• The Journal of the Institute of Internet, Broadcasting and Communication
• /
• v.19 no.6
• /
• pp.169-174
• /
• 2019

Flexure joints are recently used in the ultra-precision mechanism for a telecommunication mirror stage. Flexure joints have several advantages coming from their monolithic characteristics. They can be used to reduce the size of manipulators or to increase the precision of motion. In our research, 6 dof(degree of freedom) mechanism is suggested for micrometer repeatability using a flexure mechanism. To design the 6-dof motion, the 2-dof planar mechanism are designed and assembled to make the 6-dof motion. To achieve a certain performance, it is necessary to define the performance of mechanism that quantifies the characteristics of flexure joints. This paper addresses the analysis and design of the 6-dof parallel manipulator with a flexure joint using a finite element analysis tool. To obtain experimental result, CCD laser displacement sensor is used for the total displacement and the stiffness for the 6-dof flexure mechanism.

• Transactions of the Korean Society of Mechanical Engineers A
• /
• v.20 no.10
• /
• pp.3079-3094
• /
• 1996

Recently, the high-precision vibration attenuation technology becomes the essence fo the seccessful development of high-integrated and ultra-precision industries, and is expected to continue playing a key role in the enhancement of manufacturing technology. Vibration isolation system using an air-spring is widely employed owing to its excellent isolation characteristics in a wide frequency range. It has, however, some drawbacks such as low-stiffness and low-damping features and can be easily excited by exogenous disturbances, and then vibration of table is remained for a long time. Consequently, the need for active vibration control for an air-spring vibration isolation system becomes inevitable. Furthermore, for an air-spring isolation table to be successfully employed in a variety of manufacturing sites, it should have a guaranteed robust performance not only to exogenous disturbances but also to uncertainties due to various equipments which might be put on the table. In this study, an active vibration suppression control system using H.inf. theory is designed and experiments are performed to verify its robust performance. An air-spring vibration isolation table with voice-coil-motors as its actuators is designed and built. The table is modeled as 3 degree-of-freedom system. An active control system is designed based on $H_\infty$control theory using frequency-shaped weighting functions. Analysis on its performance and frequency responce properties are done through numerical simulations. Robust characteristics of$H_\infty$ control on disturbances and model uncertainties are experimentally verified through (i) the transient response to the impact excitation of the table, (ii) the steady-state response to the harmonic excitation, and (iii) the response to the mass change of the table itself. An LQG controller is also designed and its performance is compared with the $H_\infty$ controller.

• Journal of Astronomy and Space Sciences
• /
• v.30 no.1
• /
• pp.49-58
• /
• 2013

ARGO-M is a satellite laser ranging (SLR) system developed by the Korea Astronomy and Space Science Institute with the consideration of mobility and daytime and nighttime satellite observation. The ARGO-M optical system consists of 40 cm receiving telescope, 10 cm transmitting telescope, and detecting optics. For the development of ARGO-M optical system, the structural analysis was performed with regard to the optics and optomechanics design and the optical components. To ensure the optical performance, the quality was tested at the level of parts using the laser interferometer and ultra-high-precision measuring instruments. The assembly and alignment of ARGO-M optical system were conducted at an auto-collimation facility. As the transmission and reception are separated in the ARGO-M optical system, the pointing alignment between the transmitting telescope and receiving telescope is critical for precise target pointing. Thus, the alignment using the ground target and the radiant point observation of transmitting laser beam was carried out, and the lines of sight for the two telescopes were aligned within the required pointing precision. This paper describes the design, structural analysis, manufacture and assembly of parts, and entire process related with the alignment for the ARGO-M optical system.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2011.02a
• /
• pp.279-279
• /
• 2011

나노 입자를 이용한 비휘발성 메모리 소자의 전기적 특성 향상을 위하여 일함수가 Si 보다 큰 금속, 금속산화물, 금속 실리사이드 나노입자를 이용한 다양한 형태의 메모리 구조가 제안되어져 왔다.[1] 특히 이와 같은 나노 부유 게이트 구조에서 터널 절연막의 구조를 소자의 동작 속도를 결정하는데 이는 터널링 되어 주입되는 전자의 확률에 의존하기 때문이다. 양자 우물에 국한된 전하가 누설되지 않으면서 주입되는 전자의 터널링 확률을 증가시키기 위하여, dielectric constant 와 barrier height를 고려한 다양한 구조의 터널 절연막의 형태가 제안 되었다.[2-3] 특히 낮은 전계에서도 높은 터널링 확률은 메모리 소자의 동작 속도를 향상시킬 수 있다. 본 연구에서는 n형 Si 기판위에 Si3N4 및 HfAlO를 각각 1.5 nm 및 3 nm 로 atomic layer deposition 방법으로 증착하였으며 3~5 nm 지름을 가지는 $TiSi_2$ 및 $WSi_2$ 나노 입자를 형성한 후 컨트롤 절연막인 $SiO_2$를 ultra-high vacuum sputtering을 사용하여 20 nm 두께로 형성 하였다. 마지막으로 $200{\mu}m$ 지름을 가지는 Al 전극을 200 nm 두께로 형성하여 나노 부유 게이트 커패시터를 제작하였다. 제작된 소자는 Agilent E4980A precision LCR meter 및 HP 4156A precision semiconductor parameter analyzer 를 사용하여 전기용량-전압 및 전류-전압 특성분석을 하여 전하저장 특성 및 제작된 소자의 터널링 특성을 확인 하여 본 연구를 통하여 제작된 나노 부유 게이트 커패시터 구조가 메모리 소자응용이 가능함을 확인하였다.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.12 no.12
• /
• pp.5412-5419
• /
• 2011

The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.18 no.7
• /
• pp.56-62
• /
• 2019

The high-precision laser scriber carries out scribing alumina ceramic substrates for manufacturing ultra-small chip resistors. The ceramic substrates are loaded, aligned, scribed, transferred, and unloaded. The entire process is fully automated, thereby minimizing the scribing cycle time of the ceramic substrates and improving the throughput. The scriber consists of the laser optical system, pick-up module of ceramic substrates, pre-alignment module, TH axis drive work table, automation module for substrate loading / unloading, and high-speed scribing control S/W. The loader / unloader unit, which has the greatest influence on the scribing cycle time of the substrates, carries the substrates to the work table that carries out the cutting line work by driving the X and Y axes as well as by adsorbing the ceramic substrates. The loader / unloader unit consists of the magazine up / down part, X-axis drive part for conveying the substrates to the left and right direction, and the vision part for detecting the edge of the substrate for the primary pre-alignment of the substrates. In this paper, the laser scribing machining simulation is performed by applying the instrument mechanism of each component module. Through this study, the scribing machining process is first verified by analyzing the process operation and work area of each module in advance. In addition, the scribing machining process is optimized by comparing and analyzing the scribing cycle time of one ceramic substrate according to the alignment stage module speed.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.16 no.7
• /
• pp.4405-4410
• /
• 2015

Two-dimensional displacements are obtained from the sandwiched patterns, which superpose two linearly-periodic patterns orthogonally, respectively. The transparent top pattern is identified by deflection of the laser beam due to a difference of refractivity and the opaque bottom pattern is identified by deviation of the beam intensity due to a difference of reflectance. In the sample setup, the top pattern made up of build-up film is manufactured by UV laser machining and the bottom pattern is manufactured by ultra-precision trench machining and deposition for aluminum plate. The proposed decoding method is verified experimentally using the $10{\mu}m$ equally spaced sample patterns and the devised optical system. The Korea Academia-Industrial cooperation Society.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.20 no.9
• /
• pp.808-811
• /
• 2007

Aspheric glass lens have recently been used in camera phone module because they are more effective than spherical ones. In this paper, the grinding condition of the tungsten carbide molding core has been found after applying DOE to the development of the aspheric glass lens for the 3 Megapixel and 2.5x camera-phone module. Also, the ultra precision grinding process was investigated under this condition by experiment. Re-Ir coating was applied on the ground surface of the tungsten carbide molding core. The influence of Re-Ir coating on the form accuracy and surface roughness of molding core was compared and evaluated. The form accuracy and surface roughness of the molding core were improved by application of Re-Ir coating on the surface of the tungsten carbide molding core.

• The Transactions of The Korean Institute of Electrical Engineers
• /
• v.59 no.6
• /
• pp.1150-1158
• /
• 2010

In this paper, a new reliable portable activity monitoring device implemented with the buddhist-style bowing activity and walking step detection algorithm, is presented. In order to monitor the bowing and walking activities, miniaturized 3-axis accelerometer sensor with the sensitivity of 800 mV/g was used. After initial signal conditioning, vector magnitude of accelerometer signals was calculated. Syntactic peak detection method was used in order to feature points. All signal processing algorithms were implemented in ultra-low power microcontroller MSP430 with double precision floating point arithmetic. For evaluation, 19 young man($24.22\pm5.22$ yrs) and woman($22.28\pm2.72$ yrs) were involved. The accuracy of the proposed algorithms were 98.91 %($\pm0.011$) for walking step detection and 98.25 %($\pm0.023$) for buddhist-style bowing activity. Comparing to the commercialized pedometer accuracy, 87.1 %($\pm0.058$), the proposed walking step detection algorithms show more reliable accuracy.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.17 no.3
• /
• pp.1-6
• /
• 2018

Micro prism pattern is applying in order to get increase of luminance, control the light, and so forth especially in optics and display industry. Most patterns are fabricated by lithography, planning, and EDM, but they have limitations on the productivity or the unit cost of produce. However, ultra precision mold is one of the processes able to replace it, and assure high productivity required by industries. In this investigation, micro prismatic end-milling is suggested in order to fabricate the pattern effectively. Micro prism pattern having $100{\mu}m$ of pitch and height was machined on STD-11. After machining, the flank and boundary wear on micro end mill were measured and analyzed, as well as burr formation and dimensional accuracy of fabricated pattern were evaluated. Thus the optimal cutting conditions were derived.