• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.434-435
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• 2012

Plasma enhanced chemical vapor deposition (PECVD) silicon dioxide thin films have many applications in semiconductor manufacturing such as inter-level dielectric and gate dielectric metal oxide semiconductor field effect transistors (MOSFETs). Fundamental chemical reaction for the formation of SiO2 includes SiH4 and O2, but mixture of SiH4 and N2O is preferable because of lower hydrogen concentration in the deposited film [1]. It is also known that binding energy of N-N is higher than that of N-O, so the particle generation by molecular reaction can be reduced by reducing reactive nitrogen during the deposition process. However, nitrous oxide (N2O) gives rise to nitric oxide (NO) on reaction with oxygen atoms, which in turn reacts with ozone. NO became a greenhouse gas which is naturally occurred regulating of stratospheric ozone. In fact, it takes global warming effect about 300 times higher than carbon dioxide (CO2). Industries regard that N2O is inevitable for their device fabrication; however, it is worthwhile to develop a marginable nitrous oxide free process for university lab classes considering educational and environmental purpose. In this paper, we developed environmental friendly and material cost efficient SiO2 deposition process by substituting N2O with O2 targeting university hands-on laboratory course. Experiment was performed by two level statistical design of experiment (DOE) with three process parameters including RF power, susceptor temperature, and oxygen gas flow. Responses of interests to optimize the process were deposition rate, film uniformity, surface roughness, and electrical dielectric property. We observed some power like particle formation on wafer in some experiment, and we postulate that the thermal and electrical energy to dissociate gas molecule was relatively lower than other runs. However, we were able to find a marginable process region with less than 3% uniformity requirement in our process optimization goal. Surface roughness measured by atomic force microscopy (AFM) presented some evidence of the agglomeration of silane related particles, and the result was still satisfactory for the purpose of this research. This newly developed SiO2 deposition process is currently under verification with repeated experimental run on 4 inches wafer, and it will be adopted to Semiconductor Material and Process course offered in the Department of Electronic Engineering at Myongji University from spring semester in 2012.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1672-1677
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• 2003

Carbon dioxide($CO_2$, R-744) has become a very popular issue in application to refrigeration and air conditioning systems as a natural refrigerant. An experimental study has been carried out to investigate the vapor pressure and miscibility of refrigerant R-744 in the presence of lubricant oil. This is of particular interest in the selection of the lubricant oil for the compressor of a refrigeration system or an air conditioning system using the refrigerant R-744. This apparatus consists of the test section, measuring devices, the vacuum pump, the constant temperature bath and relevant connecting pipes made of stainless steel. Two lubricant oils, such as mineral oil(Naphthenic) and polyol ester(POE) oil, are considered in the present study. For this purpose, test runs were conducted with the oil concentration range from 5 to 50 wt%, and the temperature range from -10 to $10^{\circ}C$ with $2^{\circ}C$ intervals. The results are correlated with the vapor pressure. and showed with the miscibility as visualization for the individual text components.

• Journal of Technologic Dentistry
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• v.25 no.1
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• pp.89-94
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• 2003

The use of titanium alloys as biomaterials is increasing due to their superior biocompatibility and enhanced corrosion resistance compared to conventional stainless steels and cobalt-based alloys. Ti-6Al-4V ($\alpha+\beta$type) alloy instead of pure titanium ($\alpha$type) is being widely used as biomaterials has some characteristics such as high fatigue strength, tensile strength and corrosion resistance. It also has similar characteristics to Ti in inducing bony ingrowth. But it has been reported recently that the vanadium element expresses cytotoxicity and carcinogenicity and the aluminium element is related with dementia of Alzheimer type and neurotoxicity. In order to overcome their detrimental effects, $\beta$-phase stabilizer Nb was chosen in the present study. CP-Ti(ASTM grade 2), Ti-3wt.%Nb($\alpha$type), Ti-20wt.%Nb ($\alpha+\beta$type) and Ti-40 wt.%Nb($\beta$type) alloys were melted by vacuum arc furnace. Biocompatibility of Ti-Nb alloys was evaluated by cytotoxicity test. The results can be summarized as follows: 1. For the cytotoxicity test, Ti-Nb alloys showed excellent biocompatibility compared to CP-Ti(ASTM grade 2), 316L STS and Co-Cr alloys.

• Journal of Powder Materials
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• v.21 no.6
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• pp.447-453
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• 2014

Effect of oxygen content in the ultrafine tungsten powder fabricated by electrical explosion of wire method on the behvior of spark plasma sintering was investigated. The initial oxygen content of 6.5 wt% of as-fabricated tungsten powder was reduced to 2.3 and 0.7 wt% for the powders which were reduction-treated at $400^{\circ}C$ for 2 hour and at $500^{\circ}C$ for 1h in hydrogen atmosphere, respectively. The reduction-treated tungsten powders were spark-plasma sintered at $1200-1600^{\circ}C$ for 100-3600 sec. with applied pressure of 50 MPa under vacuum of 0.133 Pa. Maximun sindered density of 97% relative density was obtained under the condition of $1600^{\circ}C$ for 1h from the tungsten powder with 0.7 wt% oxygen. Sintering activation energy of $95.85kJ/mol^{-1}$ was obtained, which is remarkably smaller than the reported ones of $380{\sim}460kJ/mol^{-1}$ for pressureless sintering of micron-scale tungsten powders.

• Bulletin of the Korean Chemical Society
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• v.23 no.4
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• pp.575-579
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• 2002

Two-dimensionally cross-linked ultrathin films of poly(maleic acid-alt-methyl vinyl ether) (MA-MVE) and poly(allylamine) (PAA) were produced by using sodium dioctadecyl sulfate (2C18S) as the monolayer template for Langmuir-Blodgett (LB) depositio n. The template molecules were subsequently removed by thermal treatment followed by extraction. The polyion-complexed monolayers of three components, i.e., template 2C18S, co-spread PAA, and subphase MA-MVE, were formed at the air-water interface. Their monolayer properties were studied by the surface pressure-area isotherm. The monolayers were transferred on solid substrates as Y type. The polyion-complexed LB films and the resulting network films were characterized by FT-IR spectroscopy, X-ray photoelectron spectroscopy (XPS), and scanning electron microscopy (SEM). The cross-linking to form a polymer network was achieved by amide or imide formation through heat treatment under a vacuum. SEM observation of the film on a porous fluorocarbon membrane filter (pore diameter 0.1 ㎛) showed covering of the pores by four layers in the polyion complex state. Extraction by chloroform followed by heat treatment produced hole defects in the film.

• Steel and Composite Structures
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• v.31 no.2
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• pp.133-148
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• 2019

This paper reports on the energy absorption characteristics of a lattice-web reinforced composite sandwich cylinder (LRCSC) which is composed of glass fiber reinforced polymer (GFRP) face sheets, GFRP lattice webs, polyurethane (PU) foam and ceramsite filler. Quasi-static compression experiments on the LRCSC manufactured by a vacuum assisted resin infusion process (VARIP) were performed to demonstrate the feasibility of the proposed cylinders. Compared with the cylinders without lattice webs, a maximum increase in the ultimate elastic load of the lattice-web reinforced cylinders of approximately 928% can be obtained. Moreover, due to the use of ceramsite filler, the energy absorption was increased by 662%. Several numerical simulations using ANSYS/LS-DYNA were conducted to parametrically investigate the effects of the number of longitudinal lattice webs, the number of transverse lattice webs, and the thickness of the transverse lattice web and GFRP face sheet. The effectiveness and feasibility of the numerical model were verified by a series of experimental results. The numerical results demonstrated that a larger number of thicker transverse lattice webs can significantly enhance the ultimate elastic load and initial stiffness. Moreover, the ultimate elastic load and initial stiffness were hardly affected by the number of longitudinal lattice webs.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.18 no.4
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• pp.1-7
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• 2017

Cobalt silicide was used as a counter electrode in order to confirm its reliability in dye-sensitized solar cell (DSSC) devices. 100 nm-Co/300 nm-Si/quartz was formed by an evaporator and cobalt silicide was formed by vacuum heat treatment at $700^{\circ}C$ for 60 min to form approximately 350 nm-CoSi. This process was followed by etching in $80^{\circ}C$-30% $H_2SO_4$ to remove the cobalt residue on the cobalt silicide surface. Also, for the comparison against Pt, we prepared a 100 nm-Pt/glass counter electrode. Cobalt silicide was used for the counter electrode in order to confirm its reliability in DSSC devices and maintained for 0, 168, 336, 504, 672, and 840 hours at $80^{\circ}C$. The photovoltaic properties of the DSSCs employing cobalt silicide were confirmed by using a simulator and potentiostat. Cyclic-voltammetry, field emission scanning electron microscopy, focused ion beam scanning electron microscopy, and energy dispersive spectrometry analyses were used to confirm the catalytic activity, microstructure, and composition, respectively. The energy conversion efficiency (ECE) as a function of time and ECE of the DSSC with Pt and CoSi counter electrodes were maintained for 504 hours. However, after 672 hours, the ECEs decreased to a half of their initial values. The results of the catalytic activity analysis showed that the catalytic activities of the Pt and CoSi counter electrodes decreased to 64% and 57% of their initial values, respectively(after 840 hours). The microstructure analysis showed that the CoSi layer improved the durability in the electrolyte, but because the stress concentrates on the contact surface between the lower quartz substrate and the CoSi layer, cracks are formed locally and flaking occurs. Thus, deterioration occurs due to the residual stress built up during the silicidation of the CoSi counter electrode, so it is necessary to take measures against these residual stresses, in order to ensure the reliability of the electrode.

• Food Science and Preservation
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• v.23 no.5
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• pp.623-630
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• 2016

Inappropriate storage of fresh-cut onions may result in losses of good quality. To understand storage conditions for shelf-life and quality of fresh-cut onions, The effect of packing type and storage temperature on the quality of fresh-cut onions was evaluated. Onions stored at $0^{\circ}C$ for 2 months were peeled off after removing root and shoot parts. Each three peeled onions were packed in a polyethylene film (PE, $50{\mu}m$) or in a polyethylene/polypropylene film (PE/PP, $100{\mu}m$) with vacuum treatment (70 cmHg) and stored at different temperatures (4, and $10^{\circ}C$) for 21 days. The following analyses were examined to evaluate the quality of fresh-cut onions: microbial population, surface color, titratable acidity and pH, respiration rate, and sensory quality. Fresh-cut onions stored at $4^{\circ}C$ showed less aerobic and coliform bacterial population than those stored at $10^{\circ}C$ during observation periods. Fungal populations of fresh-cut onions packed in PE film stored at $10^{\circ}C$ increased significantly after 13 days. E. coli was not detected in all treatments during whole storage periods. Surface colors of fresh-cut onions were not affected by packing type and storage temperature, however, color difference (${\Delta}E$) of fresh-cut onions in PE/PP film stored at $10^{\circ}C$ was significantly higher than those of other treatments. Titratable acidity of fresh-cut onions was not affected by packing type and storage temperature. However, pH of fresh-cut onions packed in PE film stored at $10^{\circ}C$ increased gradually over the whole storage period. Fresh-cut onions packed in PE film showed higher $CO_2$ and less $O_2$ concentrations at $10^{\circ}C$ than those at $4^{\circ}C$. The sensory quality of fresh-cut onions was significantly affected by packing type and storage temperature after 13 days. Particularly, vacuum treatment in PE/PP film showed better sensory quality than that of PE film package at the same storage temperature. It was concluded that vacuum treatment and storage at $4^{\circ}C$ could be effective to prolong the quality of fresh-cut onions up to 21 days.

• Particle and aerosol research
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• v.14 no.2
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• pp.25-33
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• 2018

In this study, the concentration of fine indoor dust and the size distribution of fine indoor dust were analyzed by measuring the dust generated during the cleaning process of an indoor office. We measured $PM_{10}$, $PM_{2.5}$, and $PM_{1.0}$ and analyzed the size distributions of dust larger than $0.3{\mu}m$ in diameter during cleaning. The results showed that the concentration of $PM_{10}$ increased rapidly during cleaning, however $PM_{1.0}$ did not increase. Before cleaning with a broom, the fine dust concentration was about $50{\mu}g/m^3$, but increased to about $400{\mu}g/m^3$ as cleaning progressed. In the case of indoor cleaning with a vacuum cleaner, the concentration of $PM_{10}$ increased during the cleaning process and the increase of $PM_{2.5}$ was relatively small. $PM_{1.0}$ did not increase as in the case of cleaning the broom.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.417-417
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• 2016

Global environmental deterioration has become more serious year by year and thus scientific interests in the renewable energy as environmental technology and replacement of fossil fuels have grown exponentially. Photoelectrochemical (PEC) cell consisting of semiconductor photoelectrodes that can harvest light and use this energy directly to split water, also known as photoelectrolysis or solar water splitting, is a promising renewable energy technology to produce hydrogen for uses in the future hydrogen economy. A major advantage of PEC systems is that they involve relatively simple processes steps as compared to many other H2 production systems. Until now, a number of materials including TiO2, WO3, Fe2O3, and BiVO4 were exploited as the photoelectrode. However, the PEC performance of these single absorber materials is limited due to their large charge recombinations in bulk, interface and surface, leading low charge separation/transport efficiencies. Recently, coupling of two materials, e.g., BiVO4/WO3, Fe2O3/WO3 and CuWO4/WO3, to form a type II heterojunction has been demonstrated to be a viable means to improve the PEC performance by enhancing the charge separation and transport efficiencies. In this study, we have prepared a triple-layer heterojunction BiVO4/WO3/SnO2 photoelectrode that shows a comparable PEC performance with previously reported best-performing nanostructured BiVO4/WO3 heterojunction photoelectrode via a facile solution method. Interestingly, we found that the incorporation of SnO2 nanoparticles layer in between WO3 and FTO largely promotes electron transport and thus minimizes interfacial recombination. The impact of the SnO2 interfacial layer was investigated in detail by TEM, hall measurement and electrochemical impedance spectroscopy (EIS) techniques. In addition, our planar-structured triple-layer photoelectrode shows a relatively high transmittance due to its low thickness (~300 nm), which benefits to couple with a solar cell to form a tandem PEC device. The overall PEC performance, especially the photocurrent onset potential (Vonset), were further improved by a reactive-ion etching (RIE) surface etching and electrocatalyst (CoOx) deposition.