• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1832-1835
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• 2003

This paper suggests the selective ultra precision polishing techniques for micro die and mold parts using magnetic-assisted machining. Fabrication of magnetic abrasive particle and their polishing performance are key technology at ultra precision polishing process of micro parts. Conventional magnetic abrasives have disadvantages. which are missing of abrasive particle and inequality between magnetic particle and abrasive particle. So, bonded magnetic abrasive particles are fabricated by several method. For example, plasma melting and direct bonding. Ferrite and carbonyl iron powder are used as magnetic particle where silicon carbide and Al$_2$O$_3$ are abrasive particle. Developed particles are analyzed using measurement device such as SEM. Possibility of magnetic abrasive and polishing performance of this magnetic abrasive particles also have been investigated. After polishing, surface roughness of workpiece is reduced from 2.927 $\mu\textrm{m}$ Rmax to 0.453 $\mu\textrm{m}$ Rmax.

• International Journal of Precision Engineering and Manufacturing
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• 제6권3호
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• pp.8-12
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• 2005

The positioning system for an ultra precision machine tool must be accurate to the order of a nanometer. Various feed drive devices have been proposed to achieve this resolution; currently, most attention is directed towards hydrostatic lead screws and friction drives. It has been reported that a positioning resolution accurate to an angstrom can be achieved using a twist-roller friction drive. Therefore, we manufactured an ultra precision positioning system driven by a twist-roller friction drive and assessed its performance when defining problems and finding solutions. Our study showed that the twist-roller friction drive is mechanically suitable for ultra precision positioning, but some considerations are required to obtain a higher resolution.

• 한국공작기계학회논문집
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• 제18권2호
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.162-166
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• 1996

This paper presents a position control of ultra-precision machine tool post using piezoelectric material. A stack-type piezoelectric actuator Is employed in a hinge-type tool holder. An assumed linear transfer function of the practical nonlinear plant is established through the comparison of transfer functions and step responses in the experiments and the simulations. Several types of feedforward/feedback controllers are designed via computer simulations using the assumed linear transfer function. The position tracking control experiments are undertaken to show the control efficiency of each controller.

• International Journal of Precision Engineering and Manufacturing
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• 제9권2호
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• pp.44-49
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• 2008

This paper describes the problem of ultraprecision positioning with a ball screw mechanism in the microdynamic range, along with its solution. We compared the characteristics of two ball screw mechanisms with different table masses. The experimental results showed that the vibration resulting from the low stiffness of the ball screw degraded the positioning performance in the microdynamic range for the heavyweight mechanism. The proposed nominal characteristic trajectory following (NCTF) controller was designed for ultra precision positioning of the ball screw mechanism. The basic NCTF control system achieved ultra precision positioning performance with the lightweight mechanism, but not with the heavyweight mechanism. A conditional notch filter was added to the NCTF controller to overcome this problem. Despite the differences in payload and friction, both mechanisms then showed similar positioning performance, demonstrating the high robustness and effectiveness of the improved NCTF controller with the conditional notch filter. The experimental results demonstrated that the improved NCTF control system with the conditional notch filter achieved ultra precision positioning with a positioning accuracy of better than 10 nm, independent of the reference step input height.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.233-234
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• 2006

For the machining of freeform surface, fly cutting is one of the key technology to meet profile accuracy and surface roughness simultaneously. Fly cutting can be applied to manufacturing of optical components with complex profile. In this study aluminum alloy was machined in the process of ultra precision fly cutting and investigated optimum machining conditions in terms of feed-rate, pitch per cycle and depth of cut.

• 한국정밀공학회지
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• 제27권6호
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• pp.17-23
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• 2010

Recent research topics of ultra-precision micro, nano machining using femtosecond lasers are described in the paper.

• 한국정밀공학회지
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• 제32권5호
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• pp.431-439
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• 2015

One of common challenges in designing modern production machines is realizing high speed motion without sacrificing accuracy. To address this challenge it is necessary to maximize the stiffness of the mechanical structure and the control system with consideration on the main disturbance input, cutting forces. This paper presents analysis technologies for realizing high stiffness in production machines. First, CAE analysis techniques to evaluate the dynamic stiffness of a machine structure and a new method to construct the physical machine model for servo controller simulations are demonstrated. Second, cutting forces generated in milling processes are analyzed to evaluate their effects on the mechatronics system. In the effort to investigate the interaction among the structure, controller, and process, a flexible multi-body dynamics simulation method is implemented on a magnetic bearing stage as an example. The presented technologies can provide better understandings on the mechatronics system and help realizing high stiffness production machines.

• 천문학논총
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• 제22권3호
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• pp.55-61
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• 2007

The KASINICS (Korea Astronomy and Space science Institute Near Infrared Camera System) is a ground-based near-infrared (NIR) imaging instrument. KASINICS has offner relay optics to reduce unwanted infrared light. For the offner optics, we adopted an ultra precision machining process which is installed at KBSI (Korea Basics Science research Institute). Since the offner relay optics is made of aluminum 6061 metal material, we did several tests to reach the specification. We found that a 0.497mm radius nose bite and 220m/min machining speed are best tool and condition to make this offner optics with the precision machine. In this paper, we report the technical method of ultra precision machining and results of the KASINICS offner optics.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2007년도 추계학술대회 논문집
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• pp.185-186
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• 2007