• International journal of advanced smart convergence
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• 제6권4호
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제50권1호
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• pp.37-40
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• 2001

New package process for PDP was proposed based on the glass-to-glass vacuum-electrostatic bonding process and tubeless packaging concept derived from the previous study. Hermeticity and operating performance of PDP test panel through the seal-off process application and the possibility for practical use might be high if the process simplicity and productivity-related effort was sequentially carried out.

• 한국기계가공학회지
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• 제6권4호
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• pp.65-70
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• 2007

In this study, we analyzed about that after design form manufacture master pattern in Rapid Prototyping-RP through design program, processes to manufacture prototype using Vacuum Casting. In Rapid Prototyping-RP, there is an en-or by shrinkage of resin and, in Vacuum Casting, there is an error by shrinkage of silicon. To select condition which shrinkage become the minimum of each process, manufactured prototype after using Full Factorial Design of Design of Experiments, We could confirm shrinkage using reverse engineering and that result came into effect ANOVA 2-way. We applied errors of each process to master pattern, and then presented the method to improve flood control precision of prototype of Vacuum Casting.

• 한국표면공학회지
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• 제43권5호
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• pp.211-216
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• 2010

Vacuum carburizing process is well known process for its environment-friendly, low-cost, high-quality characteristics, compared with gas carburizing. In this study, a research was carried out to develop a process of vacuum carburizing for essential components of automotive transmission that is difficult to control its distortion. As a result, vacuum carburizing process is superior to gas carburizing in terms of cost, environment and quality.

• Journal of Advanced Marine Engineering and Technology
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• 제25권6호
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• pp.1341-1352
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• 2001

Vacuum freeze drying process by which frozen water in a drying material is removed sublimation under vacuum condition, is now applied to various industrial field such as the manufacturing and packaging of pharmaceuticals in pharmaceutical industry, the drying of bio- products in bio-technology industry, the treatment of various quality food stuff in food technology, and so on. The Knowledge about the heat and mass transfer characteristics related with the vacuum freeze drying process is crucial to improve the efficiency of the process as well as the quality of dried products. In spite of increasing needs for understanding of the process, the research efforts in this fields are still insufficient. In this paper, a numerical code that can predict primary drying in a vial is developed based on the finite volume method with a moving grid system. The calculation program can handle the axis- symmetric and multi-dimensional characteristics of heat and mass transfer of the vial freeze drying process. To demonstrated the usefulness of the present analysis, a practical freeze drying of skim Milk solution in a vial is simulated and various calculation results are presented.

• 한국전기전자재료학회논문지
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• 제16권4호
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• pp.330-335
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• 2003

This paper reports the optimum structure of the vacuum packaged Porous poly-silicon Nano-Structured (PNS) emitter. The PNS layer was obtained by electrochemical etching process into polycrystalline silicon layer in a process controlled to anodizing condition. Current-voltage studies were carried out to optimize process condition of electron emission properties as a function of anodizing condition and top electrode thickness. Also, we measured in advance the electron emission properties as a function of substrate temperature because the vacuum packaged process was performed under the condition of high temperature ambient (430$^{\circ}C$). Auger Electron Spectrometer (AES) studies shows that Au as a top-electrode was diffused to PNS layer during temperature experiments. Thus, we optimized the thickness of top-electrode in order to make the vacuum package PNS emitter. As a result, the vacuum Packaged PNS emitter was successfully emitted by optimizing process.

• 센서학회지
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• 제29권5호
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• pp.354-359
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• 2020

The high vacuum hermetic sealing technique ensures excellent performance of MEMS resonators. For the high vacuum hermetic sealing, the customization of anodic bonding equipment was conducted for the glass/Si/glass triple-stack anodic bonding process. Figure 1 presents the schematic of the MEMS resonator with triple-stack high-vacuum anodic bonding. The anodic bonding process for vacuum sealing was performed with the chamber pressure lower than 5 × 10^-6 mbar, the piston pressure of 5 kN, and the applied voltage was 1 kV. The process temperature during anodic bonding was 400 ℃. To maintain the vacuum condition of the glass cavity, a getter material, such as a titanium thin film, was deposited. The getter materials was active at the 400 ℃ during the anodic bonding process. To read out the electrical signals from the Si resonator, a vertical feed-through was applied by using through glass via (TGV) which is formed by sandblasting technique of cap glass wafer. The aluminum electrodes was conformally deposited on the via-hole structure of cap glass. The TGV process provides reliable electrical interconnection between Si resonator and aluminum electrodes on the cap glass without leakage or electrical disconnection through the TGV. The fabricated MEMS resonator with proposed vacuum packaging using three-layer anodic bonding process has resonance frequency and quality factor of about 16 kHz and more than 40,000, respectively.

• 대한용접접합학회:학술대회논문집
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• 대한용접접합학회 2009년 추계학술발표대회
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• pp.96-96
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• 2009

The purpose of this study is to clarify the transitional behavior and main factor of excessive welding distortion caused by fabrication process of STS 304 vacuum vessel having double curvature for the efficient quality control of vacuum vessel. In order to do it, the predictive equations of the welding distortion in simple weldment of vacuum vessel were established by conventional finite element analysis. And the principal factor controlling the welding distortion was identified by evaluating the welding distortion of vacuum vessel in each fabrication process with FEA and simplified thermo elastic method. Based on the results, the principal factors of distortion of vacuum vessel were clarified as angular distortion and transverse shrinkage which are a source of excessive out-of plane distortion in the double curved vacuum vessel. It was expected that the FE analysis results of this study could contribute to establish the proper control method of welding distortion for double curved vacuum vessel.

• 진공이야기
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• 제4권1호
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• pp.16-23
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• 2017

Recently, KSTAR, Korea's superconducting fusion energy research and development device, has succeeded in driving the high performance plasma for 70 seconds for the first time in the world. Continuous plasma operation technology is an essential factor for commercialization of fusion energy power generation. Therefore, this achievement is expected to play a major role in the research of fusion technology required for future fusion power plants. In order to operate the KSTAR, the discharge process in which the neutral gas is turned into the plasma should be preceded in the start-up (breakdown) phase of tokamak operation. This process essentially involves the vacuum environment in the tokamak device. KSTAR has successfully operated a vacuum pumping system to achieve the target level of the vacuum environment through a high temperature baking operation, a discharge cleaning process and boronization.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2000년도 추계학술대회 논문집
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• pp.453-456
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• 2000

This paper presents experimental results on selecting optimal process parameters for UV-Vaccum casting. The UV-Vacuum casting is a relatively new process that allows very rapid mold preparation and part duplication via UV curing. Effect of various process variables such as pressure and temperature on mold strength and part accuracy was evaluated by using Taguchi method.