• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.9
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• pp.971-978
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• 2012

Vacuum carburizing is supposed to be the superior process to the gas carburizing. However, the vacuum carburizing has the stage in which hydrocarbon gas is supplied into the furnace to be pyrolysis, and consequently the stable heat treatment is hard to achieve due to the soot from the hydrocarbon pyrolysis. Recently, many studies have been made which utilize acetylene gas to overcome this defects. In this paper, the carburizing and the diffusion periods have been selected based on the Harris experimental formula, and the mechanical properties of the vacuum carburized specimen have been compared with those of the gas carburized SCM415H specimen to identify the feasibility of the $CO_2$ free vacuum carburizing process. The result showed that the vacuum carburized materials used have no oxidization of the grain boundaries, and show the 29.8% higher effective hardness depth and the acceptable tensile strength.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.17 no.2
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• pp.52-56
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• 2007

We have installed an ultra high vacuum (UHV) molecular beam epitaxy (MBE) system and investigated into the characteristics of MBE-grown ZnSe/GaAs [001] using scanning electron microscopy (SEM), atomic force microscopy (AFM), we confirmed that layer's surface was dense and uniform of molecular layer. We used x-ray diffractometer (XRD) and confirmed two peaks correspond to GaAs [001] substrate and ZnSe epilayer, respectively. We observed photoluminescence (PL) peak approximately at 437 nm and measured PL mapping of 2 inch ZnSe epilayer.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.61-61
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• 2000

Device의 고성능화를 위하여 소자의 고속화, 고집적화가 가속됨에 따라 SALICIDE Process가 더욱 절실하게 요구되고 있다. 이러한 SALICIDE Process의 재료로써는 metal/silicide 중에서 비저항이 가장 낮은 TiSi2(15-25$\mu$$\Omega$cm), CoSi2(17-25$\mu$$\Omega$cm)가 일반적으로 많이 연구되어 왔다. 그러나 Ti-silicide의 경우 Co-silicide는 배선 선폭의 감소에 따른 면저항 값의 변화가 작으며, 고온에서 안정하고, 도펀트 물질과 열역학적으로 안정하여 화합물을 형성하지 않는다는 장점이 있으마 Ti처럼 자연산화막을 제거할 수 없어 Si 기판위에 자연산화막이 존재시 균일한 실리사이드 박막을 형성할 수 없는 단점등을 가지고 있다. 본 연구에서는 Ti Capping layer 에 의한 균일한 Co-silicide의 형성을 일반적인 Si(100)기판과 SCl 방법에 의하여 chemical Oxide를 성장시킨 Si(100)기판의 경우에 대하여 연구하였다. 스퍼터링 방법에 의해 Co를 150 증착후 capping layer로써 TiN, Ti를 각각 100 씩 증착하였다. 열처리는 RTP를 이용하여 50$0^{\circ}C$~78$0^{\circ}C$까지 4$0^{\circ}C$ 구간으로 N2 분위기에서 30초 동안 열처리를 한후, selective metal strip XRD, TEM의 분석장비를 이용하여 관찰하였다. lst RTP후 selective metal strip 후 면저항의 측정과 XRD 분석결과 낮은 면저항을 갖는 CoSi2로의 상전이는 TiN capping과 Co 단일박막이 일반적인 Si(100)기판과 interfacial oxide가 존재하는 Si(100)기판위에서 Ti capping의 경우보다 낮은 온도에서 일어났다. 또한 CoSi에서 CoSi2으로 상전이는 일반적인 Si(100)기판위에서 보다 interfacial Oxide가 존재하는 Si(100)기판 위에 TiN capping과 Co 단일박막의 경우 열처리 후에도 Oxide가 존재하는 불균인한 CoSi2박막을 관찰하였으며, Ti capping의 경우 Oxise가 존재하지 않는 표면과 계면이 더 균일한 CoSi2 박막을 형성 할 수 있었다.

• KOREAN JOURNAL OF PACKAGING SCIENCE & TECHNOLOGY
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• v.28 no.3
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• pp.217-221
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• 2022

Container system automatically controlled in its atmosphere of high CO₂/low O₂ was devised to contain and store pork belly meat at chilled temperature. The meat in the container system was compared in the quality preservation at 0℃ for 21 days to that in air-filled container and vacuum package. The container atmosphere could be controlled to be of 47~60% CO₂ and 7~10% O₂ through time-controlled intermittent CO₂ injection. The controlled atmosphere in the developed system was effective in suppressing pH change and aerobic bacterial growth contributing to sensory quality preservation. Compared to control of air-filled container, vacuum packaging showed lower microbial growth and slower pH change on the meat but with high drip loss. The devised container system to keep high CO₂ and mildly low O₂ concentrations is effective in the meat quality preservation on overall, and may be extended to a variety of meat products with possible modification tuned for product requirements.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.361-361
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• 2011

Cu(InGa)(SeS2) (CIGS) thin film solar cells have recently reached an efficiency of 20%. Recent studies suggest a double graded band gap structure of the CIGS absorber layer to be a key issue in the production of high efficiency thin film solar cell using by sputtering process method. In this study, Cu(InGa)(SeS2) absorbers were manufactured by selenization and surfulization, we have deposited CIG precusor by sputtering and Se layer by evaporation before selenization. The objective of this study is to find out surfulization effects to improve Voc and to compare with non-surfulization Cu(InGa)Se2 absorbers. Even if we didn't analysis Ga depth profile of Cu(InGa)(SeS2) absorbers, we confirmed increasing of Eg and Voc through surlization process. In non-surfulization Cu(InGa)Se2 absorbers, Eg and Voc are 0.96eV and 0.48V. Whereas Eg and Voc of Cu(InGa)(SeS2) absorbers are 1.16eV and 0.57V. And the efficiency of 9.58% was achieved on 0.57cm2 sized SLG substrate. In this study, we will be discussed to improve Eg and Voc through surfulization and the other method without H2S. gas.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.140.2-140.2
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• 2013

Strong metal-support interaction effect is an important issue in determining the catalytic activity for heterogeneous catalysis. In this work, we report the catalytic activity of $Au/TiO_2$, $Au/Al_2O_3$, and $Au/Al_2O_3-CeO_2$ nanocatalysts under CO oxidation fabricated by arc plasma deposition (APD), which is a facile dry process with no organic materials involved. These catalytic materials were characterized by transmission electron microscopy (TEM), energy-dispersive X-ray spectroscopy (EDS) and $N_2$-physisorption. Catalytic activity of the materials has measured by CO oxidation using oxygen, as a model reaction, in a micro-flow reactor at atmospheric pressure. Using APD, the catalyst nanoparticles were well dispersed on metal oxide powder with an average particle size (3~10 nm). As for catalytic reactivity, the result shows $Au/Al_2O_3-CeO_2$ nanocatalyst has the highest catalytic activity among three samples in CO oxidation, and $Au/TiO_2$, and $Au/Al_2O_3$ in sequence. We discuss the effects of structure and metal-oxide interactions of the catalysts on catalytic activity.

• Environmental Engineering Research
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• v.23 no.1
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• pp.54-61
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• 2018

Biodiesel production parameters and the impact analysis of the potential emissions from both soybean biodiesel and washing water stored in three different environmental conditions were investigated. The effects of the reaction temperature, methanol/oil mole ratio and catalyst concentration on biodiesel yield were considered. And the results showed optimum biodiesel yield of 99% obtained at $54^{\circ}C$, 7 methanol/oil mole ratio and 0.4 wt/wt % catalyst concentration. The potential emissions from both the biodiesel produced and washing water stored (for six weeks) in refrigerator (${\leq}10^{\circ}C$), vacuum (50 kPa) and direct exposure to atmosphere were identified and quantified. Impact analysis of the emissions involved their categorization into: terrestrial acidification, freshwater eutrophication, human toxicity, terrestrial ecotoxicity, climate change and freshwater ecotoxicity. Freshwater ecotoxicity category had the most pronounced negative impact of the potential emissions with $5.237710^{-2}kg\;1,4-DB\;eq$. emissions in Atmosphere, $4.702610^{-2}kg\;1,4-DB\;eq$. emissions in Refrigerator and $3.966110^{-2}kg\;1,4-DB\;eq$. emissions in Vacuum. Climate change had the least effect of the emissions with $6.214106^{-6}kg\;CO_2\;eq$. in Atmosphere, $3.9310^{-6}kg\;CO_2\;eq$. in Refrigerator and $1.6710^{-6}kg\;CO_2\;eq$. in Vacuum. The study showed that the order of preference of the storage environments of biodiesel is vacuum environment, refrigerated condition and exposure to atmosphere.

• Journal of the Korean Vacuum Society
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• v.5 no.3
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• pp.245-250
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• 1996

$Y_2O_3$ thin film on si(100) was successfully grown by ionized cluster beam(ICBD) technique at substrate temperature of around $500^{\circ}C$ and pressure of ~$10^{-5}$Torr.To prevent the oxidation of Si substrae, a very thin yttrium layer was deposited on Si before reactive depositing of oxygen and yttrium source. In asdeposited stage, b.c.c and h.c.p strucutres of $Y_2O_3$ were observed from S-ary analysis. From the observation of spots and ring patterns in selected area diffractin(SAD) patterns. crystallane formation and growth could be proceeded during the deposition. $Y_2O_3$/mixed layer/$SiO_2=170\AA/50\AA/10\AA$ structure were verified by high resolution transmition electron imcroscopy(HRTEM) image, and the formation of amorphous layer of SiO2 was discussed . Electricla charateristics of the film were also investigated . In as-deposited Pt/$Y_2O_3$/Si sturcuture, leakage current was less than $10^{-6}$A/$\textrm{cm}^2$ at 7MV/cm strength.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.102-102
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• 2000

최근 자동차 배기 가스 유출에 의한 환경문제가 심각하게 대두되고 있고, 이에 따라 그 중 NOx, SOx 등의 유해가스 검출을 위한 센서 개발이 강력히 요구되고 있다. 본 실험은 자동차에서 배출되는 NO 가스에 대한 민감한 센서 제작을 목적으로 In2O3 박막을 성장시켜 그 특성을 측정하였고, NO 가스에 대한 민감도를 증가시키기 위해 7 ~32 정도의 초박막 Co 촉매를 증착하여 NO 감도에 미치는 현상을 조사하였다. In2O3 2˝ target(순도 99.99%)을 사용하여 RF power와 Ar/O2의 비를 변화시켜가면서 상온에서 알루미나 기판위에 In2O3 박막 성장시켰다. 박막을 성장시킨 후 10$0^{\circ}C$에서 5$0^{\circ}C$까지 온도를 변화시키면서 공기 중에서 열처리를 하였다. In2O3 박막의 결정성은 XRD를 이용하여 측정하였고 표면 특성을 알아보기 위해 AFM과 SEM 측정을 하였다. XRD 분석결과 상온에서부터 50$0^{\circ}C$까지 회절 peck의 강도차이는 있었지만 모든 시편에서 In2O3 박막이 cubic 구조로 성장함을 알 수 있었다. 100ppm 농도 NO 가스에 대한 센서 소자의 감도를 20$0^{\circ}C$~40$0^{\circ}C$ 온도 영역에서 측정하였다. 순수한 In2O3 의 경우 감도(S=Ra/Rg)는 25$0^{\circ}C$에서 S 6 정도로 가장 좋았다. 반면에 Co 촉매를 표면에 흡착시킨 경우 20$0^{\circ}C$~25$0^{\circ}C$ 부근에서 반응속도가 매우 빨라지고, 150 정도 Co를 흡착시킨 센서의 경우 S 14 로 감도가 매우 향상됨을 알 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.213-213
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• 2011

Gold catalysts supported on TiO2 have shown a unique catalytic behavior on CO oxidation, depending on surface effects. Particle size has an influence on the surface activity. To make monodisperse Au nanoparticles, organic capping ligands, such as alkylthiols, were used by a "greener" synthesis method [1,2] and Au nanoparticles were deposited on TiO2. However, organic capping ligands must be removed for high catalytic activities by the Au nanoparticles without changing the Au size [3]. We used UV ozone treatment to decompose thiol ligands. The samples have been characterized by X-ray photoelectron spectroscopy to examine the surface modification by UV ozone treatment. We show the size distribution of the gold nanoparticles by light scattering analysis and transmission electron microscopy. Au/TiO2 have been prepared using the wetness impregnation method. The catalytic performance of CO oxidation over Au supported on TiO2 under oxidizing reaction conditions (40 Torr CO and 100 Torr O2) were tested. The results show that the catalytic activity depends on particle size and the time of UV ozone exposure, which suggests the role of sulfur bonding in determining the catalytic activity of Au/TiO2 catalysts.