• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.94-99
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• 2005

Though the technology on the ultra-precise machining has been developed intensively, the high speed and high precision for large machining range is still very hard to achieve. The linear motor system fur the universal machining center is proper fur high speed and high precision, but it has drawback of sensitivity to disturbance. In this research, two degrees of freedom controller based on the zero phase error tracking controller (ZPETC) and disturbance observer are proposed to improve the tracking performance and dynamic stiffness of linear motor system. The proposed controller is verified in simulations and experiments on a nano-positioner system, and the experimental result shows that the tracking performance improved. In addition, the PID optimization method is proposed for the commercialized controller such as the PMAC based system. The tracking as well as impedance is included in the cost function of optimization.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.3-8
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• 2007

A machining system that generates accurate relative motions between the tool and workpiece is required to realize ultra precise machining or measurements. Accuracy improvements for each element of the machine are also required. This paper proposes a machining system that uses a compensation device for the six-degree-of-freedom (6-DOF) motion error between the tool and workpiece. The compensation device eliminates elastic and thermal errors of the joints and links due to temperature fluctuations and external forces. A hexapod parallel kinematics mechanism installed between the tool spindle and surface plate is passively actuated by a conventional machine. Then the parallel mechanism measures the 6-DOF motions. We describe the conception and fundamentals of the system and test a passively extensible strut with a compensation device for the joint errors.

• Design & Manufacturing
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• v.2 no.1
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• pp.33-38
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• 2008

As consumer in optics, electronics, aerospace and electronics industry grow, the demand for ultra precision aspherical surface lens increases higher. Precision turning with single-diamond tools has a long history of development for fabrication of optical quality surfaces since the advent of aerostatic rotary spindles and precise linear motion guide ways. To enhance the precision and productivity of ultra precision aspherical surface micro lens, the following specification of ultra precision grinding system is required: the highest rotational speed of the grinder is 100,000rpm and its turning accuracy is $0.1{\mu}m$, positioning accuracy is $0.1{\mu}m$. The development process of the grinding system for the ultra precision aspherical surface micro lens for optoelectronics industry is introduced. In the work reported in this paper, an intelligent grinding system for ultra precision aspherical surface machining was designed by considering the factors affecting the surface roughness and profiles accuracy. An aerostatic form was adopted to build the spindle of the workpiece and the spindle of grinder and ultra precision LM guide way was adopted in this system. And this paper deals with mirror grinding of an aspheric surface micro lens by resin bonded diamond wheel and spherical lens of BK7. It results was that a form accuracy of $0.6{\mu}m$ P-V and a surface roughness of $0.006{\mu}m$ Rmax.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.4
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• pp.747-754
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• 2013

This study introduces a recently designed desktop-sized NC turning system and its components. This machine is designed for the ultra-precise turning of parts with a diameter of 0.5-20 mm with minimum space usage for the machine. This study aims to achieve submicron-level accuracy of movements and good rigidity of the machine for precision machining using the desktop-sized machine. The components such as the main machine structure, air bearing servo spindle, and XZ stage with needle roller guides are designed, and the designed machine is built with a PC-based CNC controller. Its static and dynamic stiffness performances and positioning resolutions are tested. Through machining tests with single-crystal diamond tools, a form error less than $0.8{\mu}m$ and surface roughness (Ra) of $0.03{\mu}m$ for workpieces are obtained.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1265-1268
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• 2005

Due to the increase of the need for reliable high density information storage devices, the demand for precise machining of the slider in HDD is rapidly growing. The present fabrication process of slider bears some serious problems such as low yield ratio in mass production, which is mainly caused by inefficient machining processes in shaping camber and crown on the slider. In order to increase slider yield ratio in HDD, a new systematic machining process is proposed and developed in this work. This new machining process includes the use of magnetorheological (MR) fluid, a smart polishing material generally used for ultra-fine surface finishing of micro structures. It is shown that the process proposed in this work enables to make camber and crown pattern in the scale of few tens of nanometers. Experiment results shows that the MR polishing can be also used for shaping process of micro structures.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.598-603
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• 2005

Recently, the advanced industries using micro parts are rapidly growing. The appearance of ultra-precision feed mechanism and the development of control system make it possible to process parts in sub millimeter scale by mechanical methods. Micro endmilling is one of the prominent technology that has wide spectrum of application field ranging from macro parts to micro products. So, micro stairs have been trying to cut by using high revolution air turbine spindle and micro-endmill, and studying for magnitude of cutting force. This investigation deals removal characteristics of burr generated by micro endmilling process. Also, decreasing of burr is significant problem in making smooth and precise parts in micro endmilling. In micro endmilling, the material removal rate(MRR) and cutting forces are very small. This paper presents an investigation on the machining characteristics for micro stairs by using ultrahigh-speed air turbine spindle in machining.

• Design & Manufacturing
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• v.12 no.2
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• pp.16-21
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• 2018

Recently, as the demand for high-precision parts increases due to industrial development, a machine tool system for ultra-precision machining and polishing has been actively developed. As a result, there is an increasing demand for ultra-precision surface roughness along with dimensional processing. However, due to the increase in processing time due to the demand for ultra-precise surfaces and enormous facility investment, it is difficult to secure competitiveness. The polishing process using the abrasive film in super precision machining has been applied to machines, electronic devices, aerospace, and medical fields. Super finishing using the abrasive film which is applied in the industrial field recently can achieve high surface roughness in a short time. Super finishing using the abrasive film which is applied in the industrial field recently can achieve high surface roughness in a short time. Also, application of industrial field is increasing due to advantages such as low noise and low dust. Recently, researches on stainless steel having strong resistance to corrosion, heat resistance, heat resistance, toughness and weldability have been actively conducted with respect to the nuclear energy industry or marine development. Therefore, in this study, surface roughness and residual stress were measured after SUS304 polishing using dynamic analysis of film polishing apparatus and polishing film.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.5
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• pp.367-373
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• 2014

Surface texturing is a machining process on the surface to give engineering functions. The representative process of the surface texturing is lotus effect to give hydrophobic property by the lithography and chemical etching, which is the bio mimic from the nature. Surface texturing can be manufactured by a lot of processes, in particular using mechanical method such as a precise diamond turning, grinding, rolling, embossing, vibrorolling, and abrasive jet machining (AJM). Among them, the grinding process is notable in terms of the wide range of texturing area and fast processing time. The patterning by grinding is done by the grooved grinding wheel on the work piece. In this case, the pattern shape is determined by the grinding conditions as well as the wheel dressing conditions. In this paper, experimental study on the pattern shapes were done and provide the feasibility in use for the large area patterning.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.12
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• pp.5412-5419
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• 2011

The need is growing for high-speed spindle because various equipment are becoming more precise, miniaturization and high speed with the development of industries. Air-lubricated dynamic bearings are widely used in the optical lithographic manufacturing of wafers to realize nearly zero friction for the motion of the stage. Air-lubricated dynamic bearing can be used in high-speed, high-precision spindle system and hard disk drive(HDD) because of its advantages such as low frictional loss, low heat generation, averaging effect leading better running accuracy. In the paper, numerical analysis is undertaken to calculate the performance of air-lubricated dynamic bearing with herringbone groove. The static performances of herringbone groove bearings which can be used to support the thrust load are calculated. Electrochemical micro machining($EC{\mu}M$) which is non-contact ultra precision machining method has been developed to fabricate the air-lubricated dynamic bearing and optimum parameters which are inter electrode gap size, concentration of electrolyte, machining time are simulated using numerical analysis program.