• 한국정밀공학회지
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• 제26권8호
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• pp.55-61
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• 2009

Recently, many studies are being conducted to realize high quality polishing technology, but because of high dependence on field experience and insufficient research for ultra-precision polishing technology, it is difficult to establish standardization of polishing conditions. The purpose of this study is to determine high-efficiency superfinishing conditions which are applicable in the field of machining. To achieve this, we have a developed a superfinishing device and conducted a series of polishing experiments for mechanical materials such as SM45C, Brass, Al7075, and Ti, from the perspective of oscillation speed, the rotational speed of the workpiece, contact roller hardness, contact pressure, and feed rate. From the experimental results, it was confirmed that the polishable superfinishing conditions range and efficient feed rate of polishing film can be determined.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 춘계학술대회 논문집
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• pp.922-925
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• 2002

Klystron which is micro wave amplifier tube are mainly used in fields of science such as accelerator, nuclear fusion, broadcasting, communication fields, and defense industry fields, tract. The quality of Klystron anode and cavity are determined by form accuracy and roughness of the worked surface. Therefore anode and cavity are restricted the from accuracy strictly and the surface roughness be under Rmax 0.03S. As a work material of anode and cavity, the oxygen-free copper, that is used for optical pares of aerospace and laser mirror is selected. An outside diameter of material is $\Phi$100 mm and an inside diameter is $\Phi$30~33 mm. In this study, to find the optimum ultra precision cuffing condition of oxygen-free copper with diamond turning machine, the surface roughness is examined for various diamond toot nose radius, main spindle speed, fred rate and depth of cut. As a result of experiment, we could machined the anode and cavity with a surface roughness within Ra 3.2 nm, a form accuracy within 0.01 $\mu\textrm{m}$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.818-821
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• 2004

With a rapid development in the area of micro and ultra precision technology, the micro surface machining of small size parts are explosively increased. Especially, to improve efficiency of various beams in lens and reflector, non-rotational symmetric form and several mm level heights changeable surface can be machined at a time. These geometric complex 3D surface cannot be machined by general short stroke FTS. The long stroke FTS if firmly needed to move directly several mm and have nm level positioning accuracy for the complex surface form. The long stroke FTS used linear motors to drive moving unit long and fine, aero static bearings to decrease friction and moving errors in guide way, optical linear scale with nm level resolution to measure position of FTS. Furthermore, to increase the performance of acceleration of FTS, the light material, such as AL is used for the structure and the high stiffness box type structure is selected. In this paper, the genetic algorithm approach is described to determine a set of design parameters for auto tuning. The authors have attempted to model the design problem with the objective of minimizing the error, such as variable pattern change. This method can give the better alternative than existing other method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.467-470
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• 2004

Diamond-Like Carbon (DLC) thin film is a semiconductor with high mechanical hardness, low friction coefficient, high chemical inertness, and optical transparency. DLC thin films have widespread applications as protective coatings and solid lubricant coatings in areas such as Hard Disk Drive (HDD) and Micro-Electro-Mechanical-Systems (MEMS). In this work, the wear characteristics of DLC thin films deposited on silicon substrates using a DC-magnetron sputtering system were analyzed. The wear tracks were measured with an Atomic Force Microscope (AFM). To identify the sp2 and sp3 hybridization of carbon bonds and other bonds Raman spectroscopy was used. The structural information of DLC thin films was obtained with Fourier transform infrared spectroscopy and wear tests were conducted by using a micro-pin-on-reciprocator tester. Results showed that the wear characteristics were dependent on the sputtering conditions. The wear rate could be correlated with the bonding state of the DLC thin film.

• 한국정밀공학회지
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• 제24권11호
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• pp.52-58
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• 2007

A cutting device capable of generating various shapes of the cyclic elliptical trajectory of a cutting tool was proposed and micro v-grooving experiments were performed to investigate the characteristics of elliptical vibration cutting (EVC). The proposed cutting device is comprised of a pair of parallel piezoelectric actuators with which harmonic voltages of varying phase difference and magnitude are supplied, creating various shapes of the elliptical tool path. The attributes of the elliptical locus involving the direction of the axis of an ellipse, the rotational direction and amplitudes of a trajectory were fine-tuned for stable operation of the EVC. The EVC characteristics performed with brass and copper revealed reduction in the cutting resistance and suppression of burr formation, resulting in the enhancement of form accuracy of machined micro-features. While the effect of the EVC increases with the increase of excitation frequency and the amplitude, it is found that a change in the cutting force decreases as the amplitude of an elliptical locus increases.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.947-952
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• 1997

The magnetic polishing is the useful method to finish using magnetic power of a magnet. The time hasn't been that long since the magnetic polishing method was introduced to korea as one of precision polishing techniques. However, the reasons for not being spreaded widely are the magnetic polishing method don't have mediocrity for machine, the efficiency of magnet-abrasive is confined as a bad polishing, and there are not many researchers in this field. The mechanism of this R&D is dealing with the dynamic state of magnet-abrasive. This paper deals with mediocritizing magnetic polishing device into regular lathe and this experiment was conducted in order to get a best surface roughness with low cost. Beside the subsidiary experiment was performed using the mixed magnet-abrasive with general alumina, barium. This paper introduced the main reason for difficulty using this method in industrial field. It needs more continues research on it. This paper contains the result of experiment to acquire the best surface roughness, not using the high-cost polishing material in processing. The average diameters of magnet-abrasive are the particles of 150 $\mu\textrm{m}$, 250 $\mu\textrm{m}$.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.690-693
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• 2003

Soft x-ray microscopy provides a unique set of capabilities in-between those of visible light and electron microscopy. It has long been recognized that nature provides a 'water window' spectral region between the K shell x-ray absorption edges of carbon (~290eV) and oxygen (~540eV), where organic materials show strong absorption and phase contrast, while water is relatively non-absorbing. This enables imaging of hydrated biological specimens that are several microns thick with high intrinsic contrast using x-rays with a wavelength of 2.3~4.4nm. Soft X-ray microscopy is therefore well suited to the study of specimens like single biological cells. The most direct advantage of X-ray microscope is their high spatial resolution when compared with visible light microscopes, combined with an ability to image hydrated specimens that are several microns with a minimum of preparation. Our study describes the conceptual design of soft x-ray microscope system based on a laser-based source for biomedical application with high resolution ($\leq$50nm) and short exposure time ($\leq$30sec).

• 한국정밀공학회지
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• 제31권12호
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• pp.1121-1126
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• 2014

To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.

• 한국정밀공학회지
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• 제14권8호
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• pp.130-136
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• 1997

For compensating the error motion of hydrostatic guideways, we introduce a way that the clearance of table is actively controlled corresponding to the amount of error with the variable capillary. The structure and the theoretical design method of active controlled capillary using piezo actuator, named ACC, are proposed in this paper. Basic characteristics such as the maximum controllable range, micro step response and available dynamic bandwidth are tested for confirmation of structural suitability of ACC, and these characteristics are also tested on the table mounted with ACC for verifying the availability. The experimental result showed that by the use of ACC, the error motion within 2.7 .mu. m of a hydrostatic guideway can be compensated with the resolution of 2.7nm, 1/100 contollable range, and the frequency bandwidth of 5.5 Hz. From these results, it is confirmed that the ACC is very effective to improve the motion accuracy of high or ultra precision hydrostatic guideways.

• Journal of Astronomy and Space Sciences
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• 제22권4호
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• pp.491-500
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• 2005

세계 각국은 국제적으로 통일된 시각동기 체계를 따르고 있으며 국가표준시 유지를 위하여 GPS(Global Positioning System)를 활용하고 있다. 현재 국내 GPS 기반 시각동기 연구는 코드데이터와 방송궤도력을 사용하고 있다. 이 연구에서는 보다 정확한 시계오차 추출을 위하여 반송파위상 데이터를 사용하였으며, 방송궤도력 뿐만 아니라 정밀궤도력, 신속궤도력, 그리고 초신속궤도력을 사용하였다. 정밀궤도력을 사용하여 산출된 시계오차를 참값으로 가정하였을 때, 신속궤도력과 초신속궤도력의 경우 약 0.5ns의 정밀도를 나타내었으며, 방송궤도력의 경우는 2ns 이하의 정밀도를 나타내었다.