• Title/Summary/Keyword: vacuum Co2

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The Formation of Pt-Co Alloy Thin Films for RTD Temperature Sensors with Wide Temperature Ranges (광대역 측온저항체 온도센서용 Pt-CO 합금박막의 형성)

  • 김서연;노상수;정귀상
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1997.11a
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    • pp.335-338
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    • 1997
  • Platinum-Cobalt alloy thin films were deposited on A1$_2$O$_3$substrate by magnetron cosputtering for RTD temperature sensors with wide temperature ranges. We made Pt-Co alloy resistance patterns on the A1$_2$O$_3$substrate by lift-off method and fabricated Pt-Co alley RTD temperature sensors by using Pt-wire, Pt-paste. We investigated the physical and electrical characteristics of theme films under various conditions, input power, working vacuum, annealing temperature and time, and also after annealing these films. The resistivity and sheet resistivity of these films were decreased with increasing the annealing temperature. At input power of Pt : 4.4 W/cm$^2$, Co : 6.91 W/cm$^2$, working vacuum of 10 mTorr and annealing conditions of 800$^{\circ}C$ and 60 min, the resistivity and sheet resistivity of Pt-Co thin films was 15${\mu}$$\Omega$$.$cm and 0.5$\Omega$/ , respectively, and the TCR value of Pt-Co alloy thin films with thickness of 3000${\AA}$ was 3740ppm/$^{\circ}C$ in the temperature range of 25∼600$^{\circ}C$. These results indicate that Pt-Co alloy thin films hove potentiality for the RTD with wide temperature ranges.

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Electronic structure studies of CoFeRO (R=Hf,La,Nb) thin films by X-ray absorption spectroscopy

  • Song, J.H.;Gautam, S.;Chae, K.H.;Asokan, K.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.378-378
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    • 2010
  • We report the electronic structure of CoFeO-R (R=Hf, La, Nb) thin films studied by x-ray absorption spectroscopy (XAS). These ferrites thin films were prepared by pulsed laser deposition method and characterized by XAS measurements at O K-, Co and Fe L-edges. The O K-edge spectra suggest that there is a strong hybridization between O 2p and 3d electrons of transition metal cations and Fe $L_{3,2}$-edge spectra indicate that Fe-ions exist in $Fe^{2+}$ with tetrahedral site of the spinel structure. Divalent Co ions is also distributed in tetrahedral site with rare earth ions goes to octahedral sites of spinel structure. X-ray magnetic circular dichroism (XMCD) is also used to explain the symmetry and magnetic nature dependence on rare-earth ions.

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Corrosion Behavior of Dental Alloys Cast by Various Casting Methods (치과용 주조합금의 주조방법에 따른 부식거동)

  • Choe Han-Cheol;Ko Yeong-Mu
    • Journal of the Korean institute of surface engineering
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    • v.37 no.5
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    • pp.296-300
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    • 2004
  • The defects of partial denture frameworks are mainly shrinkage porosity, inclusions, micro-crack, particles from investment, and dendritic structure. In order to investigate a good casting condition of partial denture frameworks, the three casting alloys and casting methods were used and detected casting defects were analyzed by using electrochemical methods. Three casting alloys (63Co-27Cr-5.5Mo, 63Ni-16Cr, 63Co-30Cr-5Mo) were prepared for fabricating partial denture frameworks with various casting methods; centrifugal casting (Kerr, USA), high frequency induction casting (Jelenko Eagle, USA), vacuum pressure casting (Bego, Germany). The casting temperature was $1,380^{\circ}C$ (63Co-27Cr-5.5Mo and 63Ni-16Cr) and $1,420^{\circ}C$ (63Co-30Cr-5Mo). The casting morphologies were analyzed using FE-SEM and EDX. The corrosion test of the dendritic structure was performed through potentiodynamic method in 0.9% NaCl solutions at $36.5^{\circ}C$ and corrosion surface was observed using SEM. The defects of partial denture frameworks improved in the order of centrifugal casting, high frequency induction casting, and vacuum pressure casting method, especially, pore defects were found at part of clasp in the case of centrifugal casting method. The structure of casting showed dendritic structure for three casting alloys. In the 63Co-27Cr-5.5Mo and 63Co-30Cr-5Mo, $\alpha$-Co and $\varepsilon$-Co phases were identified at matrix and $${\gamma}$-Ni_2$Cr second phase were shown in 63Ni-16Cr. Also, the corrosion resistance of cast structure increased in the order of vacuum pressure casting, high frequency induction casting, and centrifugal casting method.

The Enhancement of Corrosion Resistance for WC-Co by Ion Beam Mixed Silicon Carbide Coating

  • Yeo, Sun-Mok;Kim, Dong-Jin;Park, Jae-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.101-101
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    • 2010
  • A strong adhesion of a silicon carbide (SiC) coating on a WC-Co substrate was achieved through an ion beam mixing technique and the corrosion resistance of the SiC coated WC-Co was investigated by means of a potentiodynamic electrochemical test. In the case of 1 M NaOH solution, a corrosion current density for a SiC coated WC-Co with a heat treatment at $500^{\circ}C$ displays about 50 times lower than that for the as-received WC-Co. However, in the case of 0.5 M H2SO4 solution, a corrosion current density for a SiC coated WC-Co displays about 3 times lower than that for as-received WC-Co. We discussed the physical reasons for the changes of the corrosion current densities at the different electrolytes.

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Enhanced Corrosion Resistance of WC-Co with an Ion Beam Mixed Silicon Carbide Coating

  • Yeo, Sun-Mok;Park, Jae-Won
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.08a
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    • pp.193-193
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    • 2011
  • Strong adhesion of a silicon carbide (SiC) coating to a WC-Co substrate was achieved through an ion beam mixing technique and the corrosion resistance of the SiC coated WC-Co was investigated by means of a potentiodynamic electrochemical test. In a 1 M NaOH solution, the corrosion current density of SiC-coated WC-Co after heat treatment at 500$^{\circ}C$ was about 50 times lower than that for the as-received WC-Co. In addition, the corrosion resistance systematically increases with increasing the SiC coating thickness. On the other hand, for a 0.5 M H2SO4 solution, the corrosion current density for SiC-coated WC-Co was about 3 times lower than that for the as-received WC-Co. We discuss the physical reasons for the changes in the corrosion current density with the different electrolytes.

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Packaging technology of fresh-cut produce (신선편의식품 포장기술)

  • Kim, Ji Gang
    • Food Science and Industry
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    • v.50 no.2
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    • pp.12-26
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    • 2017
  • Processing steps such as washing and cutting, involved in preparing fresh-cut produce causes tissue damage, leading to rapid quality deterioration. Major defects of fresh-cut produce are discoloration, softening, off-odor development, and microbial growth. Packaging of fresh-cut produce has been changed to reduce these quality problems. Flexible packaging film is widely used to pack fresh-cut produce. Vacuum packaging was the popular packaging method in the beginning of fresh-cut industry in Korea. Vacuum packaging creates high $CO_2$ and low $O_2$ levels to control browning of fresh-cut produce. However, these conditions induce some visual defects and off-odor development. Discoloration problem was also found when fresh-cut produce was packaged with conventional packaging film or plastic tray. Modified atmosphere (MA) packaging is effective for prolonging shelf-life of fresh-cut produce by decreasing $O_2$ and increasing $CO_2$ concentration in the package. Retail MA packaging using different oxygen transmission rate (OTR) film and micro-perforated film has started to be applied to fresh-cut produce in Korea. Proper MA package design that provides optimum range of $O_2$ and $CO_2$ partial pressures is one of the major challenges in the industry. An initial package flushing with $N_2$ or an low $O_2$/high $CO_2$ atmosphere is also used to more rapidly establish steady-state MA condition. Film OTR and $O_2$ flushing affects the fermentative volatile production, off-odor development, electrolyte leakage, discoloration, $CO_2$ injury, microbial population of fresh-cut produce. There is also a demand for convenient packaging to attract consumers. Rigid fresh-cut produce container for retail market has increased since the packaging provides excellent protection from physical damage during transport. Rigid tray used as actual serving vessel for the consumer is increasing in Korea. The tray with flexible lid to wrap or seal fresh-cut produce is more and more gaining popularity. Further practical technology to control quality change and microbial growth for each fresh-cut product has been studied since various fresh-cut items were required. The fresh-cut industry also focuses on searching for more convenient and environmentally friendly packaging.

Adsorption/desorption of CO2 on Activated Carbon Fibers Using Electric Swing Adsorption (활성탄소섬유상에서 전기변동법을 이용한 CO2의 흡/탈착)

  • Shim, JaeWoon;Moon, SeungHyun
    • Korean Chemical Engineering Research
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    • v.43 no.3
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    • pp.432-437
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    • 2005
  • An electric swing adsorption (ESA) process for recovering highly pure $CO_2$ from the mixed gases was tested. In this study, activated carbon fibers were used as an adsorbent. The activated carbon fibers showed fast adsorption rate and the high adsorption capacity for $CO_2$ adsorption under the condition of the ambient pressure. Activated carbon fiber with higher specific surface area was suitable to repeated adsorption-desorption cycle process, showing consistent breakthrough curve. Especially, the regeneration method by vacuum combined with ESA improved the performance of desorption process by an additional 17% regeneration efficiency compared to a vacuum only method, and showed the high regeneration efficiency at comparatively low 7-8 Wh energy.

Annealing Characteristics of Pt-Co Alloy thin Films for RTD Temperature Sensors (RTD용 Pt-Co 합금박막의 열처리 특성)

  • Hong, Seog-Woo;Seo, Jeong-Hwan;No, Sang-Soo;Chung, Gwiy-Sang
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1349-1351
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    • 1998
  • Platinum-Cobalt alloy thin films were deposited on $Al_2O_3$ substrates by r.f. cosputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on the $Al_2O_3$ substrates by lift-off method and investigated the physical and electrical characteristics of these films under various conditions (the input power, working vacuum, annealing temperature, thickness of thin films) and also after annealing these films. At input power of Pt : $4.4 W/cm^2$. Co:6.91W/$cm^2$. working vacuum of 10 mTorr and annealing conditions of $1000^{\circ}C$ and 60 min, the resistivity and sheet resistivity of Pt-Co thin films was $15{\mu}{\Omega}{\cdot}cm$ and $0.5{\Omega}/{\square}$, respectively. The TCR value of Pt-Co alloy thin films was measured with various thickness of thin films and annealing conditions. The optimum TCR value is gained under conditions $3000{\AA}$ of thin films thickness and $1000^{\circ}C$ of annealing temperature. These results indicate that Pt-Co alloy thin films have potentiality for the high resolution RTD temperature sensors.

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High density plasma etching of CoFeB and IrMn magnetic films with Ti hard mask

  • Xiao, Y.B.;Kim, E.H.;Kong, S.M.;Chung, C.W.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.233-233
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    • 2010
  • Magnetic random access memory (MRAM), based on magnetic tunnel junction (MTJ) and CMOS, is a prominent candidate among prospective semiconductor memories because it can provide nonvolatility, fast access time, unlimited read/write endurance, low operating voltage and high storage density. The etching of MTJ stack with good properties is one of a key process for the realization of high density MRAM. In order to achieve high quality MTJ stack, the use of CoFeB and IrMn magnetic films as free layers was proposed. In this study, inductively coupled plasma reactive ion etching of CoFeB and IrMn thin films masked with Ti hard mask was investigated in a $Cl_2$/Ar gas mix. The etch rate of CoFeB and IrMn films were examined on varying $Cl_2$ gas concentration. As the $Cl_2$ gas increased, the etch rate monotonously decreased. The effective of etch parameters including coil rf power, dc-bais voltage, and gas pressure on the etch profile of CoFeB and IrMn thin film was explored, At high coil rf power, high dc-bais voltage, low gas pressure, the etching of CoFeB and IrMn displayed better etch profiles. Finally, the clean and vertical etch sidewall of CoFeB and IrMn free layers can be achieved by means of thin Ti hard mask in a $Cl_2$/Ar plasma at the optimized condition.

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Thermal Analysis on the LNG Storage Tank of LNG Bunkering System Applied with Double Shield Insulation Method (LNG 벙커링용 이중 단열적용 LNG 저장탱크 열해석)

  • Jung, Il-Young;Kim, Nam-Guk;Yun, Sang-Kook
    • Journal of the Korean Institute of Gas
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    • v.22 no.4
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    • pp.1-6
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    • 2018
  • An LNG bunkering system stores LNG in a horizontal IMO's C-Type tank insulated with perlite powder, and $10^{-2}$ Torr vacuum in the annular space between the double walls. Current storage tanks have high heat leakage, evaporating over 2.0% daily. A more efficiently insulated storage tank reducing the evaporation rate is required to develope. This research carried out thermal analysis on a new effective insulation method, i.e. double shield insulation system, that separates high super vacuum in the annular space between two tanks with a perlite vacuum in the back side of outer tank. This highly efficient insulation system obtained an evaporation rate of 0.16% per day under a $10^{-4}$ Torr vacuum. Even if the space loses its vacuum, the new insulation system showed a lower evaporation rate of 5.23% than the present perlite system of 4.9%.