• Title/Summary/Keyword: vacuum pump

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The Estimating an Effect of Rapid Flux Increase to a Membrane in the Intermittent Aeration MBR Process Using Alum Treatment (응집제를 활용한 간헐포기 MBR공정에서 순간플럭스 증가가 분리막에 미치는 영향 평가)

  • Choi Song-Hyu;Cho Nam-un;Han Myong Su
    • Membrane Journal
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    • v.15 no.1
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    • pp.70-83
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    • 2005
  • By supplying air intermittently in various mode, the effects of oxic/anoxic time ratio and air scrubbing in aeration condition on the membrane flux and permeability were investigated. When suction pump stops, vacuum pressure remains inside the suction pump. Therefore, the effect of remaining vacuum pressure in the suction pump on fouling of membrane was investigated. The effect of EPS (Extra cellular Polymeric Substance) which is generated due to the long SRT and high concentration of MLSS and the dose of coagulant on the membrane were also investigated. The suitable oxic/anoxic time ratio for the best removal efficiency of organic matter and nitrogenous matter was 40 minutes (Oxic) : 20 minutes (Anoxic). At this time ratio, alum was dosed into the aeration tank. The result of dosing alum was that the concentration of alum solution might affect nitrification and denitrification. To remove 1 mg/L of phosphorus in MBR process, it needs 0.75 mg/L of alum solution.

Characterizations of a Cold Trap System for the Process Stabilization of Al2O3 by ALD Equipment (ALD 장비의 Al2O3 공정 안정화를 위한 저온 트랩 장치의 특성 평가)

  • Yong Hyeok Seo;Won Woo Lee;In Hwan Kim;Ji Eun Han;Yeon Ju Lee;Che Hoo Cho;Yongmin Jeon;Eou-Sik Cho;Sang Jik Kwon
    • Journal of the Semiconductor & Display Technology
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    • v.23 no.1
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    • pp.92-96
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    • 2024
  • The application of the technology for forming Al2O3 thin films using ALD(atomic layer deposition) method is rapidly increasing in the semiconductor and display fields. In order to increase the efficiency of the ALD process in a mass production line, metallic by-products generated from the ALD process chamber must be effectively collected. By collecting by-products flowing out of the chamber with a cold trap device before they go to the vacuum pump, damage to the vacuum pump can be prevented and the work room can be maintained stably, resulting in increased process flow rate. In this study, a cold trap was installed between the ALD process chamber and the dry pump to measure and analyze by-products generated during the Al2O3 thin film deposition process. As a result, it was confirmed that Al and O elements were discharged, and the collection forms were two types: bulk and powder. And the binding energy peaked at 73.7 ~ 74.3 eV, the binding energy of Al 2p, and 530.7 eV, the binding energy of O 1s, indicating that the binding structure was Al-O.

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Development of Ginseng Seeders for the Dual-use in Seedling and Direct Planting (묘삼 직파 겸용 인삼파종기 개발)

  • 이기명;박규식;김창수;김재열;김진현
    • Journal of Biosystems Engineering
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    • v.28 no.5
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    • pp.395-402
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    • 2003
  • Standard ginseng seedling, selected after one year's rearing in the seedling bed has been conventionally transplanted in Korea. Recently, the direct seeding areas have been increasing to product high quality ginsengs for red-ginseng processing. Reciprocating push-rod brush, holed-roller and vacuum suction seeders, planting with 30 ${\times}$ 30mm spacings and adjustable to the folds were designed and theirs performances were evaluated. The developed three types of seeders reliably performed at the success rate over 95% with less than 10% in slip rate, and could be used a seeder for the greater spacings by adjusting metering parts. The research concluded that the vacuum suction seeder was the most feasible and practical with the greatest metering success and the least slip among three type seeders of the reciprocating push-rod brush, holed-roller and vacuum suction seeders. The vacuum suction seeder holds a seed with each needle nozzle using the negative pressure created by a vacuum pump. The capacity was 24.5 times greater than a man power at the speed of 5 m/min.

Performance Analysis of a Vacuum-Compatible Air Bearing (진공용 공기베어링의 성능해석)

  • Khim, Gyung-Ho;Park, Chun-Hong;Lee, Hu-Sang;Kim, Seung-Woo
    • Journal of the Korean Society for Precision Engineering
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    • v.23 no.10
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    • pp.103-112
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    • 2006
  • This paper describes a theoretical analysis and experimental verification on the performances of a vacuum-compatible air bearing, which is designed with a cascaded exhaust scheme to minimize the air leakage in a vacuum environment. The design of the vacuum-compatible air bearing equipped with the differential exhaust system requires great care because several design parameters, such as the number of exhaust stages, diameter of exhaust tube, pumping speed of a vacuum pump, and bearing clearance greatly influence the air leakage and thus degree of vacuum. In this study, a performance analysis method was proposed to estimate the performances of the air bearing, such as load capacity, stiffness, and air leakage. Results indicate that the load capacity and stiffness of the air bearing was improved as its boundary pressure, which was determined by the $1^{st}$ exhaust method, was lowered, and the dominant factors on the chamber's degree of vacuum were the number of exhaust stages, exhaust tube diameter and bearing clearance. A vacuum chamber and air bearing stage using porous pad were fabricated to verify the theoretical analysis. The results demonstrate that chamber pressure up to an order of $10^{-3}$ Pa was achieved with the air bearing stage operating inside the chamber, and this analysis method was valid by comparing predicted values with experimental data, for the mass flow rates from the porous pad, and pressures at each exhaust port and chamber, respectively.

Prediction of changes in the pumping speed characteristics of dry pumps with the geometry of the conduit

  • Sunmin Song;Jun Oh Kim;Sang-Woo Kang;Won Chegal;Jae-Soo Shin;Sung-Kyu Lim
    • Journal of the Korean Physical Society
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    • v.80
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    • pp.337-346
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    • 2022
  • In this study, we investigated whether changes in the pumping speed characteristics of dry pumps due to the conduit can be predicted through simulation. The intrinsic pumping speed was measured in the dry pump characteristic evaluation system of the Korea Research Institute of Standards and Science, and the pumping speed affected by the conduit was measured using the plasma enhanced chemical vapor deposition (PECVD) equipment of the National NanoFab Center. Change in the pumping speed were predicted using conductance calculation equations and commercial vacuum-system simulation program, VacTran. A comparison of the results from the two approaches showed that the error rate was within ± 6.5%, confirming the reliability of the prediction. The simulation result was compared with the measured effective pumping speed, and it was confirmed that the error rate was within ± 10%, except in a specific part where the error rate was up to ± 40%. It is considered that the high error rate in some areas is as a result of automatically adjusting the rotation speed of the motor according to the power consumption of the inverter. However, a high simulation accuracy was obtained, demonstrating that the pumping speed characteristics can be predicted through simulation. This has potential application in the design of a vacuum system.

A Study on the Performance Characteristics of Air Driven Gas Ejector (공기구동 기체이젝터의 성능특성에 관한 연구)

  • 홍영표;윤두호;김용모;윤석훈
    • Journal of Advanced Marine Engineering and Technology
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    • v.18 no.1
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    • pp.51-59
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    • 1994
  • The gas jet pumps serve to preduce a vacuum or can be used as gas jet compressors. These are operated on the same principle as a steam jet vacuum pump : in the driving nozzle the pressure energy of the motive medium is converted into the kinetic energy. In the diffuser the driving jet mixes with the suction medium and the kinetic energy is reconverted into the pressure enegy. The application fields of gas jet ejectors are the evacuation of siphoning installations, the elevation of liquids, the production of vacuum filters, the vacuum supporting airlift system, the evacuation of the suction line of centrifugal pumps and the ventilation of the dangerous gases to the atmosphere. The performance of gas jet ejector is influenced strongly to velocity coefficient of motive nozzle, the distance between the motive outlet to the diffuser inlet and the dimensions of diffuser. This study is performed for the computer aided design of gas jet ejectors in future. Through the present experiments, it is known that the velocity coefficient of the motive air nozzle ranges from 0.91 to 0.95 and the maximum efficiency of gas jet ejector is 24.6%.

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An Experimental Study of a Diffuser Test Rig for Simulating High-Altitude Environment by using Hot (고온 연소가스를 이용한 고공 환경 모사용 디퓨저 실험장치 연구)

  • Yang, Jae-Jun;Lee, Yang-Suk;Kim, Yoo;Ko, Young-Sung;Kim, Yong-Wook;Kim, Chun-Taek
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2007.11a
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    • pp.31-34
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    • 2007
  • Performance tests of supersonic exhaust diffuser were conducted by using hot combustion gas for simulating high-altitude environment. The test rig consists of a combustion chamber, a vacuum chamber, water cooling ring and diffuser. Before combustion experiments, the preliminary leak tests were carried out on the liquid rocket engine and diffuser by using high pressure nitrogen(30barg) and a vacuum pump. The leak test results showed that there was no leaks at high pressure and vacuum pressure conditions.

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Efficiency Analysis of Thermal Transpiration According to Knudsen Number for Application to Micro-propulsion System (마이크로 추진장치에 적용을 위한 누센수에 따른 열적발산원리의 효율분석)

  • Jung, Sung-Chul;Huh, Hwan-Il
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.36 no.5
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    • pp.483-490
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    • 2008
  • Minimization of nozzle induces many flow losses in micro-propulsion system. In this study, we studied about thermal transpiration based micro propulsion system to overcome these losses. Thermal transpiration device(Knudsen pump) having no moving parts can self-pump the gaseous propellant by temperature gradient only (cold to hot). We designed, fabricated the Knudsen pump and analyzed pressure gradient efficiency of membrane according to Knudsen number under vacuum condition. Experimental results showed that thick membranes are more effective than thin membranes in transition flow regime, and pressure gradient efficiency according to Knudsen number is increased to maximum 82% apart from membrane thickness in free molecular regime.

Development Status of a Turbopump for 30-ton Thrust Level of Engine (30톤급 액체로켓엔진용 터보펌프 개발현황)

  • Kim Jin-Han;Hong Soon-Sam;Jeong Eun-Hwan;Choi Chang-Ho;Jeon Seong-Min
    • Proceedings of the Korean Society of Propulsion Engineers Conference
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    • 2005.11a
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    • pp.375-383
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    • 2005
  • The present paper describes the first development of a LOX/kerosene type turbopump in Korea. The liquid rocket engine, that the turbopump can be applied to, has a 30-ton(metric) level of vacuum thrust and employs a gas generator cycle. The turbopump consists of two single-stage centrifugal pumps, that is, LOX and kerosene pumps, and one single-stage impulse turbine. Inter-propellant seal(IPS) is located between the LOX pump and the kerosene pump to avoid any interaction between the propellants. A series of component and TPU(Turbopump Unit) test has been completed in the level of simulant propellants and ready for hot firing tests.

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Development of the Novel Dry and Wet Deposition Collector (새로운 건성 및 습성 침착 채취기의 개발)

  • 이병규;이채복
    • Journal of Korean Society for Atmospheric Environment
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    • v.16 no.6
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    • pp.675-684
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    • 2000
  • A novel dry and wet deposition collector, which can overcome the several problems such as water evaporation cartridge cracks and high costs founded in the previous collector systems, has been constructed. ENVI-18 SPE adsorption cartridge has been used to measure atmospheric deposition of polycylic aromatic hydrocarbons (PAHs). A surrogate surface, consisted of water and methanol, was filled in the dry deposition funnel to simulate dry deposition onto water surface. A water supply system in order to compensat evaporation of the surrogate surface was used and it was consisted of a piston pump, a tubing pump, a overflow tube and a chamber system. A novel water vaporizing system to supply water onto the wet SPE cartridge system with a constant flow rate was developed. The novel water vaporizing system, consisted of a vacuum pump, a water supply reserviour and tube and a mini space heater, could prevent the PAHs adsorption cartridge cracks occurred in the previous collector and effectively adsorb PAHs. The novel dry and wet deposition collector showed a good adsorption, desorption, and recovery rates of PAHs. By reducing the number of pumps used and employing polypyopylene (PP) instead of teflon as a material of collection funnel, the total construction costs were much reduced as compared with the previous dry and wet deposition collectors.

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