• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.403-410
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• 2009

Vacuum chambers have wide application for a variety of purposes such as material processing, vacuum gauge calibration, etc. As the dynamic pressure generated in such chamber is non-uniform, in many industrial as well as research processes, it is vital to know the non-uniform gas distribution with associated gas flow regimes and the ways of minimizing these pressure non-uniformities. In the present work, the behavior of gas flow in a vacuum chamber, during continuous gas flow, is described in the pressure range 0.1-133 Pa and the effect of baffle plate in minimizing the pressure non-uniformities is investigated. It was observed that maximum deviations in the pressure occur near the gas inlet point and that the effect of baffle plate in minimizing the pressure non-uniformities is more obvious in the transitional flow regime.

• 한국전산유체공학회:학술대회논문집
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• 2009.04a
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• pp.142-147
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• 2009

COMS (Communication, Ocean and Meteorological Satellite) is a geostationary satellite and has been developing by KARI for communication, ocean and meteorological observations. It will be tested under vacuum condition and very low temperature in order to verify thermal design of COMS. The test will be performed by using KARI large thermal vacuum chamber, which was developed by KARI, and the COMS will be the first flight satellite tested in this chamber. The purposes of thermal balance test are to correlate analytical model used for design evaluation and predicting temperatures, and to verify and adjust thermal control concept. KARI has plan to use heating plates to simulate space hot condition especially for radiator panels such as north and south panels. They will be controlled from 90K to 273K by circulating GN2 and LN2 alternatively according to the test phases, while the shroud of the vacuum chamber will be under constant temperature, 90K, during all thermal balance test. This paper presents thermal modelling including test chamber, heating plates and the satellite without solar array wing and Ka-band reflectors and discusses temperature prediction during thermal balance test.

• International journal of advanced smart convergence
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• v.6 no.4
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• pp.1-8
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• 2017

In this work, the effects of fairly influential factors on performance of vacuum system, such as constant pressure and outgassing effect were simulated to propose the optimum design factors. Outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for vacuum systems were suggested based on the simulation results. And, the effects of throttle valve applications on vacuum characteristics were also simulated to obtain the optimum design model of variable conductance on high vacuum system. Simulated vacuum characteristics of the proposed modelling were agreed with the observed experimental behaviour of real systems. Pressure limit valve and normally on-off control valve were schematized as the modelling of throttle valve for the constant process-pressure. Simulation results were plotted as pump-down curve of chamber and variable conductance of throttle valve. Simulated behaviors showed the applications of throttle valve sustained the process-pressure constantly, stably, and reliably.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.262.2-262.2
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• 2014

Plasma processing is an essential process for pattern etching and thin film deposition in nanoscale semiconductor device fabrication. It is necessary to maintain plasma chamber in steady-state in production. In this study, we determined plasma chamber state with residual gas analysis with self-plasma optical emission spectroscopy. Residual gas monitoring of fluorocarbon plasma etching chamber was performed with self-plasma optical emission spectroscopy (SPOES) and various chemical elements was identified with a SPOES system which is composed of small inductive coupled plasma chamber for glow discharge and optical emission spectroscopy monitoring system for measuring optical emission. This work demonstrates that chamber state can be monitored with SPOES and this technique can potentially help maintenance in production lines.

• Journal of the Korean Vacuum Society
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• v.16 no.4
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• pp.235-243
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• 2007

Nowadays, in our country, large vacuum chambers for huge experimental facilities such as the tokamak fusion device, high power neural beam test stand, and space simulator have been constructed. In such a vacuum chamber of very large size, it is quite complicate to check on leakage quantitatively, while the probability of a leak is relatively high. To investigate the feasibility of applying reliably a helium leak detection to the huge vacuum chambers, and to find a reasonable methodology of choosing an optimum set-up for leak detection, several virtual constructions of the leak detection system have been analyzed by calculating the pressure distribution in the system and the helium level in the sensor part.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.38 no.8
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• pp.842-847
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• 2010

Thermal analysis for the simulation of satellite component level thermal vacuum test processes was carried out by considering thermal vacuum test environment condition, thermal vacuum chamber configuration, and satellite's inner thermal environment. The transient analysis results can be obtained for the temperatures of component and thermal vacuum chamber assemblies. The thermal analysis model was verified with the component thermal environmental test results by using enhanced thermal vacuum chamber.

• Journal of the Korean Vacuum Society
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• v.8 no.4A
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• pp.391-396
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• 1999

KSTAR vacuum vessel mockup was fabricated by Korea Heavy Industries. The fabrication technology chosen for the mockup is introduced and assessed in this paper. KSTAR vacuum vessel is a huge vacuum chamber of 52 cubic meters never built in this country. Through the experiency of the KSTAR mockup fabrication, welding methods for obtaining both ultra high vacuum and structural integrity of the large vacuum chamber are extracted. The fabrication and assembly techniques for the complicated structure composed of reinforced ribs, double walls and various ports are also developed. A nondestructive test on the welding spot was performed and the results show that no major leaks violating the criterion were found. The one of the main objectives of the mockup fabrication is to measure the dimensions of the structure before and after fabrication, which plays an important role in the fabrication and the assembly. By assaying the problems occurred during mockup fabrication, the KSTAR mockup will provide the techniques for the fabrication of the main vacuum vessel.

• Proceedings of the Korean Vacuum Society Conference
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• 1994.06a
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• pp.38-38
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• 1994

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.11
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• pp.1008-1015
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• 2015

Thermal vacuum test should be performed prior to launch to verify satellites' functionality in extremely cold/hot temperatures and vacuum conditions. A thermal vacuum chamber used to perform the thermal vacuum tests of a satellite system and its components. A cryogenic blower is a core component of the gaseous nitrogen (GN2) closed loop thermal control system for thermal vacuum chambers. A final goal of this research is development of cryogenic blower. Design requirements of a blower are 150 CFM flow rate, 0.5 bara pressure difference, hot and cold temperatures. This paper describes the performance analysis of impeller by 1D, CFD commercial software, the design of the thermal protection interface between the driving part and the fluid part. The performance of the cryogenic blower is confirmed by test at the standard air condition and is verified by on the thermal vacuum chamber at the real operating condition.

• Aerospace Engineering and Technology
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• v.3 no.1
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• pp.103-108
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• 2004

The space environment is characterized such a severe condition as high vacuum and very low temperature. Since a satellite will be exposed such a space environment as soon as it goes into the its orbit, thermal vacuum test should be carried out to verify the performance of the satellite on the ground under the space environmental conditions. KARI has a thermal vacuum chamber with useful dimensions of ∮3.6m×L3m, in which KOMPSAT-1 and KOMPSAT-2 satellites were tested. But very large thermal vacuum chamber with useful dimensions of ∮8m×L10m has been needed to meet the future demand of large satellites. Generally, the thermal vacuum chamber can be divided into a vacuum system and a thermal system. Especially, a cryogenic system in the thermal system simulates very low temperature of -196℃ under the high vacuum condition. In this paper, we propose the new cryogenic system can be applied to the future large thermal vacuum chamber.