • 4 mol% Yttria-stabilized zirconia (4YSZ) coatings with $200{\mu}m$ thick are fabricated by Electron Beam Physical Vapor Deposition (EB-PVD) for thermal barrier coating (TBC). $150{\mu}m$ of NiCrAlY based bond coat is prepared by conventional APS (Air Plasma Spray) method on the NiCrCoAl alloy substrate before deposition of top coating. 4 mol% YSZ top coating shows typical tetragonal phase and columnar structure due to vapor phase deposition process. The adhesion strength of coating is measured about 40 MPa. There is no delamination or cracking of coatings after thermal cyclic fatigue and shock test at $850^{\circ}C$.

Measurements and Correlations of Isobaric Vapor-Liquid Equilibrium for Glycerol-Water Systems (Glycerol-물 계에 대한 등압 기액평형의 측정과 상관관계)

  • Rho, Seon-Gyun;Kang, Choon-Hyoung
    • Applied Chemistry for Engineering
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    • v.8 no.6
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    • pp.893-900
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    • 1997
  • In this study, vapor-liquid equilibria of a binary system, which consists of glycerol and water, are measured using a vaporrecirculating modified Othmer still at various subatmospheric pressures. The constituent components of the binary system considered in this study exhibit a large difference in the boiling temperatures. Since it is generally observed that the properties of a mixture greatly differ from those of the pure components, the phase equilibrium characteristics of a mixture can not be predicted from the properties of the pure components. Furthermore, an abrupt increase in the boiling temperature occurs as the concentration of the higher boiling component exceeds a certain value. Therefore, it is essential to acquire realistic phase equilibrium data of the mixture for industrial applications. Using the UNIQUAC model, the experimental vapor-liquid equilibrium data are correlated with good accuracy. The thermodynamic consistency test is also performed to ensure soundness of the data.

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Synthesis of Nanosized TiO$_2$ Powder by Chemical Vapor Condensation Process(1) (화학기상응축법에 의한 TiO$_2$ 나노분말의 합성 (1))

  • 김신영;유지훈;이재성;김종렬;김병기
    • Journal of the Korean Ceramic Society
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    • v.36 no.7
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    • pp.742-750
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    • 1999
  • Nanosized TiO2 powders were synthesized using the chemical vapor conduensation (CVC) process with various precursor feeding rates (0.37 and 0.752 ml/min) and oxygen flow rates(1-2slm) conditions and powder characteristics were investigated in terms of formation of nanosized powder varying with the above processing conditions. For this study the main thermodynamic and fluid dynamic factors -supersaturation ratio collision frequency and residence time-were theoretically established and compared to the characteristics of formed TiO2 powder. The loosely combined anatase phase powders (including less than 3%of rutile phase) having 20-30nm crystallite size were obtained at overall conditions. The particle size and th degree of agglomeration for a precursor flow rate of 0.376 ml/min turn out to be smaller than for a flow rate of 0.742ml/min. And the decreasing of particles size and particle size distribution were observed with increasing oxygen flow rate as the residence time and collision frequency were reduced by increasing oxygen flow rate,. It appears that further scrutiny is needed to elucidate the influence of the individual thermodynamic and kinetic parameters mdependently.

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Isothermal Vapor-Liquid Equilibria at 333.15K and Thermodynamic Excess Properties for the Binary System of Methanol+Dimethyl Carbonate (Methanol+Dimethyl Carbonate 혼합계의 333.15 K 등온 기-액 평형과 열역학 과잉 물성)

  • Han, Kyu-Jin;Park, So-Jin
    • Korean Chemical Engineering Research
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    • v.43 no.3
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    • pp.387-392
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    • 2005
  • Recently, dimethyl carbonate (DMC) is considered as an alternative of MTBE (methyl tert-butyl ether), additive for non-leaded gasoline with their fast biodegradation rate and low toxicity. DMC is usually synthesized so far by oxidative carbonylation of methanol, and recently developed synthetic process is also started with methanol. Since the phase equilibria of the system, consisted of DMC and methanol or other reaction products on different temperature and pressure is necessary for the optimum separation process design and operation. However the reported phase equilibria and physical properties for DMC mixtures in the Dortmund Data Bank (DDB; thermodynamic property data bank) are quite rare. Besides, infinitely dilute properties are not found. In this work, isothermal vapor-liquid equilibria at 333.15 K for methanol+DMC binary system and mixing properties, excess molar volume and viscosity deviation at 298.15 K are directly measured and correlated. Additionally, infinitely dilute activity coefficient of methanol in the DMC solvent at three different temperatures are measured and compared with predicted values using modified UNIFAC (Dortmund).

Properties of GaN Film Grown on AlN/PSS Template by Hydride Vapor Phase Epitaxy (AlN/PSS Template 위에 HVPE로 성장한 GaN 막의 특성)

  • Son, Hoki;Lee, YoungJin;Lee, Mijai;Kim, Jin-Ho;Jeon, Dae-Woo;Hwang, Jonghee;Lee, Hae-Yong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.29 no.6
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    • pp.348-352
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    • 2016
  • In this paper, GaN film was grown on AlN/PSS by hydride vapor phase epitaxy compared with GaN on planar sapphire. Thin AlN layer for buffer layer was deposited on patterned sapphire substrate (PSS) by metal organic chemical vapor deposition. Surface roughness of GaN/AlN on PSS was remarkably decreased from 28.31 to 5.53 nm. Transmittance of GaN/AlN grown on PSS was lower than that of planar sapphire at entire range. XRD spectra of GaN/AlN grown on PSS corresponded the wurzite structure and c-axis oriented. The full width at half maximum (FWHM) values of ${\omega}$-scan X-ray rocking curve (XRC) for GaN/AlN grown on PSS were 196 and 208 arcsec for symmetric (0 0 2) and asymmetric (1 0 2), respectively. FWHM of GaN on AlN/PSS was improved more than 50% because of lateral overgrowth and AlN buffer effect.

Photoluminescence Studies of ZnO Nanorods Grown by Vapor Phase Transport (기상이동법으로 성장한 산화아연 나노막대의 포토루미네슨스 분석)

  • Kim, Soaram;Cho, Min Young;Nam, Giwoong;Kim, Min Su;Kim, Do Yeob;Yim, Kwang Gug;Leem, Jae-Young
    • Korean Journal of Metals and Materials
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    • v.49 no.10
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    • pp.818-822
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    • 2011
  • ZnO nanorods were grown on Au-coated Si substrates by vapor phase transport (VPT) at the growth temperature of $600^{\circ}C$ using a mixture of zinc oxide and graphite powders as source material. Au thin films with the thickness of 5 nm were deposited by ion sputtering. Temperature-dependent photoluminescence (PL) was carried out to investigate the optical properties of the ZnO nanorods. Five peaks at 3.363, 3.327, 3.296, 3.228, and 3.143 eV, corresponding to the free exciton (FX), neutral donor bound exciton ($D^{\circ}X$), first order longitudinal optical phonon replica of free exciton (FX-1LO), FX-2LO, and FX-3LO emissions, were obtained at low-temperature (10 K). The intensity of these peaks decreased and their position was red shifted with the increase in the temperature. The FX emission peak energy of the ZnO nanorods exhibited an anomalous behavior (red-blue-red shift) with the increase in temperature. This is also known as an "S-shaped" emission shift. The thermal activation energy for the exciton with increasing temperature in the ZnO nanorods is found to be about 26.6 meV; the values of Varshni's empirical equation fitting parameters are = $5{\times}10^{-4}eV/K$, ${\beta}=350K$, and $E_g(0)=3.364eV$.

Weathering of Prunus sargentii Specimens Modified with Acetic Anhydride and Formaldehyde Vapor (무수초산 및 포름알데하이드 기상처리 산벚나무의 야외폭로 및 촉진열화)

  • Kang, Ho-Yang;Kim, Su-Won;Park, Sang-Jin
    • Journal of the Korean Wood Science and Technology
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    • v.31 no.5
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    • pp.57-64
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    • 2003
  • Small cherry specimens modified with acetic anhydride and formaldehyde vapor phase were weathered by outdoor exposure and accelerated conditioning in a climate chamber. The effects of the chemical modification were evaluated by measuring their weight percentage gains (WPG), hygroscopicity and color differences before and after weathering. The average WPGs of the 72 hour acetylated and formaldehyde-treated specimens were 8.1 and 15.7%, respectively. After outdoor exposure for more than 2 months, the acetylated specimens lost weights by only 1.5%, but the formaldehyde-treated did much more than the formers. It was revealed that acetylation reduced the hygroscopicity and discoloration of wood while formaldehyde treatment didn't. Moreover the longer is the formaldehyde treatment time the more degraded after weathering. It was concluded that the vapor-phase acetylation could be applied for improving the dimensional stability of old wooden blocks.