• Proceedings of the Korean Environmental Sciences Society Conference
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• 1998.10a
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• pp.1-1
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• 1998

Advanced (Chemical) oxidation processes (AOP) differ from most conventional ones in that hydroxyl radical(OH.) is considered to be the primary oxidant. Hydroxyl radicalcan react non-selectively with a great number of organic and inorganic chemicals. The typical rate constants of true hydroxyl radical reactions are in the range of between 109 to 1012 sec-1. Many processes are possible to generate hydroxyl radical. These include physical and chemical methods and their combinations. Physical means involves the use of high energy radiation such as gamma ray, electron beam, and acoustic wave. Under an applied high energy radiation, water molecules can be decomposed to yield hydroxyl radicals or aqueous electrons. Chemical means include the use of conventional oxidants such as hydrogen peroxide and ozone, two of the most efficient oxidants in the presence of promoter or catalyst. Hydrogen peroxide in the presence of a catalyst such as divalent iron ions can readily produce hydroxyl radicals. Ozone in the presence of specific chemical species such as OH- or hydrogen peroxide, can also generate hydroxyl radicals. Finally the combination of chemical and physical means can also yield hydroxyl radicals. Hydrogen peroxide in the presence of acoustic wave or ultra violet beam can generate hydroxyl radicals. The principles for hydroxyl radical generation will be discussed. Recent case studied of AOP for water treatment and other environmental of applications will be presented. These include the treatment of contaminated soils using electro-Fenton, lechate treatment with conventional Ponton, treatment of coal for sulfur removal using sonochemical and the treatment of groundwater with enhanced sonochemical processes.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.207-207
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• 2010

Both ZnO and GaN have excellent physical properties in optoelectronic devices such as blue light emitting diode (LED), blue laser diode (LD), and ultra-violet (UV) detector. The ZnO/GaN heterostructure, which has a potential to achieve the cost efficient LED technology, has been fabricated by using radio frequency (RF) sputtering, pyrolysis, metal organic chemical vapor deposition (MOCVD), direct current (DC) arc plasmatron, and pulsed laser deposition (PLD) methods. Among them, the PLD system has a benefit to control the composition ratio of the grown film from the mixture target. A 500-nm-thick ZnO film was grown by PLD technique on c-plane GaN/sapphire substrates. The post annealing process was executed at some varied temperature between from $300^{\circ}C$ to $900^{\circ}C$. The morphology and crystal structural properties obtained by using atomic force microscope (AFM) and x-ray diffraction (XRD) showed that the crystal quality of ZnO thin films can be improved as increasing the annealing temperature. We will discuss the post-treatment effect on film quality (uniformity and reliability) of ZnO/GaN heterostructures.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.19 no.5
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• pp.442-449
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• 2006

Electrical, optical, and structural properties of indium zinc oxide (IZO) films grown by a box cathode sputtering (BCS) were investigated as a function of oxygen flow ratio. A sheet resistance of $42.6{\Omega}/{\Box}$, average transmittance above 88% in visible range, and root mean spare roughness of $2.7{\AA}$ were obtained even in the IZO layers grown at room temperature. In addition, it is shown that electrical characteristics of the top-emitting organic light emitting diodes (TOLEDs) with the BCS grown-IZO top cathode layer is better than that of TOLEDs with DC sputter grown IZO top cathode, due to absence of plasma damage effect. Furthermore the effects of oxygen flow ratio in IZO films are investigated, based on x-ray photoelectron spectroscopy (XPS), ultra violet/visible (UV/VIS) spectro-meter, scanning electron microscopy (SEM), and atomic force microscopy (AFM) analysis results.

• Korean Journal of Metals and Materials
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• v.50 no.7
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• pp.545-548
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• 2012

The optical and electronic properties of Indium Tin Oxide (ITO) thin films deposited on a RF-plasma treated glass substrate were investigated by X-Ray Photoelectron Spectroscopy (XPS), Ultra-violet Photoelectron Spectroscopy (UPS), Reflected Electron Energy Loss Spectroscopy (REELS). The modification of glass substrates was carried out by varying the time of the plasma surface treatment in an oxygen atmosphere. The focus of this research was to examine how the optical and electronic properties of ITO thin films change with the plasma treatment time. The surface energy increased since the carbon bonds were removed from the surface after the glass substrate received the surface treatment. The ITO thin films produced on the glass substrate with surface treatment showed that the high optical transmittance was approximately 85%. The measured band gap energy was as high as 3.23 eV when the plasma treatment time was 60 s and the work function after the treatment was increased by 0.5 eV in comparison to that before the treatment of 60 s. The ITO thin film exhibited an excellent sheet resistance of $2.79{\Omega}/{\Box}$. We found that the optical and electronic properties of ITO thin films can be improved by RF-plasma surface treatment.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.285-285
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• 2011

EUVL (Extreme Ultra Violet Lithography) is one of competitive lithographic technologies for sub-30nm fabrication of nano-scale Si devices that can possibly replace the conventional photolithography used to make today's microcircuits. Among the core EUVL technologies, mask fabrication is of considerable importance since the use of new reflective optics having a completely different configuration compared to those of conventional photolithography. Therefore new materials and new mask fabrication process are required for high performance EUVL mask fabrication. This study investigated the etching properties of SnO2 (Tin Oxide) as a new absorber material for EUVL binary mask. The EUVL mask structure used for etching is SnO2 (absorber layer) / Ru (capping / etch stop layer) / Mo-Si multilayer (reflective layer) / Si (substrate). Since the Ru etch stop layer should not be etched, infinitely high selectivity of SnO2 layer to Ru ESL is required. To obtain infinitely high etch selectivity and very low LER (line edge roughness) values, etch parameters of gas flow ratio, top electrode power, dc self - bias voltage (Vdc), and etch time were varied in inductively coupled Cl2/Ar plasmas. For certain process window, infinitely high etch selectivity of SnO2 to Ru ESL could be obtained by optimizing the process parameters. Etch characteristics were measured by on scanning electron microscopy (SEM) and X-ray photoelectron spectroscopy (XPS) analyses. Detailed mechanisms for ultra-high etch selectivity will be discussed.

• Journal of Korean Ophthalmic Optics Society
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• v.13 no.1
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• pp.71-76
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• 2008

Purpose: A simple and efficient method to prepare nanocrystalline ZnO thin film with pure strong UV emission on soda-lime-silica glass substrates by low-temperature annealing was improved. Methods: Crystal structural, surface morphological, and optical characteristics of nanocrystalline ZnO thin films deposited on soda-lime-silica glass substrates by prefiring final annealing process at 300$^{\circ}C$ were investigated by using X-ray diffraction analysis, field emission-scanning electron microscope, scanning probe microscope, ultraviolet-visible-near infrared spectrophotometer, and photoluminescence. Results: Highly c-axis-oriented ZnO films were obtained by prefiring at 300$^{\circ}C$. A high transmittance in the visible spectra range and clear absorption edge in the ultra violet range of the film was observed. The PL spectrum of ZnO thin film with a deep near band edge emission was observed while the defect-related broad green emission was nearly quenched. Conclusions: Our work will be possibly adopted to cheaply and easily fabricate ZnO-based optoelectronic devices at low temperature, below 300$^{\circ}C$, in the future.

• Journal of Korean Society of Water and Wastewater
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• v.9 no.4
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• pp.87-96
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• 1995

The Electron/Hole Pair is generated when the activation energy produced by ultraviolet ray illuminates to the semiconductor and OH- ion produced by water photocleavage reacts with positive Hole. As a results, OH radical acting as strong oxidant is generated and then Photocatalytic oxidation reaction occurs. The photocatalytic oxidation can oxidate the non-degradable and hazardous organic substances such as pesticides and aromatic materials easier, safer and shorter than conventional water treatment process. So in this study, many factors influencing the oxidation of chlorophenols, such as inorganic electrolytes addition, change of oxygen and nitrogen atmosphere, temperature, pH, oxygen concentration, chlorophenol concentration, were throughly examined. According to the experiments observations, it is founded that the rate of chlorophenol oxidation follows a first-order reaction and the modified Langmuir-Hinshelwood relationship. And the photocatalytic oxidation occurs only when activation energy acting as Electron/Hole generation, oxygen acting as electron acceptor to prevent Electron/Hole recombination, $TiO_2$ powder acting as photocatalyst are present. The effects of variation of dissolved oxygen concentration, temperature and inorganic electrolytes concentration on 2-chlorophenol oxidation are negligible. And the lower the organic concentration, the higher the oxidation efficiency becomes. Therefore, the photocatalytic oxidation is much effective to oxidation of hazardous substances at very low concentration. The oxidation is effective in the range of 0.1 g/L-10 g/L of $TiO_2$. Finally when the ultra-violet ray is illuminated to $TiO_2$, the surface characteristics of $TiO_2$ change and Adsorption/Desorption reaction on $TiO_2$ surface occurs.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.74-74
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• 2011

최근 새로운 형태의 디스플레이에 관한 관심이 집중되고 있다. 이들 중 특히 투명 산화물 반도체는 기존의 실리콘 기반의 반도체에 비해 가시광 영역에서 높은 투과도를 보이며, 또한 기존의 비정질 실리콘 소자에 비해서 10 cm2/Vs이상의 높은 전하 이동도 값을 가진다. 본 연구에서는 투명 산화물 반도체 소재 중 InGaZnO4를 사용하여 펄스 레이저 방법으로 Al2O3 (0001)기판 위에 비정질 상태인 a-InGaZnO4 박막을 성장 시켰다. 박막의 증착 온도를 변화(RT, $50^{\circ}C$, $150^{\circ}C$, $250^{\circ}C$, $450^{\circ}C$, $550^{\circ}C$)시켜 성장된 박막의 구조적, 화학적, 전기적 그리고 광학적 특성을 조사하였다. 증착 온도가 $450{\sim}550^{\circ}C$ 사이에서 박막의 상태가 비정질(amorphous)에서 polycrystalline으로 성장되는 것을 X-Ray Diffraction과 Field Emission-Scanning Electron Microscope를 이용하여 확인하였고 이는 InGaZnO4 박막의 결정화 온도가 $450^{\circ}C$ 이상임을 알 수 있었다. X-ray Photoelectron Spectroscopy를 통해서 target 물질과 성장된 박막의 조성 및 화학적 상태를 고찰한 결과, 박막의 결정성 변화가 화학적 상태 변화와는 무관하다는 사실을 알 수 있었다. 온도 의존 비저항 측정을 통해 박막이 반도체 성향을 가지는 것을 확인 하였다. 또한 Hall 측정 결과 증착 온도가 올라 갈수록 전하 밀도는 증가 하지만, 전하 이동도는 다결정 박막($550^{\circ}C$)에서 급격히 감소하고, 이로 인해 비저항 값이 크게 증가함을 알 수 있었다. 이는 다결정 박막 내 존재하는 grain boundary들이 이동도 값에 영향을 준다는 것으로 추측할 수 있다. Ultra violet-Visible-Near Infrared 측정을 통해 가시광 영역에서 80%이상의 투과율을 나타내며 증착 온도가 증가함에 따라 에너지 밴드갭(Eg)이 커지는 것을 확인 할 수 있는데 이는 Hall 측정 결과에서 확인한 전하 밀도의 증가로 인해 에너지 밴드갭이 커지는 Burstein-Moss 효과로 설명할 수 있다.

• Journal of Sericultural and Entomological Science
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• v.30 no.1
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• pp.33-39
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• 1988

In the case of white cocoon, the fluorescence colors are classified as a yellowish fluorescence cocoon(Y.F.C.) and a violet fluorescence cocoon(V.F.C.) by exposing to ultra-violet ray. Accordingly, experiments were carried out to investigate the difference of sericin behaviors between Y.F.C. and V.F.C. by measuring the sericin solubility, surface tension and viscosity of the sericin solution. Also, the reelability of two different type of cocoons was investigated in the silk reeling process. The results were summarized as follows; 1. The sericin solubility of Y.F.C. shell is higher than that of V.F.C. shell with the dissolution temperature and time. It is shown that the sericin solubility curves of Y.F.c. and V.F.C. are similar in shape, but the difference of sericin solubility between Y.F.C. and V.F.C. is more significant at higher bath temperature. 2. The initial sericin dissolution curves of Y.F.C. and V.F.C. cocoon shell can be divided by four parts within the range of dissolving time from 5 minutes to 60 minutes. The initial dissolution velocity of Y.F.C. shell is faster than that of V.F.C. but the velocity difference is negligible after 30 minutes of dissolving time. 3. The gelation of V.F.C. sericin solution is faster than that of Y.F.C. at early stage(in the range of 15 minutes to 60 minutes). 4. In the silk reeling process, the reelability of Y.F.C. is better than that of V.F.C. with about 11%. This is mainly due to the higher sericin solubility in Y.F.C. followed by the fast dissolution velocity.

• Korean Journal of Materials Research
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• v.12 no.11
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• pp.840-844
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• 2002

A spherical $BaMgAl_{10}$ $O_{17}$ :Eu phosphor has been synthesized by a multi-step precipitation route. In order to successfully synthesize the phosphor with spherical shape, the hydrated-alumina particles should be controlled for spherical shape. In this process, the hydroxypropyl cellulose (HPC) was used as a dispersing reagent. This reagent plays an important role in that the particles were controlled to have the uniform size of sub-micron. The final product prepared by the multi-step precipitation method maintained spherical shape with uniform size of 0.4$\mu\textrm{m}$. It can be seen in X-ray diffraction patterns, formation of the single phase of $BaMgAl_{10}$ $O_{17}$ :Eu phosphor prepared by the multi-step precipitation method at $1350^{\circ}C$. Also, the emission spectra of spherical $BaMgAl_{O}$ $10_{17}$ :Eu phosphor in the present case was compared with those of commercially-available blue phosphor under VUV (Vacuum Ultra Violet) excitation. The luminescence process of the $BaMgAl_{10}$ $O_{17}$ :Eu phosphor is characterized by the $4f^{6}$$5d^1$longrightarrow4f$^{7}$ transition (blue) of the $Eu^{2+}$ ion acting as an activating center and the maximum luminescence intensity was obtained by reduction treatment at 145$0^{\circ}C$.