• 제목/요약/키워드: ultra-thin layer

검색결과 202건 처리시간 0.028초

PLD법을 이용한 Buffer Layer 증착온도에 따른 As-doped ZnO 박막의 특성 (Characteristics of As-doped ZnO thin films with various buffer layer temperatures prepared by PLD method)

  • 이홍찬;심광보;오영제
    • 센서학회지
    • /
    • 제15권2호
    • /
    • pp.84-89
    • /
    • 2006
  • Highly concentrated p-type ZnO thin films can be obtained by doping of N, P and As elements. In this study, undoped ZnO buffer layers were prepared on a (0001) sapphire substrate by a ultra high vaccum pulsed laser deposition(UHV-PLD) method. ZnO buffer layers were deposited with various deposition temperature($400{\sim}700^{\circ}C$) at 350 mtorr of oxygen working pressure. Arsenic doped(1 wt%) ZnO thin films were deposited on the ZnO buffer layers by UHV-PLD. Crystallinity of the samples were evaluated by X-ray diffractometer and scanning electron microscopy. Optical, electrical properties of the ZnO thin films were estimated by photoluminescence(PL) and Hall measurements. The optimal condition of the undoped ZnO buffer layer for the deposition of As-doped ZnO thin films was at $600^{\circ}C$ of deposition temperature.

초박층 폴리머콘크리트 포장적용을 위한 매개변수 해석 (Parameter Study for the Application of Ultra Thin Polymer Concrete Pavement)

  • 윤상일;장용준;최진웅;홍성남;박선규
    • 한국구조물진단유지관리공학회 논문집
    • /
    • 제19권6호
    • /
    • pp.46-54
    • /
    • 2015
  • 경제성장 및 물류증가로 인하여 장대교량에 대한 수요가 증가하고 있다. 장지간을 가진 교량 건설을 위해서는 자중 감소가 필수적이며, 이를 위한 노력의 일환으로 초박층 포장재에 대한 연구 및 개발이 진행되고 있다. 국내 설계기준을 살펴보면, 이전 도로교설계기준(2010)에서는 포장이 가지는 강성을 강바닥판에 고려하지 않아 보수적인 설계가 이루어져 왔으나, 최근 개정된 설계기준인 도로교설계기준(2012, 한계상태설계법)에서는 일정한 조건 하 포장이 가지는 강성을 강바닥판에 반영하는 것을 허용하고 있다. 하지만 초박층 교면포장이 강바닥판에 미치는 영향에 대한 연구는 미비한 실정이며, 진행된 연구 또한 거동 특성 및 피로응력에 대한 연구로 한정되어 왔다. 본 연구에서는 포장강성의 반영/미반영, 교면 포장재료, 포장 두께 및 강바닥판 두께를 매개변수로 하여 이에 따른 강바닥판의 처짐과 전단응력의 변화 및 추세를 알아보고 또한 이를 바탕으로 강바닥판에 초박층 교면포장 강성 적용의 효율성을 알아보았다.

Parametric Studies of Pulsed Laser Deposition of Indium Tin Oxide and Ultra-thin Diamond-like Carbon for Organic Light-emitting Devices

  • Tou, Teck-Yong;Yong, Thian-Khok;Yap, Seong-Shan;Yang, Ren-Bin;Siew, Wee-Ong;Yow, Ho-Kwang
    • Journal of the Optical Society of Korea
    • /
    • 제13권1호
    • /
    • pp.65-74
    • /
    • 2009
  • Device quality indium tin oxide (ITO) films are deposited on glass substrates and ultra-thin diamond-like carbon films are deposited as a buffer layer on ITO by a pulsed Nd:YAG laser at 355 nm and 532 nm wavelength. ITO films deposited at room temperature are largely amorphous although their optical transmittances in the visible range are > 90%. The resistivity of their amorphous ITO films is too high to enable an efficient organic light-emitting device (OLED), in contrast to that deposited by a KrF laser. Substrate heating at $200^{\circ}C$ with laser wavelength of 355 nm, the ITO film resistivity decreases by almost an order of magnitude to $2{\times}10^{-4}\;{\Omega}\;cm$ while its optical transmittance is maintained at > 90%. The thermally induced crystallization of ITO has a preferred <111> directional orientation texture which largely accounts for the lowering of film resistivity. The background gas and deposition distance, that between the ITO target and the glass substrate, influence the thin-film microstructures. The optical and electrical properties are compared to published results using other nanosecond lasers and other fluence, as well as the use of ultra fast lasers. Molecularly doped, single-layer OLEDs of ITO/(PVK+TPD+$Alq_3$)/Al which are fabricated using pulsed-laser deposited ITO samples are compared to those fabricated using the commercial ITO. Effects such as surface texture and roughness of ITO and the insertion of DLC as a buffer layer into ITO/DLC/(PVK+TPD+$Alq_3$)/Al devices are investigated. The effects of DLC-on-ITO on OLED improvement such as better turn-on voltage and brightness are explained by a possible reduction of energy barrier to the hole injection from ITO into the light-emitting layer.

Suppression of MgO hydration using Self-Assembled Monolayers

  • Lee, Kyung-Wha;Kim, Tae-Jun;Whang, Ki-Woong
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
    • /
    • pp.533-535
    • /
    • 2004
  • We suggest the use of a self-assembled ultra thin organic film that can suppress the hydration of MgO protective layer in AC-PDP. We analyzed the degree of hydration of MgO layer in AC-PDP by XPS when exposed to air after vacuum deposition which proved the effectiveness of the hydration prevention. We also made PDP test panels to demonstrate the improvement in the luminance and luminous efficiency when the hydration of MgO surface is suppressed by the use of self-assembled ultra thin organic film.

  • PDF

Hetero-epitaxial ZnO 버퍼층이 As-doped ZnO 박막의 증착조건에 미치는 영향 (Effect of the hetero-epitaxial ZnO buffer layer for the formation of As-doped ZnO thin films)

  • 이홍찬;최원국;심광보;오영제
    • 센서학회지
    • /
    • 제15권3호
    • /
    • pp.216-221
    • /
    • 2006
  • ZnO thin films prepared by PLD method exhibit an excellent optical property, but may have some problems such as incomplete surface roughness and crystallinity. In this study, undoped ZnO buffer layers were deposited on (0001) sapphire substrates by ultra high vacuum pulse laser deposition (UHV-PLD) and molecular beam epitaxy (MBE) methods, respectively. After post annealing of ZnO buffer layer, undoped ZnO thin films were deposited under different oxygen pressure ($35{\sim}350$ mtorr) conditions. The Arsenic-doped (1, 3 wt%) ZnO thin layers were deposited on the buffer layer of undoped ZnO by UHV-PLD method. The optical property of the ZnO thin films was analyzed by photoluminescence (PL) measurement. The ${\theta}-2{\theta}$ XRD analysis exhibited a strong (002)-peak, which indicates c-axis preferred orientation. Field emission-scanning electron microscope (FE-SEM) revealed that microstructures of the ZnO thin films were varied by oxygen partial pressure, Arsenic doping concentration, and deposition method of the undoped ZnO buffer layer. The denser and smoother films were obtained when employing MBE-buffer layer under lower oxygen partial pressure. It was also found that higher Arsenic concentration gave the enhanced growing of columnar structure of the ZnO thin films.

Ultra low temperature polycrystalline silicon thin film transistor using sequential lateral solidification and atomic layer deposition techniques

  • Lee, J.H.;Kim, Y.H.;Sohn, C.Y.;Lim, J.W.;Chung, C.H.;Park, D.J.;Kim, D.W.;Song, Y.H.;Yun, S.J.;Kang, K.Y.
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
    • /
    • pp.305-308
    • /
    • 2004
  • We present a novel process for the ultra low temperature (<150$^{\circ}C$) polycrystalline silicon (ULTPS) TFT for the flexible display applications on the plastic substrate. The sequential lateral solidification (SLS) was used for the crystallization of the amorphous silicon film deposited by rf magnetron sputtering, resulting in high mobility polycrystalline silicon (poly-Si) film. The gate dielectric was composed of thin $SiO_2$ formed by plasma oxidation and $Al_2O_3$ deposited by plasma enhanced atomic layer deposition. The breakdown field of gate dielectric on poly-Si film showed above 6.3 MV/cm. Laser activation reduced the source/drain resistance below 200 ${\Omega}$/ㅁ for n layer and 400 ${\Omega}$/ㅁ for p layer. The fabricated ULTPS TFT shows excellent performance with mobilities of 114 $cm^2$/Vs (nMOS) and 42 $cm^2$/Vs (pMOS), on/off current ratios of 4.20${\times}10^6$ (nMOS) and 5.7${\times}10^5$ (PMOS).

  • PDF

Efficiency Enhancement of Organic Light Emitting Diode Using $TiO_2$ Buffer Layer

  • Lee, Heui-Dong;Oh, Min-Cheol;Kim, Jae-Chang;Yoon, Tae-Hoon
    • 한국정보디스플레이학회:학술대회논문집
    • /
    • 한국정보디스플레이학회 2004년도 Asia Display / IMID 04
    • /
    • pp.632-635
    • /
    • 2004
  • We have studied the effect of $TiO_2$ layer deposited by RF magnetron sputtering which is used as an ultra thin hole-injection buffer layer in organic light-emitting diode (OLED). The $TiO_2$ thin film layer prevents metallic ions from diffusing from the ITO layer to the organic layers and improves the balance of hole and electron injections and the interface characteristics between the electrode and the organic layer. With 2 nm thickness of $TiO_2$, the quantum efficiency was improved by 45 % compared to the device fabricated without the $TiO_2$ layer.

  • PDF

CoCrTa/Ti 이층막의 하지층기판온도의존성 및 특성개선 (Improvement of characteristics and dependence on underlayer substrate temperature of CoCrTa/Ti double layer)

  • 김용진;성하윤;금민종;손인환;김경환
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2000년도 추계학술대회 논문집
    • /
    • pp.492-495
    • /
    • 2000
  • In order to develop an ultra-thin CoCr perpendicular magnetic recording layer, we prepared CoCrTa/Ti double layer for perpendicular magnetic recording media by new facing targets sputtering system, Crystallgraphics and magnetic characteristics of CoCrTa on underlayer substrate temperature have been investigated. Crystallgraphic and magnetic characteristic of thin films were evaluated by X-ray diffractometry(XRD), vibrating sample magnetometer(VSM) and atomic force microscopy(AFM). The coercivity and anisotropy field was increased by increasing under layer substrate temperature, c-axis orientation of CoCrTa magnetic recording layer was improved 8$^{\circ}$ to 5.6$^{\circ}$when under layer substrate temperature was 250[$^{\circ}C$]. Also, through annealing effect for CoCrTa/Ti double layer, it was certain that crystallgraphics and magnetic characteristics was improved.

  • PDF