• Journal of the Korean institute of surface engineering
• /
• v.34 no.5
• /
• pp.494-498
• /
• 2001

Ferromagnets(FM)-Al-$O_{x}$ -Ferromagnets (FM) tunneling junctions were evaluated by changing the fabricating conditions of an Al-X$/_{x}$ layer. The junction composed of a thicker Al-$O_{x}$ shows the low resistance and the stable MR ratio about 16% in a wide range of oxidation time. For the junctions with the thinner Al-$O_{x}$ , they showed a fast increase of the barrier width as an increase of an oxidation time and exhibited a strong bias dependence. As oxidation time increased, the coercivity ($H_{c}$ ) of bottom Co layer increased gradually due to the local oxidation of Co bottom layer at a interface. However, the small formation of Co oxide did not largely influence on the deterioration of MR ratio.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2014.05a
• /
• pp.50-51
• /
• 2014

• Proceedings of the KIEE Conference
• /
• 2001.07c
• /
• pp.1402-1404
• /
• 2001

Josephson junction arrays of the type $Nb/Al-Al_2O_3/Nb$ were prepared by DC magnetron sputtering. The tunnel barrier was formed by in-situ thermal oxidation. Individual junctions were defined using selective niobium etching process(SNEP). The characteristic curves of Josephson junction arrays fabricated with and without cooling the substrate were represented. The junctions deposited without cooling showed poor characteristics(high leakage current, low gap voltage), and a high quality Josephson junction array of 2,000 junctions with high hysteresis was obtained with cooling and when operated at 74.6 GHz, it generated stable quantized voltage steps up to 2.2 V.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2010.06a
• /
• pp.358-358
• /
• 2010

To improve the programming/erasing speed and leakage current of multiple dielectric stack tunnel barrier engineering (TBE) Non-volatile memory, We propose a new concept called staggered structure of TBE memory. In this study, We fabricated staggered structure capacitor on $Si_3N_4$ stacked HfAlO and measured C-V curve that can observe tunneling characteristic of this device as various annealing temperature compared with that of single layer $SiO_2$ capacitor.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.124-125
• /
• 2008

The charge trapping and tunnelling characteristics with various thickness of $Si_3N_4$ layer were investigated for application of TBE (Tunnel Barrier Engineered) non-volatile memory. We confirmed that the critical thickness of no charge trapping was existed with decreasing $Si_3N_4$ thickness. Also, the charge trap centroid x and charge trap density were extracted by using CCS (Constant Current Stress) method. Through the optimized thickness of $Si_3N_4$ layer, it can be improve the performance of non-volatile memory.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2000.07a
• /
• pp.243-246
• /
• 2000

The sputtering systems mainly consist of the three-target holder. The target and substrate were the on-axis type. The MgO and STO substrate were used for the deposition of each layer. The optimum conditions of single-layer thin film were investigated from the SEM images and the XRD patterns. Based on the above conditions, the multi-layer thin films such as YBaCuO/LaGaO/Au/Nb and YBaCuO/Au/Nb were fabricated. The crystalline, the electrical Properties, the energy gap structure and the characteristics of the tunneling barrier on the multi-layer thin film have been investigated and characterized.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.02a
• /
• pp.212-212
• /
• 2010

최근 차세대 반도체 메모리 소자로 대두된 magnetic random access memory(MRAM)에 대한 연구가 활발히 진행되고 있다. 특히 MRAM의 magnetic tunnel junction(MTJ) stack을 구성하는 자성 재료의 건식 식각에 대한 연구에서는 좋은 profile을 얻고, 재층착의 문제를 해결하기 위한 노력이 계속해서 진행되고 있다. 본 연구에서는 photoresist(PR)과 Ti 하드 마스크로 패턴 된 배리어(barrier) 층인 MgO 박막의 식각 특성을 유도결합 플라즈마를 이용한 고밀도 반응성 이온 식각(inductively coupled plasma reactive ion etching-ICPRIE)을 통해서 연구하였다. PR 및 Ti 마스크를 이용한 자성 박막들은 HBr/Ar, HBr/$O_2$/Ar 식각 가스의 농도를 변화시키면서 식각되었다. HBr/Ar 가스를 이용 식각함에 있어서 좋은 식각 조건을 얻기 위한 parameter로서 pressure, bias voltage, rf power를 변화시켰다. 각 조건에서 Ti 하드마스크에 대한 터널 배리어층인 MgO 박막에 selectivity를 조사하였고 식각 profile을 관찰하였다. 식각 속도를 구하기 위해 alpha step(Tencor P-1)이 사용되었고 또한 field emission scanning electron microscopy(FESEM)를 이용하여 식각 profile을 관찰함으로써 최적의 식각 가스와 식각 조건을 찾고자 하였다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
• /
• 2013.10a
• /
• pp.563-563
• /
• 2013

Railway noise has been a social issues nowadays in our community. This paper discusses the environmental noise problem along railway lines. We overview the noise level and noise exposed populations due to conventional and high speed train operation at first. Then we introduce variety of noise reduction schemes to protect the community based on an engineering approach. Some applicationcases to reduce the noise will be demonstrated. Finally, we propose the noise barrier tunnel as a tool of a generic solution to reduce the community noise along railway lines.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2005.06a
• /
• pp.92-93
• /
• 2005

• Journal of the Korean Geotechnical Society
• /
• v.22 no.6
• /
• pp.71-82
• /
• 2006

One of the most popular pre-reinforcement methods of tunnel heading in cohesionless soils would be the fore-polling of grouted pipes, known as RPUM (reinforced protective umbrella method) or UAM (umbrella arch method). This technique allows safe excavation even in poor ground conditions by creating longitudinal arch parallel to the tunnel axis as the tunnel advances. Some previous studies on the reinforcing effects have been performed using numerical methods and/or laboratory-based small scale model tests. The complexity of boundary conditions imposes difficulties in representing the tunnelling procedure in laboratory tests and theoretical approaches. Full-scale study to identify reinforcing effects of the tunnel heading has rarely been carried out so far. In this study, a large scale model testing for a tunnel in granular soils was performed. Reinforcing patterns considered are four cases, Non-Reinforced, Crown-Reinforced, Crown & Face-Reinforced, and Face-Reinforced. The behavior of ground and pipes as reinforcing member were fully measured as the surcharge pressure applied. The influences of reinforcing pattern, pipe length, and face reinforcement were investigated in terms of stress and displacement. It is revealed that only the Face-Reinforced has decreased sufficiently both vertical settlement in tunnel heading and horizontal displacement on the face. Vertical stresses along the tunnel axis were concentrated in tunnel heading from the test results, so the heading should be reinforced before tunnel advancing. Most of maximum axial forces and bending moments for Crown-reinforced were measured at 0.75D from the face. Also it should be recommended that the minimum length of the pipe is more than l.0D for crown reinforcement.