• Title/Summary/Keyword: vacuum Co2

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Electronic structure studies of Co-substituted FINEMET alloys by x-ray absorption spectroscopy

  • Chae, K.H.;Gautam, S.;Song, J.H.;Kane, S.N.;Varga, L.K.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.377-377
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    • 2010
  • FINEMET type nanocrystalline materials synthesized by controlled crystallization of amorphous ribbons[1] exhibit excellent soft magnetic properties making them attractive for technological applications. Present work reports the electronic structure studies of Co-substituted FINEMET to get information on the effect of successive Co substitution on local environment around Fe and Co atom by using near edge x-ray absorption fine structure (NEXAFS) and x-ray magnetic circular dichroism (XMCD) measurements. NEXAFS spectroscopy and XMCD measurements have been carried out at Fe $L_{3,2}$ and Co $L_{3,2}$-edges to investigate the chemical states and electronic structure of FINEMET [$(Fe_{100-x}Co_x)_{78}Si_9Nb_3Cu_1Ba$](0$L_{3,2}$-edge reveal that Fe is in 2+ state and in tetrahedral symmetry with other elements. The magnetic properties exhibiting soft magnetic behavior[2] are discussed on the basis of the electronic structure studied through XMCD.

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Effect of O2, CO, and NO on the Surface Segregation in a Rh50Pd50 Bulk Crystal and a comparison to Rh50Pd50 Nanoparticles

  • Park, Mi-Ta;Grass, Michael E.;Aksoy, Funda;Zhang, Yawen;Liu, Zhi;Mun, Bong-Jin S.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.84-84
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    • 2010
  • We present an in-situ study of the interaction of a bimetallic Rh50Pd50 bulk crystal with O2, CO, and NO using ambient pressure x-ray photoelectron spectroscopy and compare it to results for 10 nm nanoparticles with the same overall composition. The surface of the bulk crystal has less Rh present under both oxidizing and reducing conditions than the nanoparticles under identical conditions. Segregation and oxidation/reduction proceeds quicker and at lower temperature for nanoparticles than for the bulk crystal. The near surface of the Rh50Pd50 bulk crystal after high temperature vacuum annealing is ca. 9% Rh measured by XPS. Heating in 0.1 Torr O2 to $350^{\circ}C$ increases the Rh surface composition to ca. 40%. The surface can then be reduced by heating in H2 at $150^{\circ}C$, leading to a reduced surface of 30% Rh. Titration of CO from this Rh-rich surface proceeds at a much lower pressure than on the Rh-deficient starting surface.

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Cobalt 박막의 선택적 증착을 위한 MOCVD공정 연구

  • Seo, Gyeong-Cheon;Sin, Jae-Su;Yun, Ju-Yeong;Kim, Jin-Tae;Sin, Yong-Hyeon;Lee, Chang-Hui;Gang, Sang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.41-41
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    • 2010
  • 반도체 소자의 선폭이 감소함에 따른 금속배선의 저항이 증가하면서 반도체 배선물질을 copper로 대체하려는 연구가 진행되고 있다. 그러나 copper를 금속배선에 사용하게 되면 대기 상에서 노출 시 쉽게 산화가 일어나며 형성된 산화물의 미세조직이 치밀하지 못하여 계속적인 산화가 진행되고, 후속 열처리 공정 시 copper가 유전체로 확산되어 소자의 정상적인 작동을 방해하게 되는 문제점을 가지고 있다. 이러한 문제점을 해결하기 위해서 copper의 확산 및 산화를 방지하는 물질로 cobalt가 각광받고 있다. Cobalt는 낮은 저항과 열적 안정성이 우수하여 copper와의 연동에 문제가 없으며, 소자의 작동에도 영향을 미치지 않는다. Cobalt 박막의 적용을 위해 patterning 단계를 줄일 수 있는 선택적 증착공정의 개발도 요구되고 있다. 본 연구에서는 우수한 층덮힘(step coverage)과 양질의 박막을 증착할 수 있는 MOCVD 공정을 이용하였고, cobalt 전구체로서 $Co(hfac)_2$ (hfac: hexafluoroacethylacetonate) 전구체와 $Co_2$ (CO)8 (CO: carbonyl) 전구체를 사용하였다. 각각의 전구체에 따라 선택적 증착이 가능한 공정조건을 찾기 위한 연구를 진행하였다.

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Photoelectrochemical Water Oxidation and $CO_2$ Conversion for Artificial Photosynthesis

  • Park, Hyunwoong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.70-70
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    • 2013
  • As the costs of carbon-footprinetd fuels grow continuously and simultaneously atmospheric carbon dioxide concentration increases, solar fuels are receiving growing attention as alternative clean energy carriers. These fuels include molecular hydrogen and hydrogen peroxide produced from water, and hydrocarbons converted from carbon dioxide. For high efficiency solar fuel production, not only light absorbers (oxide semiconductors, Si, inorganic complexes, etc) should absorb most sunlight, but also charge separation and interfacial charge transfers need to occur efficiently. With this in mind, this talk will introduce the fundamentals of solar fuel production and artificial photosynthesis, and then discuss in detail on photoelectrochemical (PEC) water splitting and CO2 conversion. This talk largely divides into two section: PEC water oxidation and PEC CO2 reduction. The former is very important for proton-coupled electron transfer to CO2. For this oxidation, a variety of oxide semiconductors have been tested including TiO2, ZnO, WO3, BiVO4, and Fe2O3. Although they are essentially capable of oxidizing water into molecular oxygen, the efficiency is very low primarily because of high overpotentials and slow kinetics. This challenge has been overcome by coupling with oxygen evolving catalysts (OECs) and/or doping donor elements. In the latter, surface-modified p-Si electrodes are fabricated to absorb visible light and catalyze the CO2 reduction. For modification, metal nanoparticles are electrodeposited on the p-Si and their PEC performance is compared.

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A Study on the Densifcation of Stellite Fine Powder for Iniection Molding (사출성형용 Stellite미분말의 소결 치밀화에 관한 연구)

  • 임태환
    • Journal of Powder Materials
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    • v.4 no.2
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    • pp.113-121
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    • 1997
  • The densification of the compacts of Co+32%Cr+20%W+l.5%C, Co+32%Cr+20%W+3.0%C and Co+32%Cr+20%W+4.5%C sintered under $H_2$ gas or vacuum was investigated. The effect of V and B addition on the densification was also investigated. The densification of these compacts were always incomplete regardless of sintering atmosphere, temperature and time. The amounts of oxygen and carbon in compacts sintered in $H_2$ for 3.6ks at 1523K were 0.105~0.160 mass% and 0.33~0.89 mass%, respectively. And those in vacuum were 0.028~0.032% and 0.957~4.08%, respectively. Relative density(Ds) of Co+29%Cr+17%W+3.0%C compact containing 6%V and Co+32%Cr+20%W+2.97%C compact containing 0.03%B were 99 and 100%, respectively, indicating complete densification by solid phase sintering. Victors hardness of sintered compacts containing 6%V or 0.03%B were 632 and 568, showing 50~60% increase in comparison to those without V or B. These results can be explained in terms of oxidation/reduction of oxides and equilibrium pressure of CO in isolated pore, instead of presence of liquid formation and grain boundary separation from pores due to large grain growth.

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Fabrication of Pt-Co Alloy Thin Films RTD Temperature Sensors (Pt-Co 합금박막 측온저항체 온도센서의 제작)

  • 홍석우;서정환;정귀상;노상수
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1998.06a
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    • pp.431-434
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    • 1998
  • Platinum-Cobalt alloy thin films were deposited on Al$_2$O$_3$ substrate by r.f. cosputtering for RTD temperature sensors. We made Pt-Co alloy resistance patterns on the Al$_2$O$_3$ substrate by lift-off method and investigated the physical and electrical characteristics of these films under various conditions (the input power, working vacuum, annealing temperature, thickness of thin films) and also after annealing these films. At input power of Pt : 4.4 W/$\textrm{cm}^2$, Co : 6.91 W/$\textrm{cm}^2$, working vacuum on and annealing conditions of 1000 $^{\circ}C$ and 60 min, the resistivity and the sheet resistive thin films were 15 ${\mu}$$\Omega$$.$cm and 0.5 $\Omega$/$\square$, respectively. The TCR value of Pt-Co a films was measured with various thickness of thin films and annealing temperature. T TCR value is gained under condition 3000${\AA}$ of thin films thickness and 1000$^{\circ}C$ of temperature. These results indicate that Pt-Co alloy thin films have potentiality for the wide temperature ranges.

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The Condensation Risk Assessment of Vacuum Multi-Layer Glass and Triple Glass using the Temperature Difference Ratio (진공복층 유리와 3중 유리의 결로 위험성 평가)

  • Won, Jong-Seo;Nam, Jung-Woo
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.25 no.11
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    • pp.573-577
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    • 2013
  • An external window directly affects the energy performance of its building. In modern well-insulated buildings, U-values for walls of 0.36 $W/m^2K$ or even lower can be realized. In such buildings, glazing with typical U-value of 2.1 $W/m^2K$ or higher creates thermal weak spots on the facade. The performance of the existing triple glass window has been limited to energy savings and condensation prevention. In this study, the performance of condensation prevention of a vacuum multi-layer glass was analyzed. The final conclusion through mock-up experiments is as follows. The surface temperature of the vacuum multi-layer glass was $2^{\circ}C$ higher, and the temperature difference ratio (TDR) was 0.07 lower, than the corresponding values of the triple glass.

펄스 레이저 증착법(PLD)으로 제조된 $LiCoO_2$ 박막의 특성

  • Park, Hyeong-Seok;Choe, Gyu-Ha;Lee, Won-Jun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.287-287
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    • 2010
  • 휴대용 기기의 사용이 증가하면서 배터리의 고용량화와 소형화가 요구되고 있다. 특히 내시경 캡슐과 같은 의료용 센서 기기에서는 소형화가 매우 중요하며 인체에 해로운 액체전해질이 들어가지 않는 것이 바람직하다. 최근 무선센서, RFID 태그, 스마트 카드 등을 위하여 고체전해질을 사용하는 박막 마이크로 배터리가 개발되고 있으나, 에너지 저장용량이 작아 응용분야가 제한적이다. Si wafer 위에 형성된 고단차의 3차원 구조 위에 박막 배터리를 형성한다면 표면적 증가에 의해 에너지 저장용량 역시 크게 증가할 것이며, Si 기반의 반도체, 디스플레이, 태양전지 등과 쉽게 집적이 가능할 것이다. 본 연구에서는 펄스 레이저 증착법(Pulsed Laser Deposition)으로 리튬 배터리의 cathode 물질인 $LiCoO_2$를 박막으로 제조하고 그 특성을 연구하였다. 펄스 레이저 증착법은 저온 증착이 가능하고 타겟 물질과 같은 조성의 박막을 증착하는 것이 용이한 장점이 있다. Pt, TiN 등의 기판 위에 $LiCoO_2$ 박막을 증착하고 증착 온도와 산소($O_2$) 분압이 박막의 조성, 미세구조, 결정성, 그리고 전하저장용량에 미치는 영향을 고찰하였다.

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