• 유체기계공업학회:학술대회논문집
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• 유체기계공업학회 2006년 제4회 한국유체공학학술대회 논문집
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• pp.249-252
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• 2006

We conducted the experiment to analyze characteristics of micro-nozzle using different cold gas under two different nozzle expansion ratios in low vacuum condition. We measured thrust and chamber pressure and mass flow rate under low vacuum condition, and then compared them with those in ambient pressure.

• Tribology and Lubricants
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• 제35권6호
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• pp.389-395
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• 2019

In various industries, thin film coatings are used to improve friction and wear characteristics. Various types of tribotesters are used to evaluate the friction and wear characteristics of such thin film coatings. In this study, we fabricated a micro-tribotester and Tribo-scanning electron microscopy (SEM) to compare the friction and wear characteristics of copper (Cu) coatings under an atmospheric pressure and a vacuum condition, respectively. The reliability of the different types of tribotesters was evaluated by performing calibrations for the sensor to measure the friction forces and normal loads. Using the two different types of devices, the friction and wear tests are conducted at the same experimental conditions excluding environment conditions such as the atmospheric pressure and vacuum condition. The friction coefficient at the vacuum condition is lower than at the atmospheric pressure. This difference in friction characteristics is due to the fact that wear phenomena occur differently according to the atmospheric pressure and vacuum condition. At the atmospheric pressure, the abrasive wear is the main wear mechanism. At the vacuum condition, the adhesive wear is the main wear mechanism. The reason for the difference in the wear mechanism of the Cu coating at the atmospheric pressure and the vacuum condition is that the oxidation phenomenon, which does not appear at the vacuum condition, occurs at the atmospheric pressure; therefore, the characteristics of the Cu coating change accordingly.

• 대한기계학회논문집B
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• 제27권7호
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• pp.877-882
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• 2003

The main objective of the present study is to analyze the heat transfer characteristics in the vacuum carburizing furnace. Local temperatures are measured at different locations in the self-fabricated furnace for various operating conditions using K-type thermocouples. In addition, the present study simulates the fluid flows and heat transfer in the vacuum carburizing furnace using a commercial package (Fluent V. 6.0), and compares the predictions of local temperatures with experimental data. The temperature and flow fields are predicted. It is found that the time taken for reaching the steady-state temperature under the vacuum pressure is shorter than that under the normal pressure condition. It means that the carburizing furnace under vacuum pressure condition is capable of saving the required energy more efficiently than the furnace under the normal pressure condition. Furthermore, the temperature variations predicted by the numerical simulations are in good agreement with experimental data.

• 진공이야기
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• 제2권3호
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• pp.11-15
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• 2015

Particle characteristics diagnosis system (PCDS) was developed to measure submicron particle characteristics by modulation of particle beam mass spectrometry (PBMS) with scanning electron microscopy (SEM) and energy dispersive x-ray spectroscopy (EDS). It is possible to measure the particle size distribution in real-time, and the shape, composition can be measured in sequence keeping vacuum condition. Apparatus was calibrated by measuring the size classified NaCl particle which generated at atmospheric pressure. After the calibration, particles were sampled from the exhaust line of plasma enhanced chemical vapor deposition (PECVD) process and measured. Result confirms that PCDS is capable for analyzing particles in vacuum condition.

• 진공이야기
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• 제2권2호
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• pp.24-28
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• 2015

The brightness of an electron source, along with the aberrations of an objective lens, determines the image resolution and beam current on samples, which are two important parameters for evaluating the performance of an electron microscope. Here we introduce thermal electron source, Schottky emitter and cold field electron emitter. Thermal electron source is the cheapest and stable electron source but it has the lowest brightness. Schottky emitter is 10000 times brighter than tungsten thermal electron source, but requires ultrahigh vacuum operating condition. Cold field electron emitter is 10 times brighter than Schottky emitters, but it is rather unstable and its operation requires most stringent vacuum condition, hindering its widespread use.

• 한국전기전자재료학회논문지
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• 제16권4호
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• pp.330-335
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• 2003

This paper reports the optimum structure of the vacuum packaged Porous poly-silicon Nano-Structured (PNS) emitter. The PNS layer was obtained by electrochemical etching process into polycrystalline silicon layer in a process controlled to anodizing condition. Current-voltage studies were carried out to optimize process condition of electron emission properties as a function of anodizing condition and top electrode thickness. Also, we measured in advance the electron emission properties as a function of substrate temperature because the vacuum packaged process was performed under the condition of high temperature ambient (430$^{\circ}C$). Auger Electron Spectrometer (AES) studies shows that Au as a top-electrode was diffused to PNS layer during temperature experiments. Thus, we optimized the thickness of top-electrode in order to make the vacuum package PNS emitter. As a result, the vacuum Packaged PNS emitter was successfully emitted by optimizing process.

• 한국기계연구소 소보
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• 통권20호
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• pp.89-104
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• 1990

This study was carried out to obtain the most optimum conition in vacuum sintering of M2 HSS powder, by analysis of sintering characteristics and fracture strength in several conditions. The conclusion deduced from this study are as follows; -Boron was more effective element than graphite; at this time, the optimum amount of addition was 0.05 wt% -The optimum condition of sintering temperature and time were 1190- $1200^{\circ}C$ and 1-1.25hr, respectively -Fracture strength of vacuum sintered and heat-treated specimen in the most optimum condition was 2-2.5KN/ $mm^2$

• 소성∙가공
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• 제32권4호
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• pp.208-214
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• 2023

This paper discusses the deformation characteristics of a scaled-down automotive outer door panel with vacuum-assisted incremental sheet forming. The vacuum condition between the die and Al6052-H32 sheet with a thickness of 1.0 mm is reviewed with the goal of improving the geometrical accuracy of the target product. The material flow according to the forming tool path, including the multi-tool path and conventional contour tool path, is investigated considering the degradation of the pillow effect. To reduce friction between the tool and the sheet during incremental forming, automotive engine oil (5W-30) is used as a lubricant, and the strain field on the surface of the formed product is analyzed using ARGUS. By comparing the geometry and material flow characteristics of products under different test conditions, it is confirmed that the product surface quality can be significantly improved when the vacuum condition is employed in conjunction with a multi-tool path strategy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.777-780
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• 2005

The high vacuum in a electron beam lithography is basic condition, because electron beam vanish by collision with air molecules in generally atmosphere. To make high vacuum state, the vacuum control valve is essential. Most vacuum control valve are manual units. So, user of manual vacuum valve must have understanding vacuum process to change from low vacuum to high vacuum state. The user of electron beam lithography are troubled with operation of manual vacuum valve, in case the vacuum chamber is frequently open. In this paper, the design and performance test of auto vacuum control valve for electron beam lithography are described. With the auto vacuum control valve, the high vacuum level can reach 2.8E-5 Torr.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.144.1-144.1
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• 2015

The triggered vacuum switch(TVS) is a one of the important component in consisiting high power control systems(HPCS). The operating condition is depended on material, geometry, operating power and so on. Our research is focused on the effects of thses basic properties and ptimized condition, because these are critical conditons in understanding the TVS operation. Our experiment is accomplished with a copper electrode and a tungsten trigger pin after being assembled into a vacuum chamber. The operating voltage in our system is more than dozens of kV at the 5kV trigger pulse. Our goal is up to 300kJ, therefore the currents should be more optimized in additional experiments,