• Journal of the Semiconductor & Display Technology
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• v.12 no.2
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• pp.79-84
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• 2013

Nanoimprint lithography (NIL) is the next generation photolithography process in which the photoresist is dispensed onto the substrate in its liquid form and then imprinted and cured into a desired pattern instead of using traditional optical system. There have been considerable attentions on NIL due to its potential abilities that enable cost-effective and high-throughput nanofabrication to the display device and semiconductor industry. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper, with the rolling type imprinting process, a mold, placed upon the $2^{nd}$ generation TFT-LCD glass sized substrate($370{\times}470mm^2$), is rolled by a rubber roller to achieve a uniform residual layer. The prediction of residual layer thickness of the photoresist by rolling of the rubber roller is crucial to design the rolling type imprinting process, determine the rubber roller operation conditions-mpressing force & feeding speed, operate smoothly the following etching process, and so forth. First, using the elasticity theory of contact problem and the empirical equation of rubber hardness, the contact length between rubber roller and mold is calculated with consideration of the shape and hardness of rubber roller and the pressing force to rubber roller. Next, using the squeeze flow theory to photoresist flow, the residual layer thickness of the photoresist is calculated with information of the viscosity and initial layer thickness of photoresist, the shape of mold pattern, feeding speed of rubber roller, and the contact length between rubber roller and mold previously calculated. Last, the effects of rubber roller operation conditions, impressing force & feeding speed, on the residual layer thickness are analyzed with consideration of the shape and hardness of rubber roller.

• Journal of Communications and Networks
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• v.18 no.3
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• pp.387-396
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• 2016

Multiuser communication has been an important research area of underwater acoustic communications and networking. This paper studies the use of adaptive orthogonal frequency-division multiple access (OFDMA) in a downlink scenario, where a central node sends data to multiple distributed nodes simultaneously. In practical implementations, the instantaneous channel state information (CSI) cannot be perfectly known by the central node in time-varying underwater acoustic (UWA) channels, due to the long propagation delays resulting from the low sound speed. In this paper, we explore the CSI feedback for resource allocation. An adaptive power-bit loading algorithm is presented, which assigns subcarriers to different users and allocates power and bits to each subcarrier, aiming to minimize the bit error rate (BER) under power and throughput constraints. Simulation results show considerable performance gains due to adaptive subcarrier allocation and further improvement through power and bit loading, as compared to the non-adaptive interleave subcarrier allocation scheme. In a lake experiment, channel feedback reduction is implemented through subcarrier clustering and uniform quantization. Although the performance gains are not as large as expected, experiment results confirm that adaptive subcarrier allocation schemes based on delayed channel feedback or long term statistics outperform the interleave subcarrier allocation scheme.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.276-279
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• 2004

Plasma enhanced chemical vapor deposition (PECVD) of silicon nitride (SiN) is a proven technique for obtaining layers that meet the needs of surface passivation and anti-reflection coating. In addition, the deposition process appears to provoke bulk passivation as well due to diffusion of atomic hydrogen. This bulk passivation is an important advantage of PECVD deposition when compared to the conventional CVD techniques. A further advantage of PECVD is that the process takes place at a relatively low temperature of 300t, keeping the total thermal budget of the cell processing to a minimum. In this work SiN deposition was performed using a horizontal PECVD reactor system consisting of a long horizontal quartz tube that was radiantly heated. Special and long rectangular graphite plates served as both the electrodes to establish the plasma and holders of the wafers. The electrode configuration was designed to provide a uniform plasma environment for each wafer and to ensure the film uniformity. These horizontally oriented graphite electrodes were stacked parallel to one another, side by side, with alternating plates serving as power and ground electrodes for the RF power supply. The plasma was formed in the space between each pair of plates. Also this paper deals with the fabrication of multicrystalline silicon solar cells with PECVD SiN layers combined with high-throughput screen printing and RTP firing. Using this sequence we were able to obtain solar cells with an efficiency of 14% for polished multi crystalline Si wafers of size 125 m square.

• Korean Journal of Agricultural Science
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• v.47 no.4
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• pp.995-1010
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• 2020

In this study, a multivariate analysis model of partial least square regression (PLSR) was developed to predict the moisture content of green peppers using hyperspectral imaging (HSI). In HSI, illumination is essential for high-quality image acquisition and directly affects the analytical performance of the visible near-infrared hyperspectral imaging (VIS/NIR-HSI) system. When green pepper images were acquired using a direct lighting system, the specular reflection from the surface of the objects and their intensities fluctuated with time. The images include artifacts on the surface of the materials, thereby increasing the variability of data and affecting the obtained accuracy by generating false-positive results. Therefore, images without glare on the surface of the green peppers were created using a polarization filter at the front of the camera lens and by exposing the polarizer sheet at the front of the lighting systems simultaneously. The results obtained from the PLSR analysis yielded a high determination coefficient of 0.89 value. The regression coefficients yielded by the best PLSR model were further developed for moisture content mapping in green peppers based on the selected wavelengths. Accordingly, the polarization filter helped achieve an uniform illumination and the removal of gloss and artifact glare from the green pepper images. These results demonstrate that the HSI technique with a polarized lighting system combined with chemometrics can be effectively used for high-throughput prediction of moisture content and image-based visualization.

• Korean Chemical Engineering Research
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• v.45 no.2
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• pp.149-154
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• 2007

Nanoimprint lithography (NIL) is useful technique because of its low cost and high throughput capability for the fabrication of sub-micrometer patterns which has potential applications in micro-optics, magnetic memory devices, bio sensors, and photonic crystals. Usually, a chemical surface treatment of the stamp is needed to ensure a clean release after imprinting and to protect the expensive original master against contamination. Meanwhile, adhesion promoter between resin and substrate is also important in the nanoscale pattern. In this work, we have investigated the effect of surface treatment using silane coupling agent as release layer and adhesion promoter for UV-Nanoimprint lithography. Uniform SAM (self-assembled monolayer) could be fabricated by vapor deposition method. Vapor phase process eliminates the use of organic solvents and greatly simplifies the handling of the sample. It was also proven that 3-acryloxypropyl methyl dichlorosilane (APMDS) could strongly improve the adhesion force between resin and substrate compared with common planarization layer such as DUV-30J or oxygen plasma treatment.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.12
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• pp.45-52
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• 2005

A systolic array formed by interconnecting a set of identical data-processing cells in a uniform manner is a combination of an algorithm and a circuit that implements it, and is closely related conceptually to arithmetic pipeline. High-performance computation on a large array of cells has been an important feature of systolic array. To achieve even higher degree of concurrency, it is desirable to make cells of systolic array themselves systolic array as well. The structure of systolic array with its cells consisting of another systolic array is to be called super-systolic array. This paper proposes a scalable bit-level super-systolic amy which can be adopted in the VLSI design including regular interconnection and functional primitives that are typical for a systolic architecture. This architecture is focused on highly regular computational structures that avoids the need for a large number of global interconnection required in general VLSI implementation. A bit-level super-systolic FIR filter is selected as an example of bit-level super-systolic array. The derived bit-level super-systolic FIR filter has been modeled and simulated in RT level using VHDL, then synthesized using Synopsys Design Compiler based on Hynix $0.35{\mu}m$ cell library. Compared conventional word-level systolic array, the newly proposed bit-level super-systolic arrays are efficient when it comes to area and throughput.

• Journal of Korean Port Research
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• v.13 no.2
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• pp.333-350
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• 1999

Today freeway is thought to be a very important transportation facility carrying tremendous traffic flow as the main corridor within the area of between the areas. However freeway is experiencing severe congestion and accidents by increased entrance ramp flow especially at peak time period. Ramp meters on the freeway entrance ramps that supply traffic to the freeway in a measured or appropriately regulated amount are needed for alleviating freeway congestion. Because ramp meters can be operated to discharge traffic at a measured or regulated rate thus maintaining more uniform speed on the mainline section maximizing the throughput to the freeway within the capacity of a downstream bottleneck and reducing the congestion related accidents. Thus the objectives in this study were to analyze the traffic characteristics on the freeway I-94 with ramp metering system before/after ITS technology in Detroit (Michigan) area compare shifts of the traffic characteristics on the freeway I-94 before/after ITS technology and finally suggest a better ramp metering strategy for the freeway system The following results were obtained: i)Flow occupancies and speeds on the mainline merge section of freeway were shown to be a big difference depending on the peak periods areas and directions based on the distribution of traffic flow characteristics on the freeway. ii)Reduced speed was shown to be more than 5 mph and ramp flow was also shown to be more than 240 vph at peak periods if there was the ramp metering system constructed on the freeway. iii)Ramp metering system was shown to be optimally operated on the freeway if ramp flow could be maximized within the range of over 900 vph and reduced occupancy could be also maximized by no more than 2 percent at peak periods. iv)The average flows on the freeway after the ITS technology were shown to be a decrease of over 20% depending on the peak periods areas and directions when compared with those flow on the freeway before the ITS technology. over 20% depending on the peak periods areas and directions when compared with those speeds on the freeway before the ITS technology. vi)The average metering rates on the freeway after the ITS technology were shown to be an increase of over 10% depending on the peak periods areas and directions when compared with those metering rates on the freeway before the ITS technology.

• Journal of Convergence for Information Technology
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• v.7 no.2
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• pp.43-51
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• 2017

Background/Objectives : The purpose of this study is to propose a multi-threaded web crawl using queues that can solve the problem of time delay of single processing method, cost increase of parallel processing method, and waste of manpower by utilizing multiple bots connected by wide area network Design and implement. Methods/Statistical analysis : This study designs and analyzes applications that run on independent systems based on multi-threaded system configuration using queues. Findings : We propose a multi-threaded web crawler design using queues. In addition, the throughput of web documents can be analyzed by dividing by client and thread according to the formula, and the efficiency and the number of optimal clients can be confirmed by checking efficiency of each thread. The proposed system is based on distributed processing. Clients in each independent environment provide fast and reliable web documents using queues and threads. Application/Improvements : There is a need for a system that quickly and efficiently navigates and collects various web sites by applying queues and multiple threads to a general purpose web crawler, rather than a web crawler design that targets a particular site.