• 제목/요약/키워드: ultrahigh power KrF laser

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Novel Design of Ultrashort Pulse Excimer Laser Amplifier System II (Temporal Gain Control and Phase Distortion/ASE Characteristics)

  • Lee, Young-Woo
    • Journal of information and communication convergence engineering
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    • 제1권4호
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    • pp.228-232
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    • 2003

  • The previous design work for very large final amplifier pumped by electron beam module was described from the point of view of energy characteristics. In this work, the design problems for phase front distortion, ASE, and gain control in large aperture amplifier are presented in detail.

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