• The Korean Journal of Ceramics
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• v.1 no.1
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• pp.7-12
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• 1995

When a $Ta_O_5$ dielectric film is deposited on a bare silicon, the growth of $SiO_2$ at the $Ta_O_5$/Si interface cannot be avoided. Even though the $SiO_2$ layer is ultrathin (a few nm), it has great effects on the electrical properties of the capacitor. The concentration depth profiles of the ultrathin interfacial $SiO_2$ and $SiO_2/Si_3N_4$ layers were obtained using an Auger electron spectroscopy (AES) equipped with a cylindrical mirror analyzer (CMA). These AES depth profiles were quantitatively analyzed by comparing with the theoretical depth profiles which were obtained by considering the inelastic mean free path of Auger electrons and the angular acceptance function of CMA. The direct measurement of the interfacial layer thicknesses by using a high resolution cross-sectional TEM confirmed the accuracy of the AES depth analysis. The $SiO_2/Si_3N_4$ double layers, which were not distinguishable from each other under the TEM observation, could be effectively analyzed by the AES depth profiling technique.

• Journal of Magnetics
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• v.7 no.4
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• pp.151-155
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• 2002

In situ stress changes at interfaces of ultrathin magnetic films were measured by means of a non-contact optical fiber bundle displacement detector. A bending of the substrate due to stress of a deposited film was detected in cantilever geometry. The highest sensitivity of 134 mV/$\mu$m for the displacement detector was realized with a help of computer simulation. The detector was applied to in situ stress measurements of Co/Pt and Ni/Pd magnetic multilayer films prepared on the glass substrates by dc magnetron sputtering. The detector turned out to have a submonolayer sensitivity that enables to observe coherent-to-incoherent transition in these mismatched multilayers and even detect the stress changes within the monoatomic coverage. This highly sensitive detector paves new way to probe the stress relaxation at an interface in ultrathin films.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.64 no.1
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• pp.171-175
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• 2015

In this paper, because of global environmental problems such as energy shortage and abnormal climate, green energy development and energy saving technology development is being magnified. Heat insulation, the most basic and traditional energy saving method, is highly expected. Especially, simple and advanced heat insulation technique based on Nano material is promising future technology. The railway system also requires heat insulation. Especially, traditional heat insulator such as glass wool has been adopted frequently to rolling stock. The heat insulator is also adopted in general railway service buildings. Take account of cost-effective heat blocking performance, the heat insulator shall be adopted in diverse fields such as electric power, railroad, signal and communication. The only and direct solution for this problem is installing heat insulator with outstanding endurance, corrosion resistance and heat resistance to block outer heat Upgrading heat specification of equipment can be a solution, but since price and maintenance cost rise severely, this plan might be incongruous. In this research, energy saving effect of ultrathin heat insulator film was demonstrated by installing the film on roof of electrical room.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2007.06a
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• pp.441-444
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• 2007

In this paper, the resonance characteristics of ZnO-based film bulk acoustic resonator (FBAR) devices with high-quality multi-layer reflectors are proposed. The ultrathin Cr film $(300\;\AA-thick)$ between $SiO_2$ film and W film is formed by a sputtering-deposition in order to enhance the adherence at their interfaces. The resonance frequency was observed to vary with the number of the reflectors. This seems to be attributed to the change in the effective thickness of the ZnO film. Also, increasing the number of layers has led to a significant improvement of the series/parallel quality factor.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.264.2-264.2
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• 2013

Molecular layer deposition (MLD) is sequential, self-limiting surface reaction to form conformal and ultrathin polymer film. This technique generally uses bifunctional precursors for stepwise sequential surface reaction and entirely organic polymer films. Also, in comparison with solution-based technique, because MLD is vapor-phase deposition based on ALD, it allows epitaxial growth of molecular layer on substrate and is especially good for surface reaction or coating of nanostructure such as nanopore, nanochannel, nanwire array and so on. In this study, polyurea film that consisted of phenylenediisocyanate and phenylenediamine was formed by MLD technique. In situ Fourier Transform Infrared (FTIR) measurement on high surface area SiO2 substrate was used to monitor the growth of polyurethane and polyurea film. Also, to investigate orientation of chemical bonding formed polymer film, plan-polarized grazing angle FTIR spectroscopy was used and it showed epitaxial growth and uniform orientation of chemical bones of polyurea films.

• Journal of the Korean Magnetics Society
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• v.5 no.2
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• pp.112-114
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• 1995

We show physically and mathematically that magnetoelastic coupling coefficients can be predicted to have a form of $B^{eff}=B^{b}+B^{s}/t$, sirniiarily in effective magnetic anisotropy energy in ultrathin films. The inverse thickness dependnce of magnetoelastic coupling coefficients implies lots of technical potentials.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.03b
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• pp.20-20
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• 2010

We present a simple process for the fabrication of high performance transparent conducting films that contain single-walled carbon nanotubes (SWCNTs) noncovalently coated with an ultrathin titania layer. The hydrophobic interactions between nanotube surfaces and the acetylacetone (acac) ligands used to stabilize the $TiO_2$ precursor provide an interesting alternative method for noncovalently coating the SWCNTs with a titania layer. The ultrathin titania layer on SWCNTs prevented the oxidation of functionalized SWCNTs at high temperatures, and protected against water molecule absorption.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.279-279
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• 2010

We present a simple process for the fabrication of high performance transparent conducting films that contain single-walled carbon nanotubes (SWCNTs) noncovalently coated with an ultrathin titania layer. The hydrophobic interactions between nanotube surfaces and the acetylacetone (acac) ligands used to stabilize the $TiO_2$ precursor provide an interesting alternative method for noncovalently coating the SWCNTs with a titania layer. The ultrathin titania layer on SWCNTs prevented the oxidation of functionalized SWCNTs at high temperatures, and protected against water molecule absorption.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.173.1-173.1
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• 2014

The variations of electronic and magnetic properties of ultrathin Fe overlayers on a W(001) surface as a function of Fe film thickness (1.0~4.0 ML) has been investigated using x-ray magnetic circular dichroism (XMCD) in conjunction with ultraviolet photoelectron spectroscopy (UPS) and low energy electron diffraction (LEED). We found that the ferromagnetic property of Fe film started to build up over 2.0 ML, as we confirmed the spin and angular moment contribution to the magnetic moment using XMCD experiments. We will systematically demonstrate that the occurrence of ferromagnetic property of Fe film on a W(001) surface is closely correlated to a themally stable layer of Fe film on a W(001) surface.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.10a
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• pp.32.1-32.1
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• 2011

Ultra thin tantalum nitride (TaNx) films with various thicknesses (10 nm to 40 nm) have been deposited by rf magnetron sputtering technique on glass substrates. The as deposited films were systematically characterized by several analytical techniques such as X-ray diffraction, X-ray photoelectron spectroscopy, field emission scanning electron microscopy, atomic force microscopy, UV-Vis-NIR double beam spectrophotometer and four point probe method. From the XRD results, the as deposited films are in amorphous nature, irrespective of the film thicknesses. The films composition was changed greatly with increasing the film thickness. SEM micrographs exhibited the densely pack microstructure, and homogeneous surface covered by small size grains at lower thickness deposited films. The surface roughness of the films was linearly increases with increasing the films thickness, consequently the transmittance decreased. The absorption edge was shifted towards higher wavelength as the film thickness increases.