• The KSFM Journal of Fluid Machinery
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• v.10 no.3 s.42
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• pp.47-54
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modem semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through the results of its 3-D finite element model. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated determinately and indeterminately by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of critical speeds and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, and unbalance responses under various unbalance locations. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.17 no.10
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• pp.967-975
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• 2007

A rotordynamic analysis was performed with a dry vacuum pump, which is a major equipment in modern semiconductor and LCD manufacturing processes. The system is composed of screw rotors, lobes picking air, helical gears, driving motor, and support rolling element bearings of rotors and motor. The driving motor-screw rotor system has a rated speed of 6,300 rpm, and was modeled utilizing a rotordynamic FE method for analysis, which was verified through 3-D FE analysis and experimental modal analysis. As loadings on the bearings due to the gear action were significant in the system considered, each resultant bearing load was calculated by considering the generalized forces of the gear action as well as the rotor itself. Each resultant bearing loading was used in calculating each stiffness of rolling element bearings. Design goals are to achieve wide separation margins of lateral and torsional critical speeds, and favorable unbalance responses of the rotor in the operating range. Then, a complex rotordynamic analysis of the system was carried out to evaluate its forward synchronous critical speeds, whirl natural frequencies and mode shapes, unbalance responses under various unbalance locations, and torsional interference diagram. Results show that the entire system is well designed in the operating range. In addition, the procedure of rotordynamic analysis for dry vacuum pump rotor-bearing system was proposed and established.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.361-365
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• 2002

In this paper, a magnetic suspension system with inductive sensors fur a high vacuum turbomolecular pump(TMP) is discussed. The performance of designed inductive position sensor is evaluated by static and dynamic test, and the test results show sensitivity of about 6,000 V/m and dynamic bandwidth of 750 ㎐. The protype of magnetic suspension system is designed and constructed with 5-axis magnetic bearing, inductive sensor and BLDC internal motor. With DSP based digital PID control system, the prototype is examined its high damping ratio and stable operation up to 20,000 rpm of rotation.

• Proceedings of the KIEE Conference
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• 2002.07d
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• pp.2683-2686
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• 2002

In this paper, it has been investigated that the design and simulation of linear motor for medical appliances. Vacuum pump consists of unified plunger and piston part, coils, inlet valve and outlet valve. Operating principal of vacuum pump show that air is to flow to go inside through the inlet valve, when the magnetic force (16N) is exerted, whereas, air is to flow to go outside through outlet valve, when spring force (14.8N) is exerted. The results of simulation, it was turned out that magnetic force was loaded with 16 Newton, displacement of actuator was about 8mm.

• Journal of the Korean Vacuum Society
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• v.19 no.1
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• pp.1-9
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• 2010

A dynamic flow system has been developed which can be used for vacuum gauge calibration by comparison method - a calibration method in which the reading of the gauge under calibration is compared to another calibrated vacuum gauge called the "secondary standard" - and other vacuum-related experiments. The chamber of the calibration system is pumped by a turbomolecular pump (TMP), backed by a scroll pump. As maximum acceptable pressure at the inlet of a TMP is 0.1 Pa, above which the TMP decelerates, the pumping speed decreases and it becomes more difficult to adjust pressure under such circumstances. In the present work, high pressures of up to 133 Pa have been generated in the chamber of the newly developed dynamic flow control system by installing a well-designed conductance-reducer in the by-pass line and, at the same time, operating the TMP in safe mode. In addition, the gas flow and pressure distribution within the chamber have been investigated for the entire pressure range (0.1 Pa ~ 133 Pa) while generating pressure dynamically. Maximum deviations in pressure (1.6 %) were observed at point C on the chamber, which is close to the gas inlet port on the top of the chamber.

• Proceedings of the KIEE Conference
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• 2002.07d
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• pp.2344-2346
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• 2002

A vacuum control system has been developed for using Ethernet Multi Serial Device Severs (EMSDS) for the Pohang Accelerator Laboratory (PAL) storage ring. There are 124 vacuum ion pumps at the storage ring. It was a very important problem to solve the problem how to control such a big number of vacuum pumps distributed around the ring. After discussions, we decided to develop a serial to ethernet interrace device sever that will be mounted in the control system rack. It has a 32-bits microprocessor embedded Linux, 12 ports RS485 (or RS232) slave interface. one channel 10/100BaseTx ethernet host port, one channel UART host port, and 16 Mbytes large memory buffer. These vacuum pumps are connected to Ion-Pump serial controllers, which chop the AC current so as to control the current in the pumps. The EMSDS connect either 100BaseTx or 10BaseT ethernet networks to asynchronous serial ports for communication with serial device. It can simultaneously control up to 12 ion-pump serial controllers. 12 EMSDS are connected to a personal computer (PC) through the network. The PC can automatically control the EMSDS by sending a set of commands through the TCP/IP network. Upon receiving a command from a PC running under Windows2000 through the network, the EMSDS communicate through the stave serial interrace ports to ion-pump controller. We added some software components on the top of EPICS (Experimental Physics and Industrial Control System) toolkit.

• Proceedings of the KSME Conference
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• 2007.05b
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• pp.2725-2730
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• 2007

Turbo-type molecular drag pumps ( MDPs ) are used in the liquid crystal display ( LCD ), semiconductor and other thin film industries. Siegbahn ( disk-type ) molecular drag pumps are used as high-pressure stages in the hybrid-type turbomolecular pumps, where they can operate in the viscous, the transition and the free molecular flow regime. In this study is performed to investigate the pumping characteristics of three-stage disk-type molecular drag pump ( DTDP ) in the molecular transition flow region. The experiments are measured using five vacuum pressure gauges in the positions for rotors of DTDP. The test is performed with nitrogen gas ( $N_2$ ).

• 한국전산유체공학회:학술대회논문집
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• 2008.03b
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• pp.405-408
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• 2008

From the previous researches about flow characteristic of micro-nozzle, we found that viscosity and back pressure induced heavy losses in micro nozzle. To overcome thess losses, we began to study new conceptual micro propulsion system that is thermal transpiration based micro propulsion system. It has no moving parts and can pump the gaseous propellant by temperature gradient only (cold to hot). Most of previous research on thermal transpiration is in its early stage and mainly studied for application to small vacuum facility or gas chromatography in ambient condition using nanoporous material like aerogel. In this study, we focus on basic research of propulsion system based on thermal transpiration using polyimide material in vacuum conditions.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.224-224
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• 2012

위성체가 작동하는 우주환경인 고진공상태에서는 위성체의 부품에서 발생 할 수 있는 outgassing으로 인해 위성체가 오염되어 위성체의 성능이 저하될 수 있으며, 특히 이차면경(second surface mirror) 및 광학렌즈 등을 오염시킴으로써 위성체 본연의 임무수행 실패라는 결과를 초래할 수도 있다. 따라서 지상에서 위성체의 부품에 대해 고온($85^{\circ}C$ 이상)과 고진공($5.0{\times}10-3Pa$ 이하)의 상태를 모사하여 오염물질을 제거함으로써 outgassing의 발생을 막고, 아울러 오염근원을 검출할 수 있는 vacuum bake-out 시험이 필수적이라 할 수 있다. 이를 위해서 한국항공우주연구원 위성시험동에는 전용 bake-out 챔버가 설치되어 있으며 저진공용 dry pump와 booster pump를 이용하여 5.0 Pa의 저진공을 형성하고, 2대의 cryopump를 이용하여 $5.0{\times}10-3Pa$ 이하의 고진공을 생성하게 되는데, Bake-out 챔버의 진공 배기시스템에 대하여 자세히 알아보고자 한다.

• Journal of the Korean Vacuum Society
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• v.15 no.3
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• pp.231-240
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• 2006

The paper reviews the development of ion pumps, their operating principles and describes particular designs. The performance of ion pumps when used for various gases, their range of operation and fields of application are discussed.